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Micromilling-assisted fabrication of monolithic polymer ridge-type waveguides with integrated photonic sensing structures

  • This study demonstrates and discusses a novel approach for the fabrication and rapid prototyping of monolithic photonic platforms comprising a ridge-type waveguide with integrated sensing structures. First, the bulk injection-molded cyclic olefin copolymer substrates are micromilled in order to define the physical extension of the ridge structure. Cross-sections down to 30 × 30 µm2, exhibiting a mean surface roughness of 300 nm, are achieved with this process. Subsequently, UV radiation is used to modify the ridge structure’s refractive index, which leads to the formation of an optical waveguide. By employing a phase mask, it is possible to equip the photonic platform with a Bragg grating suitable for temperature measurements with a sensitivity of −5.1 pm K-1. Furthermore, an integrated Fabry-Pérot cavity, generated during the micromilling step as well, enables refractive index measurements with sensitivities up to 1154 nm RIU-1.
Metadaten
Author:Stefan KeferORCiD, Dominik Pape, Gian-Luca Roth, Steffen HesslerORCiD, Bernhard SchmaussORCiD, Ralf HellmannORCiD
URL:https://www.osapublishing.org/ome/fulltext.cfm?uri=ome-11-8-2389&id=453071
DOI:https://doi.org/https://doi.org/10.1364/OME.425778
Parent Title (English):Optical Materials Express
Document Type:Article
Language:English
Year of Completion:2021
Date of first Publication:2021/07/07
Release Date:2021/07/12
Tag:Bragg Grating; Cyclic Olefin Copolymers; Fabry-Pérot Etalon; Micromilling
GND Keyword:Bragg-Reflektor; Optischer Sensor
Volume:11
Issue:8
First Page:2389
Last Page:2400
Urheberrecht:1
research focus :Intelligent Systems / Intelligent Sensors and Signals
Materials / Innovative Material Processing
Materials / Material Testing & Sensor Technology
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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