TY - GEN A1 - Emmerich, Florian A1 - Ciba, Stefan T1 - Thin-film Micro-Heater for Fusion Bonding of Teflon-FEP Foils T2 - 21th International Student Conference on Electrical Engineering POSTER 2017 N2 - MEMS-based Micro-Heaters, in combination with thin-film temperature sensors, are often used for providing the necessary amount of thermal energy for sensor-applications. In this work, we propose an integrated micro-heater as actuator for fusion bonding of polymers, which can optimize the production process of electret-based micro-energy-harvesters. By adjusting the design parameters of thermoforming-molds, we can implement thin-film micro-heaters that are capable of generating temperatures of above 300°C for numerous cycles. Utilizing the integrated micro-heater allows local fusion bonding of Fluoroethylenepropylene (Teflon-FEP) foils on a micrometer-scale while reducing unnecessary thermal stress. This is beneficial for the longevity of the micro-energy-harvesters, while simultaneously improving its performance. N2 - Poster KW - Energy-Harvesting KW - Fusion Bonding KW - Micro-Heater KW - SU-8 KW - Teflon-FEP KW - Mikrosystemtechnik Y1 - 2017 VL - 2017 IS - POSTER 2017 SP - 1 EP - 5 ER - TY - GEN A1 - Uhrig, Janis A1 - Emmerich, Florian T1 - Study on different template-based production processes for magnetic nanowires T2 - 22nd International Student Conference on Electrical Engineering POSTER 2018 N2 - Nickel-iron (NiFe) nanowires with a high contentof nickel and large aspect-ratio show promising characteris-tics for applications in modern micro-systems. In this study,nanowires with well-controlled diameter, height and compo-sition are fabricated using nanoporous poly-carbonate (PC)and anodized aluminum-oxide (AAO) membranes. Differ-ences between potentiostatic and pulsed deposition methodswere studied with regard to their flexibility and a recommen-dation for the best use of the individual types is given. Withthe application of the presented processes, future technolo-gies as magnetic energy-harvesting or nano-fluxgate sensorscan be improved. N2 - Poster KW - magnetic nanowires KW - MEMS KW - template-based KW - electroplating KW - Nanodraht Y1 - 2018 VL - 2018 IS - POSTER 2018 SP - 1 EP - 5 ER -