TY - JOUR A1 - Alexander, Morgan A1 - Short, Robert A1 - Jones, Frank A1 - Stollenwerk, Manfred A1 - Mathar, Gerd A1 - Zabold, Jochen A1 - Michaeli, Walter T1 - The heterogeneous nature of deposits from hexamethyldisiloxane/oxygen plasmas JF - Ceramic films and coatings KW - Hexamethyldisiloxan KW - Sauerstoff KW - Plasma Y1 - 1995 VL - 1995 IS - 54 SP - 87 EP - 99 ER - TY - JOUR A1 - Michaeli, Walter A1 - Telgenbüscher, Klaus A1 - Stollenwerk, Manfred A1 - Mathar, Gerd A1 - Zell, Harald T1 - Plasmapolymerisierte Schichten: Neue Vielfalt der Funktionen JF - Schweizer Maschinenbau KW - Plasmapolymerisation Y1 - 1994 VL - 1994 IS - 41 SP - 90 EP - 93 ER - TY - JOUR A1 - Alexander, Morgan A1 - Short, Robert A1 - Jones, Frank A1 - Stollenwerk, Manfred A1 - Mathar, Gerd A1 - Zabold, Jochen A1 - Michaeli, Walter T1 - An XPS investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxgen plasmas JF - Journal of Materials Science KW - Hexamethyldisiloxan KW - Plasma Y1 - 1996 VL - 31 SP - 1879 EP - 1885 ER -