TY - JOUR A1 - Hürner, Andreas A1 - Schlegel, Tobias A1 - Adelmann, Benedikt A1 - Mitlehner, Heinz A1 - Hellmann, Ralf A1 - Bauer, Anton A1 - Frey, Lothar T1 - Alloying of Ohmic Contacts to n-type 4H-SiC via Laser Irradiation JF - Materials Science Forum KW - Ohm-Kontakt KW - Legierung KW - Laser Y1 - 2013 VL - 740-742 SP - 773 EP - 776 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hürner, Andreas A1 - Schlegel, Tobias A1 - Bauer, Anton A1 - Frey, Lothar A1 - Hellmann, Ralf T1 - Laser Alloying Nickel on 4H-Silicon Carbide Substrate to Generate Ohmic Contacts JF - Journal of Laser Micro/Nanoengineering KW - Ohm-Kontakt KW - Nickellegierung Y1 - 2013 VL - 8 IS - 1 SP - 97 EP - 101 ER -