Optimizing dimensions of unipolar Teflon-FEP piezoelectrets with micro-system-technology
- In this work we present a new micro-system-technology based production process for
unipolar ferroelectrets. Theoretical analysis of the influence of the air-gap size on the electric
field distribution as well as on the induced charge on the electrodes shows superior performance
of unipolar piezoelectrets with small air-gaps. For the production of these small air-gaps we
developed a new design using a photoresist thermoforming master, an integrated micro-heater
and shadow masks for metallization. Unipolar piezoelectrets produced with this technology
exhibit increased d33-coefficients compared to designs in previous publications. These
piezoelectrets are highly preferable for energy-harvesting applications, as they promise high
electric power output.