TY - JOUR A1 - Schmiedeskamp, Bernt A1 - Kloidt, Andreas A1 - Stock, Hans-Jürgen A1 - Kleineberg, Ulf A1 - Döhring, Thorsten A1 - Pröpper, Michael A1 - Rahn, Steffen A1 - Hilgers, Kerstin A1 - Heidemann, Bernhard A1 - Tappe, Thorsten A1 - Heinzmann, Ulrich A1 - Krumrey, Michael K. A1 - Müller, Peter A1 - Scholze, Frank A1 - Heidemann, Klaus F. T1 - Electronbeam-deposited Mo/Si and MoxSiySi multilayer X-ray mirrors and gratings JF - Optical Engineering KW - Röntgenspiegel Y1 - 1994 VL - 33 IS - 4 SP - 1314 EP - 1321 ER - TY - CHAP A1 - Kloidt, Andreas A1 - Stock, Hans-Jürgen A1 - Kleineberg, Ulf A1 - Döhring, Thorsten A1 - Pröpper, Michael A1 - Hilgers, Kerstin A1 - Heidemann, Bernhard A1 - Tappe, Thorsten A1 - Schmiedeskamp, Bernt A1 - Heinzmann, Ulrich T1 - Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical elements T2 - Proceedings of Symposium on Surface Science 1993 KW - Röntgenspiegel Y1 - 1993 VL - 1993 SP - 115 EP - 120 ER -