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Acceleration of Femtosecond Reductive Laser Sintering of Copper(II) Oxide for Conductive Copper Patterns on Cyclic Olefin Copolymers

  • We report on the acceleration of femtosecond reductive laser sintering of copper (II) oxide on the surface of transparent cyclic olefin copolymers (COC) by varying the focus size to generate metallic copper (Cu) layers. By using different focusing conditions, different process speeds are achieved, and the structural accuracies are controlled. The formation of Cu lines is observed for different focus sizes at various scan speeds, which is attributed to laser exposure duration and chemical reaction time. The formed lines are categorized and measured by optical microscopy and provide the basis for two-dimensional Cu surfaces. By hatching, high quality conductive films are produced with an increased focus diameter of up to 400 µm at a scan speed of 400 mm/s and a hatch distance of 250 µm resulting in a multiple increased process speed by a factor of thirteen compared to previous research. Using 4-tip measurement , a low sheet resistance of 0.165 Ω/sq was validated on these Cu films, which have an atomic Cu content of 89.5%.
Metadaten
Author:Kay BischoffORCiD, Cemal Esen, Ralf HellmannORCiD
Parent Title (English):International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023
Document Type:Conference Proceeding
Language:English
Year of Completion:2023
Release Date:2024/02/27
GND Keyword:Femtosekundenlaser
Urheberrecht:0
Institutes:Fakultät Ingenieurwissenschaften / Labore / Angewandte Lasertechnik und Photonik (alp)
research focus :Materials / Innovative Material Processing
Reviewed:nein
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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