Real-space measurement of potential distribution in PECVD ONO electrets by Kelvin probe force microscopy

  • Multilayers of silicon oxide/silicon nitride/silicon oxide (ONO) are known for their good electret properties due to deep energy traps near the material interfaces, facilitating charge storage. However, measurement of the space charge distribution in such multilayers is a challenge for conventional methods if layer thickness dimensions shrink below 1 μm. In this paper, we propose an atomic force microscope based method to determine charge distributions in ONO layers with spatial resolution below 100 nm. By applying Kelvin probe force microscopy (KPFM) on freshly cleaved, corona-charged multilayers, the surface potential is measured directly along the z-axis and across the interfaces. This new method gives insights into charge distribution and charge movement in inorganic electrets with a high spatial resolution.

Download full text files

Export metadata

Additional Services

Share in Twitter Search Google Scholar
Author:Florian Emmerich, Christiane Thielemann
Parent Title (English):Nanotechnology
Document Type:Article
Year of Completion:2016
Date of first Publication:2016/04/07
Release Date:2018/02/26
Tag:electret, multilayer, charge distribution, Kelvin probe force microscopy
GND Keyword:Kelvin-Sonde; Rasterkraftmikroskopie
First Page:1
Last Page:10
Institutes:Fakultät Ingenieurwissenschaften / Labore / BIOMEMS
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht