Laser Alloying Nickel on 4H-Silicon Carbide Substrate to Generate Ohmic Contacts
Author: | Benedikt Adelmann, Andreas Hürner, Tobias Schlegel, Anton Bauer, Lothar Frey, Ralf HellmannORCiD |
---|---|
Parent Title (English): | Journal of Laser Micro/Nanoengineering |
Document Type: | Article |
Language: | English |
Year of Completion: | 2013 |
Release Date: | 2014/08/27 |
GND Keyword: | Ohm-Kontakt; Nickellegierung |
Volume: | 8 |
Issue: | 1 |
First Page: | 97 |
Last Page: | 101 |
Urheberrecht: | 0 |
research focus : | Intelligent Systems / Intelligent Sensors and Signals |
Materials / Innovative Material Processing | |
Materials / Material Testing & Sensor Technology | |
Licence (German): |