TY - JOUR A1 - Yang, Yongting A1 - Bischoff, Kay A1 - Mücke, Dominik A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV-ultrashort pulsed laser ablation of fused silica JF - Journal of Laser Applications N2 - The authors report on ultraviolet ultrashort pulsed laser ablation of fused silica and compare the achievable micromachining results to those obtained by using the fundamental emission wavelength in infrared. Ablation in ultraviolet reveals a stable efficiency for increasing fluences, whereas using an infrared beam exhibits a decreasing trend of the ablation efficiency at higher and increasing fluences. In addition, a significant improvement in the surface quality is found by using an ultraviolet wavelength in a fluence range up to 20 J/cm2 compared to infrared, e.g., revealing an Ra of down to 0.45 μm on using the ultraviolet wavelength compared to Ra = 0.56 μm on using infrared at fluences up 15 J/cm2. Moreover, taking advantage of the high available pulse energy, the authors compare the achievable ablation efficiency and surface roughness using a conventionally focused ultraviolet beam and a defocused ultraviolet beam, finding that the defocused ultraviolet beam possesses a processing quality comparable to that of the focused beam. Finally, the authors exemplify the potential of ultraviolet ultrashort pulsed laser ablation by using a Tesla mixer for microfluidic integration of fused silica. KW - Laserablation KW - Quarzglas KW - Laserbestrahlung Y1 - 2024 U6 - https://doi.org/http://dx.doi.org/10.2351/7.0001197 SN - 1042-346X VL - 36 IS - 1 PB - Laser Institute of America ER - TY - JOUR A1 - Franz, Daniel A1 - Yang, Yongting A1 - Michel, Luis A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Evaluation of an ultrashort pulsed laser robot system for flexible and large-area micromachining JF - Journal of Laser Applications N2 - We report for the first time on the realization, characterization and application of an ultrashort pulsed laser robot system for flexible and large-area 2D and 3D laser micromachining with 6 articulated axes. To characterize the dynamic positioning of the laser beam during and after axes movement, CMOS image sensors were integrated into the beam path. A method introduced for the alignment of the optical axes allows a reduction of the deviations in laser beam positioning to less than 141.8 ± 92.9 μm within a 110° rotation range of axis 4. In addition, a high laser beam positioning repeatability of less than 102.2 μm is demonstrated over a total period of 14 h for a movement of axis 5 within a range of 0° to 90°. Initial laser cutting, laser structuring and laser marking applications on automotive dashboards and glass substrates are presented for flexible and large area 2D and 3D manufacturing. By applying a special laser cutting strategy for processing AF 32 eco thin glass, high cutting quality is achieved with a taper of up to 96.3% without the generation of cracks, demonstrating the innovative potential of the high-precision laser robot system. Nonetheless, different identified inherent influences of each axis 1–5 during robot axis movement demand for an innovative beam stabilization concept to achieve high precision in laser beam positioning. KW - Ultrakurzzeitlaser KW - Industrieroboter Y1 - 2023 N1 - Proceedings of the International Congress of Applications of Lasers & Electro-Optics (ICALEO 2023) VL - 35 IS - 4 SP - 042057 EP - 042065 ER -