TY - GEN A1 - Schwarz, Simon A1 - Hellmann, Ralf T1 - Rapid laser fabrication of complex glass optics T2 - International Research Days N2 - Poster KW - Laserbearbeitung Y1 - 2021 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Enhanced ablation efficiency using GHz bursts in micromachining fused silica JF - Optics Letters KW - Fräsen KW - Mikrobearbeitung KW - Quarzglas KW - Femtosekundenlaser Y1 - 2021 VL - 46 IS - 2 SP - 282 EP - 285 ER - TY - JOUR A1 - Schwarz, Simon A1 - Götzendorfer, Babette A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Compact Beam Homogenizer Module with Laser-Fabricated Lens-Arrays JF - applied sciences KW - Femtosekundenlaser KW - Linse KW - Array Y1 - 2021 VL - 2021 IS - 11 SP - 1018 EP - 1018 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Ultrashort pulsed laser backside ablation of fused silica JF - Optics Express KW - Femtosekundenlaser KW - Quarzglas KW - Mikrobearbeitung Y1 - 2021 VL - 29 IS - 15 SP - 23477 EP - 23486 ER - TY - CHAP A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator T2 - Lasers in Manufacturing - LiM 2021 N2 - We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing. KW - Ultrakurzzeitlaser KW - Lichtmodulator Y1 - 2021 ER -