TY - CHAP A1 - Krause, Dennis A1 - Stahl-Offergeld, Markus A1 - Sand, Markus A1 - Hohe, Hans-Peter A1 - Kovacs, Günter T1 - CMOS Integrated Field Coils for Self-Calibration of 3D Hall-Sensors T2 - Sensors and Measuring Systems, 19th ITG/GMA-Symposium, 26-27 June 2018 N2 - An integrated arrangement of field coils for on-chip self-calibration is presented. Routine tests for 3D Hall sensors are very complex and need special test hardware to generate a well-defined three-dimensional magnetic field. In combination with a high voltage current source, the integrated arrangement allows the generation of local magnetic fields up to 2 mT. In spite of process variations, the error of each coil's magnetic flux density is less than 1%. Magnetic tests can be done on-chip without need for additional external test equipment. Additionally, a low power mode allows for validity checks and online calibrations during measurements with a small magnetic flux density of 0:2 mT. KW - Magnetspule KW - Selbstkalibrierung Y1 - 2018 SN - 978-3-8007-4683-5 VL - 2018 PB - IEEE ER -