Laserscribing of thin films using top-hat laser beam profiles
Author: | Stefan RungORCiD, Mal Rexhepi, Christian Bischoff, Ralf HellmannORCiD |
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Parent Title (English): | Journal of Laser Micro/Nanoengineering |
Document Type: | Article |
Language: | English |
Year of Completion: | 2013 |
Release Date: | 2014/08/28 |
Tag: | Laser scribing; Top-Hat; laser beam shaping |
GND Keyword: | Dünne Schicht; Laser |
Volume: | 8 |
Issue: | 3 |
First Page: | 309 |
Last Page: | 314 |
Urheberrecht: | 1 |
research focus : | Intelligent Systems / Intelligent Sensors and Signals |
Materials / Innovative Material Processing | |
Materials / Material Testing & Sensor Technology | |
Licence (German): |