TY - JOUR A1 - Rung, Stefan A1 - Rexhepi, Mal A1 - Bischoff, Christian A1 - Hellmann, Ralf T1 - Laserscribing of thin films using top-hat laser beam profiles JF - Journal of Laser Micro/Nanoengineering KW - Laser scribing KW - laser beam shaping KW - Top-Hat KW - Dünne Schicht KW - Laser Y1 - 2013 VL - 8 IS - 3 SP - 309 EP - 314 ER - TY - CHAP A1 - Rung, Stefan A1 - Rexhepi, Mal A1 - Hellmann, Ralf T1 - Beam shaping for enhanced through-put of laser ablation of transparent conductive films T2 - Proceedings of the XXVII MicroCAD International Scientific Conference KW - Laserablation Y1 - 2013 VL - 2013 ER -