TY - JOUR A1 - Emmerich, Florian A1 - Thielemann, Christiane T1 - Real-space measurement of potential distribution in PECVD ONO electrets by Kelvin probe force microscopy JF - Nanotechnology N2 - Multilayers of silicon oxide/silicon nitride/silicon oxide (ONO) are known for their good electret properties due to deep energy traps near the material interfaces, facilitating charge storage. However, measurement of the space charge distribution in such multilayers is a challenge for conventional methods if layer thickness dimensions shrink below 1 μm. In this paper, we propose an atomic force microscope based method to determine charge distributions in ONO layers with spatial resolution below 100 nm. By applying Kelvin probe force microscopy (KPFM) on freshly cleaved, corona-charged multilayers, the surface potential is measured directly along the z-axis and across the interfaces. This new method gives insights into charge distribution and charge movement in inorganic electrets with a high spatial resolution. KW - electret, multilayer, charge distribution, Kelvin probe force microscopy KW - Kelvin-Sonde KW - Rasterkraftmikroskopie Y1 - 2016 VL - 2016 IS - 27 SP - 1 EP - 10 ER - TY - CHAP A1 - Döhring, Thorsten T1 - The market of huge monolithic mirror substrates for optical astronomy T2 - Proceedings of SPIE 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems, 883702 KW - Mirrors KW - Astronomy KW - Astronomical telescopes KW - Optical components KW - Optical systems KW - Spiegelteleskop Y1 - 2013 U6 - https://doi.org/10.1117/12.2023652 IS - 8837 ER - TY - CHAP A1 - Döhring, Thorsten A1 - Zeising, Sebastian T1 - Spiegelsubstrate für professionelle astronomische Teleskope – ein Überblick T2 - DGaO-Proceedings 2013 KW - Fertigung optischer Systeme KW - Optische Materialien KW - Optische Komponenten KW - Spiegelteleskop Y1 - 2013 SN - 1614-8436 ER - TY - CHAP A1 - Döhring, Thorsten T1 - Das Polieren professioneller Astronomiespiegel – Weltmarkt und Technologien T2 - DGaO-Proceedings 2014 KW - Fertigung optischer Systeme KW - Oberflächen KW - Optische Komponenten KW - Polieren KW - Spiegelteleskop Y1 - 2014 SN - 1614-8436 ER - TY - CHAP A1 - Nick, Christoph A1 - Quednau, Sebastian A1 - Sarwar, Reza A1 - Thielemann, Christiane A1 - Schlaak, Helmut T1 - Fabrication of high aspect ratio gold nanopillars on microelectrodes for the interface with electrogenic cells T2 - HARMNST - 10th international workshop on high aspect ratio micro and nano system technologies, Berlin KW - Mikroelektrode Y1 - 2013 SP - 212 EP - 213 ER - TY - CHAP A1 - Döhring, Thorsten T1 - Polishers around the globe: an overview on the market of large astronomical mirrors T2 - Proceedings of SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 915110 KW - Mirrors KW - Polishing KW - Transparency KW - Optical telescopes KW - Polieren KW - Spiegelteleskop Y1 - 2014 U6 - https://doi.org/10.1117/12.2055523 IS - 9151 ER - TY - CHAP A1 - Arnheiter, Frank A1 - Asmus, Tim A1 - Loose, Thomas A1 - Wienand, Karlheinz A1 - Thielemann, Christiane T1 - Metal-nanosensor for the detection of biomolecules T2 - Mikro-Nano Integration (GMM-Fachbericht 60), KW - Mikrosystemtechnik KW - Sensor Y1 - 2014 SN - 978-3-8007-3155-8 ER - TY - JOUR A1 - Nick, Christoph A1 - Daus, Andreas A1 - Bestel, Robert A1 - Goldhammer, Michael A1 - Steger, Frederik A1 - Thielemann, Christiane T1 - DrCell - a software tool for the analysis of cell signals recorded with extracellular microelectrodes JF - Signal processing: an international journal (SPIJ) KW - Mikroelektrode Y1 - 2014 UR - http://www.cscjournals.org/manuscript/Journals/SPIJ/Volume7/Issue2/SPIJ-226.pdf VL - 7 IS - 2 SP - 96 EP - 109 ER - TY - CHAP A1 - Steger, Frederik A1 - Frieß, Johannes A1 - Daus, Andreas A1 - Ritter, Sylvia A1 - Thielemann, Christiane T1 - Analysis of electrophysiological characteristics of cardiomyocytes following radiation exposure T2 - 8th International Meeting on Substrate-Integrated Microelectrode Arrays KW - Herzmuskelzelle KW - Strahlenbelastung Y1 - 2014 U6 - https://doi.org/10.13140/RG.2.1.4153.0400 SN - 2194-5519 SP - 153 ER - TY - CHAP A1 - Emmerich, Florian A1 - Thielemann, Christiane T1 - Observation of Thermal Discharge in Nanopatterned Electrets by Kelvin-Probe-Microscopy T2 - 14th International Symposium on Elecrets, 2011, Montpellier, France KW - Elektret Y1 - 2014 SN - 978-1-4577-1023-0 SN - 2153-3253 SP - 149 EP - 150 ER -