TY - JOUR A1 - Hürner, Andreas A1 - Schlegel, Tobias A1 - Adelmann, Benedikt A1 - Mitlehner, Heinz A1 - Hellmann, Ralf A1 - Bauer, Anton A1 - Frey, Lothar T1 - Alloying of Ohmic Contacts to n-type 4H-SiC via Laser Irradiation JF - Materials Science Forum KW - Ohm-Kontakt KW - Legierung KW - Laser Y1 - 2013 VL - 740-742 SP - 773 EP - 776 ER -