Integration of Microfluidic and Photonic Components within Transparent Cyclic Olefin Copolymers by Using fs Laser

  • In this study, we report on the integration of microfluidic channels and optical components by focusing femtosecond laser radiation inside transparent cyclic olefin copolymer (COC) bulk material. An internal localized material modification is triggered based on nonlinear absorption of the laser radiation's high intensities inside the focal volume. The size and shape of the three-dimensional internal modification are controlled by using an adaptive beam shaping setup. The irradiated areas show a positive refractive index shift and can be used as Type I internal optical waveguides. Furthermore, precise control of the spatial pulse-to-pulse distance in combination with a suitable beam profile enables the integration of functional photonic elements, e.g., Bragg gratings, into the waveguide. Thus, it also enables the generation of integrated photonic sensors. In addition, internal fs laser-induced modifications are characterized by a lower thermal stability as compared to the pristine polymer material. By performing a post-annealing process step, internal hollow microstructures are created by gaseous degradation of the exposed areas. Circular microchannels can be generated in a deliberately chosen layout by employing motorized 3D stages. In comparison to etching-based fabrication methods the proposed technology facilitates unlimited channel lengths, as it omits restrictions arising from an etching selectivity and duration. Altogether, this contribution paves the way towards the fabrication of internal three-dimensional optofluidic devices, equipped with a photonic sensor. In contrast, microfluidic and photonic structures are both created by femtosecond laser direct writing inside of transparent polymers.

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Metadaten
Author:Gian-Luca Roth, Stefan KeferORCiD, Steffen HesslerORCiD, Cemal Esen, Ralf HellmannORCiD
DOI:https://doi.org/10.2961/jlmn.2021.01.2009
Parent Title (English):Journal of Laser Micro/Nanoengineering
Document Type:Article
Language:English
Year of Completion:2021
Release Date:2021/02/16
GND Keyword:Femtosekundenlaser
Volume:16
Issue:1
First Page:1
Last Page:6
Urheberrecht:1
research focus :Intelligent Systems / Intelligent Sensors and Signals
Materials / Innovative Material Processing
Materials / Material Testing & Sensor Technology
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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