Direct Visualisation of Stored Charges in PECVD ONO-Layers by Kelvin-Probe-Force-Microscopy
Author: | Florian Emmerich, Christiane Thielemann |
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Parent Title (German): | 15th International Symposium on Electrets ISE |
Place of publication: | Baltimore, USA |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2014 |
Release Date: | 2015/06/09 |
GND Keyword: | Kelvin-Sonde; Rasterkraftmikroskop |
Volume: | 2014 |
Urheberrecht: | 0 |
research focus : | Intelligent Systems / Artifical Intelligence and Data Science |
Intelligent Systems / Clean Tech | |
Intelligent Systems / Intelligent Sensors and Signals | |
Materials / Material Testing & Sensor Technology | |
Licence (German): | Keine Lizenz - es gilt das deutsche Urheberrecht |