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Patterning of PMMA by gold-nanoparticle initiated localized decomposition

  • The need for manipulating matter at its smallest scale has been a hot topic in research for the last decades. As the final goal of arranging single atoms has been achieved, research focuses on two targets: firstly, improving the capabilities of existing technologies towards nanometer resolution and secondly, finding new methods for producing nanostructures in a fast and easy way. Here, we present a new maskless method for sub-micro-patterning of poly(methyl methacrylate) (PMMA) thin films. By applying atomic-force-microscope (AFM) assisted nano-xerography, electric charges were locally injected with an AFM-tip into PMMA. The resulting electrostatic patterns attracted charged gold-nanoparticles, which were selectively deposited onto the PMMA layers with lateral dimensions below 200 nm. In a second step, heat treatment at 275 °C initiated a selective decomposition of the PMMA layer, only observed in PMMA-areas covered with nanoparticles, whereas uncovered areas were not modified by the heat treatment. Analyzing the grooves with the AFM, we found that lines with a width in the sub-micrometer range to several micrometers have successfully been realized. We propose this new and promising method to manufacture nano-grooves used as masking for lift-off processes, for functionalization of underlying areas, or for micro-contact-printing.

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Metadaten
Author:Florian Emmerich, Christiane Thielemann
DOI:https://doi.org/10.1109/3M-NANO.2015.7425480
Parent Title (English):2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Changchun, China
Document Type:Conference Proceeding
Language:English
Year of Completion:2015
Release Date:2020/04/29
Tag:Electrostatics; Gold; Heating; Nanoparticles; Thermal stability
GND Keyword:Polymethylmethacrylate; Dünnschichttechnik
Urheberrecht:0
research focus :Intelligent Systems / Artifical Intelligence and Data Science
Intelligent Systems / Clean Tech
Intelligent Systems / Intelligent Sensors and Signals
Materials / Material Testing & Sensor Technology
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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