TY - JOUR A1 - Heilmann, Eva-Maria A1 - Hellmann, Ralf A1 - Seidl, Albrecht T1 - Water Jet Guided Laser Cutting of Silicon Thin Films Using 515nm Disc Laser JF - Journal of Laser Micro/Nanoengineering KW - Laserschneiden KW - Dünne Schicht Y1 - 2014 VL - 6 IS - 2 SP - 168 ER -