TY - CHAP A1 - Rung, Stefan A1 - Bischoff, Christian A1 - Jäger, Erwin A1 - Umhofer, Udo A1 - Hellmann, Ralf T1 - Laser thin film ablation with multiple beams and tailored beam profiles T2 - Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX KW - Thin film KW - Ablation KW - Top-Hat KW - Parallel Processing KW - Beam-Splitter KW - Laserablation KW - Dünnschichttechnik Y1 - 2014 VL - 8967 ER - TY - CHAP A1 - Jäger, Erwin A1 - Rädel, Ulrich A1 - Bischoff, Christian A1 - Umhofer, Udo A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Laser micromachining – parallel processing with multiple top hat beams T2 - 8th International Conference on Photonic Technologies LANE 2014 KW - Laserbearbeitung Y1 - 2014 ER -