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Thin-film Micro-Heater for Fusion Bonding of Teflon-FEP Foils

  • MEMS-based Micro-Heaters, in combination with thin-film temperature sensors, are often used for providing the necessary amount of thermal energy for sensor-applications. In this work, we propose an integrated micro-heater as actuator for fusion bonding of polymers, which can optimize the production process of electret-based micro-energy-harvesters. By adjusting the design parameters of thermoforming-molds, we can implement thin-film micro-heaters that are capable of generating temperatures of above 300°C for numerous cycles. Utilizing the integrated micro-heater allows local fusion bonding of Fluoroethylenepropylene (Teflon-FEP) foils on a micrometer-scale while reducing unnecessary thermal stress. This is beneficial for the longevity of the micro-energy-harvesters, while simultaneously improving its performance.
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Metadaten
Author:Florian Emmerich, Stefan Ciba
Parent Title (English):21th International Student Conference on Electrical Engineering POSTER 2017
Document Type:Other
Language:English
Year of Completion:2017
Release Date:2020/04/28
Tag:Energy-Harvesting; Fusion Bonding; Micro-Heater; SU-8; Teflon-FEP
GND Keyword:Mikrosystemtechnik
Volume:2017
Issue:POSTER 2017
First Page:1
Last Page:5
Urheberrecht:1
Institutes:Fakultät Ingenieurwissenschaften / Labore / BIOMEMS Lab
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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