TY - JOUR A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Welding of transparent polymers using femtosecond laser JF - Applied Physics A N2 - Based on nonlinear absorption, we report on laser welding of cycloolefin copolymers without any additional absorption layer employing infrared femtosecond laser. To the best of our knowledge, this is the first report of ultrashort laser welding of this material class, revealing a remarkable high processing speed of 20 mm/s in a single pass mode. Using a 1028 nm laser having a pulse duration of 220 fs at a repetition rate of 571 kHz leads to a welding seam width between 38 and 137 μm, depending on the applied laser average power. The welded joint is characterized by a maximum shear strength of 40 MPa. The experimental results are compared to those reported for femtosecond laser welding of PMMA and to those published for using a Thulium fiber laser. KW - Femtosekundenlaser KW - Laserschweißen Y1 - 2016 VL - 122 IS - 2 SP - 86 EP - 90 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Ultrashort pulse laser micro-welding of cyclo-olefin copolymers JF - Optics and Lasers in Engineering N2 - We report on the joining of transparent thermoplastic polymers using infrared femtosecond laser pulses. Due to nonlinear absorption, the developed micro-welding process for cyclo-olefin copolymers does not require any intermediate absorbing layers or any surface pre-processing of the welding partners. In view of an optimized and stable micro-welding process, the influence of the welding speed and focal position on both, the quality and shear force strength are investigated. We highlight that welding seam widths of down to 65 µm are feasible for welding speeds of up to 75 mm/s. However, a variation of the welding speed affects the required focal position for a successful joining process. The shear force strength of the welding seam is determined to 37 MPa, which corresponds to 64% of the shear strength of the bulk material and is not affected by the welding speed. KW - Laserschweißen KW - Femtosekundenlaser Y1 - 2017 VL - 93 SP - 178 EP - 181 ER - TY - JOUR A1 - Rung, Stefan A1 - Bokan, Kevin A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Influence of laser wavelength on the modification of friction between 100Cr6 steel and polytetrafluoroethylene by femtosecond laser-induced periodic surface structures JF - Journal of Laser Applications KW - Femtosekundenlaser Y1 - 2020 U6 - https://doi.org/10.2351/7.0000036 VL - 32 IS - 3 SP - 032017-1 EP - 032017-6 ER - TY - JOUR A1 - Schwarz, Simon A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication and evaluation of negative axicons for ultrashort pulsed laser applications JF - Optics Express KW - Ultrakurzzeitlaser Y1 - 2020 VL - Optics Express IS - 28 SP - 26207 EP - 26217 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Manufacturing of optical elements by non-contact laser processing T2 - Seventh European Seminar on Precision Optics Manufacturing, Proceedings KW - Laserbearbeitung KW - Optisches Bauelement Y1 - 2020 IS - 11478 ER - TY - JOUR A1 - Dudutis, Juozas A1 - Pipiras, Jokūbas A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Hellmann, Ralf A1 - Račiukaitis, Gediminas A1 - Gečys, Paulius T1 - Laser-fabricated axicons challenging the conventional optics in glass processing applications JF - Optics Express KW - Laserbearbeitung KW - Quarzglas Y1 - 2020 VL - 28 IS - 4 SP - 5715 EP - 5730 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Two-Dimensional Low Spatial Frequency Laser-Induced Periodic Surface Structuring of Sapphire JF - Journal of Laser Micro/Nanoengineering KW - Femtosekundenlaser Y1 - 2017 VL - 12 IS - 2 SP - 67 EP - 71 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - All laser-based fabrication of optical elements T2 - Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser KW - Femtosekundenlaser Y1 - 2020 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Axicon fabrication with ultrashort and CO2 laser T2 - LPM2018 The 19th International Symposium on Laser Precision Microfabrication KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser Y1 - 2018 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - High quality one-dimensional low spatial frequency LIPSS on sapphire generated by Top-Hat beam shaped ultrashort-pulsed laser T2 - MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference KW - Ultrakurzzeitlaser Y1 - 2017 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Simulation of process parameters towards the generation of low spatial frequency LIPSS on dielectric materials T2 - MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference KW - Laserbestrahlung KW - Quarzglas Y1 - 2016 ER - TY - CHAP A1 - Dudutis, Juozas A1 - Pipiras, Jokūbas A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Hellmann, Ralf A1 - Gečys, Paulius T1 - Bessel beam formation with all laser fabricated axicon - case of glass dicing applications T2 - COLA 2019, 15th International Conference on Laser Ablation KW - Laserbestrahlung Y1 - 2019 ER - TY - CHAP A1 - Dudutis, Juozas A1 - Pipiras, Jokūbas A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Hellmann, Ralf A1 - Račiukaitis, Gediminas A1 - Gečys, Paulius T1 - Glass cutting by oblate-tip axicon-generated Bessel-Gaussian beams T2 - Open Readings, 63rd International Conference for Students of Physics and Natural Sciences KW - Laserschneiden KW - Glas Y1 - 2019 ER - TY - JOUR A1 - Lutz, Christian A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Efficient Ultrashort Pulsed Laser Processing by Dynamic Spatial Light Modulator Beam Shaping for Industrial Use JF - Journal of Laser Micro/Nanoengineering N2 - We report on the effect of different transversal beam shapes on the efficiency of ablation processes and the resulting surface characteristics. A possibility to efficiently apply ultrashort pulsed lasers with high average power is beam shaping. By using a cooled reflective based liquid crystal spatial light modulator to generate different spot distributions, it is possible to spatially allocate the available power to avoid excessive high fluences. In our experiments, we determine the optimal fluence to ablate the maximum volume per watt to be in the range of 0.2-0.4 J/cm². Based on this fluence, we increase the number of spots from one to a maximum of twenty to ablate steel in a multilayer scanning-based process. In this context, we examine the influence of different separation distances between the spots on the ablation efficiency and roughness. Subsequently to these investigations, we develop an efficient roughing process with higher ablation rates and a nearly constant roughness. KW - Ultrakurzzeitlaser KW - Lichtmodulator Y1 - 2021 U6 - https://doi.org/10.2961/jlmn.2021.01.2011 VL - 16 IS - 1 SP - 1 EP - 6 ER - TY - CHAP A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator T2 - Lasers in Manufacturing - LiM 2021 N2 - We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing. KW - Ultrakurzzeitlaser KW - Lichtmodulator Y1 - 2021 ER - TY - JOUR A1 - Häfner, Tom A1 - Bischoff, Kay A1 - Helm, Jonas A1 - Kunz, Tim A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Picosecond laser microvia drilling of ABF material using MHz burst mode JF - Materials Research Express N2 - We report on a comprehensive study of laser percussion microvia drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in MHz burst mode. After laser processing, microvia drilling quality is being evaluated by the fabricated diameter and taper using laser scanning microscopy and metallography. The influences of the incubation effect, heat accumulation and shielding effects as a result of pulse to pulse interactions are being discussed on the ablation threshold, penetration depth and laser microvia drilling quality. We find that an increasing heat accumulation in MHz burst mode processing is responsible for the void formation and delamination of the insulating ABF layer. Therefore, the parameter clearance is introduced to evaluate these effects on the microvia sidewalls. For a comparable clearance, applying 2 intra-burst pulses achieves an average reduced taper of down to 19.5% compared to single pulse mode. At the same time, a reduced laser drilling time of 16.7% per microvia highlights the enormous potential of the MHz burst mode for laser drilling of ABF material in printed circuit board fabrication. KW - Ultrakurzzeitlaser KW - Pikosekundenbereich Y1 - 2023 VL - 10 IS - 9 SP - 096301 EP - 096311 ER - TY - CHAP A1 - Franz, Daniel A1 - Mücke, Dominik A1 - Kunz, Tim A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 % on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 % reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing. KW - Pikosekundenbereich KW - Laserbohren Y1 - 2023 ER - TY - CHAP A1 - Franz, Daniel A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Superimposed beam deflection using acousto-optical deflectors in combination with a galvanometer scanner T2 - Lasers in Manufacturing - LiM 2021 KW - Galvanometer Y1 - 2021 ER - TY - JOUR A1 - Franz, Daniel A1 - Schuster, David A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication and analysis of through-glass vias for glass-based electronic packaging using an ultrashort pulsed laser JF - Optics and Lasers in Engineering KW - Ultrakurzzeitlaser KW - Laserbohren Y1 - 2025 U6 - https://doi.org/10.1016/j.optlaseng.2025.109106 SN - 0143-8166 VL - 193 PB - Elsevier BV ER - TY - CHAP A1 - Franz, Daniel A1 - Schuster, David A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Ultrashort pulsed laser drilling of through-glass vias for glass core packaging T2 - Proceedings of LAMP2025 – the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025 KW - Ultrakurzzeitlaser KW - Laserbohren Y1 - 2025 ER -