Laser thin film ablation with multiple beams and tailored beam profiles
Author: | Stefan RungORCiD, Christian Bischoff, Erwin Jäger, Udo Umhofer, Ralf HellmannORCiD |
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Parent Title (English): | Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2014 |
Release Date: | 2014/08/28 |
Tag: | Ablation; Beam-Splitter; Parallel Processing; Thin film; Top-Hat |
GND Keyword: | Laserablation; Dünnschichttechnik |
Volume: | 8967 |
Urheberrecht: | 1 |
research focus : | Intelligent Systems / Intelligent Sensors and Signals |
Materials / Innovative Material Processing | |
Materials / Material Testing & Sensor Technology | |
Licence (German): | Keine Lizenz - es gilt das deutsche Urheberrecht |