TY - JOUR A1 - Kefer, Stefan A1 - Pape, Natalie A1 - Bischoff, Kay A1 - Schmauss, Bernhard A1 - Hellmann, Ralf T1 - Lattice-Like Waveguides With Integrated Bragg Gratings in Planar Cyclic Olefin Copolymers JF - Journal of Lightwave Technology N2 - This contribution demonstrates femtosecond laser direct writing of lattice-like waveguides in planar cyclic olefin copolymer substrates. Based on numerical simulation and experimental near-field analysis, stable single-mode waveguiding around wavelengths of 1550 nm is demonstrated. The waveguiding mechanism is based on a hexagonal array of laser-induced, positive refractive index modification lines. Thus, the lateral extension of the guided mode can be adapted by varying the fabrication parameters and, in consequence, the resulting cross-sectional arrangement of the refractive index perturbations. With an optical attenuationof 2.2 dB·cm-1 around 1550 nm, the fabricated waveguides are well-suited for on-chip integrated photonic devices. Moreover, the waveguides can also be equipped with Bragg gratings to enable the application of the photonic platform as a sensing device. Dependingon their length, the Bragg grating structures exhibit reflectivities ofup to 99% and spectral widths down to 0.3 nm. The flexibility of the fabrication process and the sensing capabilities of the lattice-like waveguides with integrated Bragg gratings are underlined by an exemplary application study demonstrating a relative pressure sensor. For that, a photonic platform is micromilled to generate a 300 µm thick diaphragm and a reference pressure chamber. The strain introduced to the diaphragm by external pressure changes can then be quantified by the integrated photonic structures.This way, absolute pressure sensitivities of up to 38 pm·kPa-1 can be achieved in a relative pressure range from −60 to 100 kPa. The newly-developed lattice-like waveguides with integrated Bragggratings are therefore well-suited for the realization of novel and adaptable photonic devices and sensors. KW - Bragg grating KW - cyclic olefin copolymers KW - femtosecond laser KW - integrated photonics KW - lattice-like waveguide KW - pressure sensor KW - Wellenleiter KW - Bragg-Reflektor Y1 - 2024 U6 - https://doi.org/10.1109/JLT.2023.3328323 SN - 0733-8724 VL - 42 IS - 18 SP - 6302 EP - 6311 PB - Institute of Electrical and Electronics Engineers (IEEE) ER - TY - JOUR A1 - Marx, Jan A1 - Lutz, Christian A1 - Hellmann, Ralf A1 - Esen, Cemal T1 - Holographic multi-spot generation for ultra-short pulse Bessel beam processing of stainless steel JF - Procedia CIRP KW - Ultrakurzzeitlaser Y1 - 2022 U6 - https://doi.org/10.1016/j.procir.2022.08.003 SN - 2212-8271 VL - 111 SP - 648 EP - 652 PB - Elsevier BV ER - TY - CHAP A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf ED - Kling, Rainer ED - Pfleging, Wilhelm ED - Sugioka, Koji T1 - Combination of an axicon and a spatial light modulator for the generation of multiBessel beams for microdrilling using ultrashort pulsed laser T2 - Laser-based Micro- and Nanoprocessing XVIII N2 - Due to their special beam profile, Bessel beams offer advantageous properties for micro-drilling and internal volume processing, especially for transparent materials. In addition, the laser power of industrial ultrashort pulsed lasers hasnincreased significantly in recent years, offering the possibility of highly efficient processes using multi-spot profiles. We report on optical simulations and an experimental optical setup for generating multi-Bessel beams by combining a refractive axicon and a spatial light modulator. This setup offers a new possibility of multi-Bessel beam generation by functional division of the Bessel beam generation by the axicon and the possibility of separation flexible beam splitting by a spatial light modulator. The beam profiles generated with this setup are analyzed and compared in this study using optical simulations and experiments. In addition to the analysis of the Bessel beams in the machining plane, they are also analyzed in the propagation direction by means of intensity distributions measured by a camera in small-step z positions. Furthermore, the experimental applicability of the module-based beam shaping system is demonstrated by integrating into an existing laser system. KW - Ultrakurzzeitlaser Y1 - 2024 U6 - https://doi.org/10.1117/12.3000946 PB - SPIE ER - TY - JOUR A1 - Sommer, David A1 - Hornung, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Design Guide for Hybrid-Additive Manufacturing of Inconel 718 Combining PBF-LB/M and In Situ High-Speed Milling JF - Journal of Manufacturing and Materials Processing N2 - As the correlation between design rules and process limitations is of the upmost importance for the full exploitation of any manufacturing technology, we report a design guide for hybrid-additive manufacturing of Inconel 718. Basic limitations need to be evaluated for this particular hybrid approach that combines laser powder bed fusion (PBF-LB/M) and in situ high-speed milling. Fundamental geometric limitations are examined with regard to the minimum feasible wall thickness, cylinders, overhanging structures, and chamfers. Furthermore, geometrical restrictions due to the integrated three-axis milling process with respect to inclinations, inner angles, notches, and boreholes are investigated. From these findings, we derive design guidelines for a reliable build process using this hybrid manufacturing. Additionally, a design guideline for the hybrid-additive manufacturing approach is presented, depicting a step-to-step guide for the adjustment of constructions. To demonstrate this, a powder nozzle for a direct energy deposition (DED-LB/M) process is redesigned following the previously defined guidelines. This redesign encompasses analysis of the existing component and identification of problematic areas such as flat angles, leading to a new construction that is suitable for a hybrid-additive manufacturing approach. KW - Hochgeschwindigkeitsfräsen KW - Rapid Prototyping, Fertigung Y1 - 2025 U6 - https://doi.org/http://dx.doi.org/10.3390/jmmp9030088 SN - 2504-4494 VL - 9 IS - 3 PB - MDPI AG ER - TY - JOUR A1 - Sommer, David A1 - Truetsch, Ben A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fractographic Analysis and Fatigue Behavior of Additively Manufactured Ni‐Superalloy Components with Post Processing Heat Treatment and Hot Isostatic Pressing JF - Advanced Engineering Materials N2 - A report is made on a study of mechanical properties and fractographic characteristics of laser powder bed fusion (PBF‐LB/M)‐built Inconel 718, performing heat treatments and hot‐isostatic pressing. For this, tensile components are heat‐treated by different processes, as namely stress relief (SR), SR and double aging (SR + DA), and hot‐isostatic pressing are conducted. For the mechanical testing, the ultimate tensile strength (UTS) as well as the fatigue behavior are evaluated, examining differences in maximum load behavior, elongation, and the different regimes of fatigue. As changes in material structure can be observed, the sole SR leads to a diminished UTS, while the combination of SR + DA develops an UTS of Rm = 1277 MPa. Within the fatigue behavior, the HIP shows a very balanced material structure with an increased high cycle and very high cycle regime, as the texture gets homogenized during the heat treatment. The metallographic analysis can quantify the material changes, as the density and the hardness are improved by virtue of the heat treatments. Furthermore, the fractographic analysis shows the differences in fracture behavior, arising due to the microstructural changes, as crack initiation points, crack propagation, and forced fractures can be categorized by scanning electron microscopy. KW - Rapid Prototyping, Fertigung KW - Isostatisches Heißpressen KW - Selektives Laserschmelzen Y1 - 2025 U6 - https://doi.org/http://dx.doi.org/10.1002/adem.202500078 SN - 1438-1656 VL - 27 IS - 12 PB - Wiley ER - TY - JOUR A1 - Flachs, Dennis A1 - Emmerich, Florian A1 - Roth, Gian-Luca A1 - Hellmann, Ralf A1 - Thielemann, Christiane T1 - Laser-bonding of FEP/FEP interfaces for a flexiblemanufacturing process of ferroelectrets JF - Journal of Physics: Conference Series N2 - This paper presents an optimized laser-bonding process for piezoelectric energy-harvesters based on thin fluorinated-ethylene-propylene (FEP) foils, using an ultra-short-pulse(USP) laser. Due to the minimized thermal stress in the material during bonding, achieved bypulse durations of few picoseconds, we created seams down to 40μm width without generatingholes in the 12.5μm thick FEP-foils. Using a galvanometer scanning system allowed for fastbonding-speed up to several centimeters per second, making the process also suitable for largestructures and areas. The achieved bond strength of the seams under influence of shearingstress was examined using tensile testing, which showed a sufficient strength of about 25 % of the maximum strength of an unbonded, single layer of FEP. KW - Ultrakurzzeitlaser KW - Piezoelektrizität Y1 - 2019 U6 - https://doi.org/10.1088/1742-6596/1407/1/012107 VL - 1407 IS - 012107 SP - 1 EP - 5 ER - TY - JOUR A1 - Häfner, Tom A1 - Bischoff, Kay A1 - Helm, Jonas A1 - Kunz, Tim A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Picosecond laser microvia drilling of ABF material using MHz burst mode JF - Materials Research Express N2 - We report on a comprehensive study of laser percussion microvia drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in MHz burst mode. After laser processing, microvia drilling quality is being evaluated by the fabricated diameter and taper using laser scanning microscopy and metallography. The influences of the incubation effect, heat accumulation and shielding effects as a result of pulse to pulse interactions are being discussed on the ablation threshold, penetration depth and laser microvia drilling quality. We find that an increasing heat accumulation in MHz burst mode processing is responsible for the void formation and delamination of the insulating ABF layer. Therefore, the parameter clearance is introduced to evaluate these effects on the microvia sidewalls. For a comparable clearance, applying 2 intra-burst pulses achieves an average reduced taper of down to 19.5% compared to single pulse mode. At the same time, a reduced laser drilling time of 16.7% per microvia highlights the enormous potential of the MHz burst mode for laser drilling of ABF material in printed circuit board fabrication. KW - Ultrakurzzeitlaser KW - Pikosekundenbereich Y1 - 2023 VL - 10 IS - 9 SP - 096301 EP - 096311 ER - TY - CHAP A1 - Franz, Daniel A1 - Mücke, Dominik A1 - Kunz, Tim A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 % on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 % reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing. KW - Pikosekundenbereich KW - Laserbohren Y1 - 2023 ER - TY - JOUR A1 - Franz, Daniel A1 - Yang, Yongting A1 - Michel, Luis A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Evaluation of an ultrashort pulsed laser robot system for flexible and large-area micromachining JF - Journal of Laser Applications N2 - We report for the first time on the realization, characterization and application of an ultrashort pulsed laser robot system for flexible and large-area 2D and 3D laser micromachining with 6 articulated axes. To characterize the dynamic positioning of the laser beam during and after axes movement, CMOS image sensors were integrated into the beam path. A method introduced for the alignment of the optical axes allows a reduction of the deviations in laser beam positioning to less than 141.8 ± 92.9 μm within a 110° rotation range of axis 4. In addition, a high laser beam positioning repeatability of less than 102.2 μm is demonstrated over a total period of 14 h for a movement of axis 5 within a range of 0° to 90°. Initial laser cutting, laser structuring and laser marking applications on automotive dashboards and glass substrates are presented for flexible and large area 2D and 3D manufacturing. By applying a special laser cutting strategy for processing AF 32 eco thin glass, high cutting quality is achieved with a taper of up to 96.3% without the generation of cracks, demonstrating the innovative potential of the high-precision laser robot system. Nonetheless, different identified inherent influences of each axis 1–5 during robot axis movement demand for an innovative beam stabilization concept to achieve high precision in laser beam positioning. KW - Ultrakurzzeitlaser KW - Industrieroboter Y1 - 2023 N1 - Proceedings of the International Congress of Applications of Lasers & Electro-Optics (ICALEO 2023) VL - 35 IS - 4 SP - 042057 EP - 042065 ER - TY - CHAP A1 - Franz, Daniel A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Superimposed beam deflection using acousto-optical deflectors in combination with a galvanometer scanner T2 - Lasers in Manufacturing - LiM 2021 KW - Galvanometer Y1 - 2021 ER - TY - JOUR A1 - Franz, Daniel A1 - Schuster, David A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication and analysis of through-glass vias for glass-based electronic packaging using an ultrashort pulsed laser JF - Optics and Lasers in Engineering KW - Ultrakurzzeitlaser KW - Laserbohren Y1 - 2025 U6 - https://doi.org/10.1016/j.optlaseng.2025.109106 SN - 0143-8166 VL - 193 PB - Elsevier BV ER - TY - JOUR A1 - Franz, Daniel A1 - Yang, Yongting A1 - Esen, Cemal A1 - Hellmann, Ralf ED - Esen, Cemal T1 - Flexible 2D Laser Cutting of Ultra-Thin Glass Using an Ultrashort Pulsed Laser Robotic System JF - Journal of Laser Micro/Nanoengineering KW - Laserschneiden KW - Ultrakurzzeitlaser Y1 - 2026 U6 - https://doi.org/10.2961/jlmn.2026.01.2004 SN - 1880-0688 VL - 21 IS - 1 PB - Japan Laser Processing Society ER - TY - CHAP A1 - Franz, Daniel A1 - Schuster, David A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Ultrashort pulsed laser drilling of through-glass vias for glass core packaging T2 - Proceedings of LAMP2025 – the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025 KW - Ultrakurzzeitlaser KW - Laserbohren Y1 - 2025 ER - TY - CHAP A1 - Sommer, David A1 - Truetsch, Ben A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Microstructural Fracture Behaviour of PBF-LB/M Inconel 718 Components within different HIP Processes T2 - Lasers in Manufacturing, München, Juni 2025 N2 - We report on a study of different hot isostatic pressing (HIP) cycles, improving the mechanical properties of additively manufactured Inconel 718 components. For this, PBF-LB/M built components are post-processed by different HIP sequences, as gas pressure and processing time are varied, leading to differences in microstructure and material characteristics. Static and dynamic mechanical testing are performed, evaluating the changes in mechanical properties with particular focus on the ultimate tensile strength and endurance limit. Furthermore, metallographic analysis is employed to investigate the achieved density and microhardness. Microstructural analysis, showing the grain boundaries, is used to identify generated phases and precipitations of the material matrix. Moreover, the fracture behaviour is classified by grain deformation during mechanical testing. As the HIP leads to microstructural changes of Inconel 718 components, mechanical properties can be improved significantly, enhancing the ultimate tensile strength and simultaneously the endurance limit. KW - Isostatisches Heißpressen Y1 - 2025 ER - TY - CHAP A1 - Sommer, David A1 - Peters, Maximilian A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Influence of in-situ high-speed milling within a hybrid additive manufacturing approach on the fatigue behaviour of Inconel 718 lattice structures T2 - Lasers in Manufacturing, München, Juni 2025 N2 - As lattice structures in various designs are used in additive manufacturing for lightweight components, the mechanical characterisation and fracture behaviour is of upmost importance for their industrial application. In this study, the fatigue behaviour of Inconel 718 lattice structures is evaluated, comparing sole PBF-LB/M to a hybrid additive manufacturing process combining PBF-LB/M with in-situ high-speed milling. At first, the static and dynamic mechanical load behaviour of different packing densities is analysed, determining the compressive strength and the endurance limit. Secondly, hybrid additive manufactured components are compared to PBF-LB/M built parts with respect to these mechanical properties, revealing improved compressive properties and modified regimes of fatigue. In addition, differences in fracture behaviour are qualified by fractographic and surface analysis. Overall, it can be summarized that the mechanical load characteristics, especially the fatigue behaviour, are improved for hybrid additively manufactured components with a superior surface quality of Ra < 1 µm. KW - Hochgeschwindigkeitsfräsen Y1 - 2025 ER - TY - CHAP A1 - Bischoff, Kay A1 - Kefer, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Towards entirely ultrashort pulsed laser based process chain to manufacture polymer lab-on-chip systems with electrical, photonic, and microfluidic functionalities T2 - The 5th Smart Laser Processing Conference (SLPC) KW - Ultrakurzzeitlaser Y1 - 2024 UR - https://confit.atlas.jp/guide/event/opic2024/subject/SLPCp-22/date?cryptoId=&lo=fin&eventCode=opic2024 ER -