ITO thin film laser patterning by picosecond laser
Author: | Anna Risch, Ralf HellmannORCiD |
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Parent Title (English): | Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2011 |
Date of first Publication: | 2014/05/06 |
Release Date: | 2014/05/06 |
GND Keyword: | Laserbearbeitung |
First Page: | 63 |
Last Page: | 68 |
research focus : | Intelligent Systems / Intelligent Sensors and Signals |
Materials / Innovative Material Processing | |
Materials / Material Testing & Sensor Technology | |
Licence (German): |