TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Current results on laser-based production of complex optics in glass T2 - 10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar KW - Laserbearbeitung KW - Fertigungstechnik Y1 - 2020 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UKP-Prozess mit anschließendem CO2-Laserpolieren zur Fertigung komplexer Optiken T2 - 10. Workshop Laserbearbeitung von Glaswerkstoffen KW - Linse KW - Array KW - Laserbearbeitung KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser Y1 - 2020 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Enhanced ablation efficiency using GHz bursts in micromachining fused silica JF - Optics Letters KW - Fräsen KW - Mikrobearbeitung KW - Quarzglas KW - Femtosekundenlaser Y1 - 2021 VL - 46 IS - 2 SP - 282 EP - 285 ER - TY - JOUR A1 - Schwarz, Simon A1 - Götzendorfer, Babette A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Compact Beam Homogenizer Module with Laser-Fabricated Lens-Arrays JF - applied sciences KW - Femtosekundenlaser KW - Linse KW - Array Y1 - 2021 VL - 2021 IS - 11 SP - 1018 EP - 1018 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Ultrashort pulsed laser backside ablation of fused silica JF - Optics Express KW - Femtosekundenlaser KW - Quarzglas KW - Mikrobearbeitung Y1 - 2021 VL - 29 IS - 15 SP - 23477 EP - 23486 ER - TY - JOUR A1 - Rung, Stefan A1 - Bokan, Kevin A1 - Kleinwort, Frederick A1 - Schwarz, Simon A1 - Simon, Peter A1 - Klein-Wiele, Jan-Hendrik A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Possibilities of Dry and Lubricated Friction Modification Enabled by Different Ultrashort Laser-Based Surface Structuring Methods JF - Lubricants N2 - In this contribution we report on the possibilities of dry and lubricated friction modification introduced by different laser surface texturing methods. We compare the potential of Laser-Induced Periodic Surface Structures and Laser Beam Interference Ablation on 100Cr6 steel in a linear reciprocating ball-on-disc configuration using 100Cr6 steel and tungsten carbide balls with load forces between 50mN and 1000 mN. For dry friction, we find a possibility to reduce the coefficient of friction and we observe a pronounced direction dependency for surfaces fabricated by Laser Beam Interference Ablation. Furthermore, Laser-Induced Periodic Surface Structures result in a load-dependent friction reduction for lubricated linear reciprocating movements. This work helps to identify the modification behaviour of laser generated micro structures with feature sizes of approximately 1μm and reveals new possibilities for surface engineering KW - laser-induced periodic surface structures KW - laser beam interference ablation KW - dry friction KW - lubricated friction KW - laser surface texturing KW - Laser KW - Oberflächenstruktur Y1 - 2019 U6 - https://doi.org/10.3390/lubricants7050043 VL - 7 IS - 43 SP - 1 EP - 13 ER - TY - JOUR A1 - Rung, Stefan A1 - Bokan, Kevin A1 - Rutsch, Kevin A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Laser Induced Periodic Surface Structures on 100Cr6 Steel for Modification of Friction Demonstrated with Stribeck Test JF - Journal of Laser Micro/Nanoengineering N2 - In this contribution, we report on surface functionalization by introducing laser induced periodic surface structures on 100Cr6 bearing steel to modify complex tribological properties. The advanced approach of this study is the measurement of the coefficient of friction by performing a ball-on-disk Stribeck test on laser structured surfaces with polytetrafluoroethylene balls in a lubricant environment. The Stribeck test reveals the modified friction behavior using translation speeds up to 106 mm/min and load forces between 100 mN and 5000 mN. Our results show increased stiction and coefficient of friction for laser structured surfaces in the regime of boundary lubrication which is attributed to the laser induced surface asperities. Decreased coefficient of friction is observed in the regime of mixed and hydrodynamic lubrication, i.e. for velocities higher than 1000 mm/min, for surfaces covered by laser induced periodic surface structures with low spatial frequency. KW - Laser KW - Oberflächenstruktur Y1 - 2018 U6 - https://doi.org/10.2961/jlmn.2018.03.0004 VL - 13 IS - 3 SP - 160 EP - 165 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication of a high-quality axicon by femtosecond laser ablation and CO2 laser polishing for quasi-Bessel beam generation JF - Optics Express KW - Femtosekundenlaser Y1 - 2018 VL - 26 IS - 18 SP - 23287 EP - 23294 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Influence of pulse duration on high-precision manufacturing of 3D geometries JF - Journal of Laser Micro/Nanoengineering KW - Dreidimensionale Geometrie Y1 - 2018 VL - 13 IS - 3 SP - 292 EP - 295 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Homogeneous low spatial frequency LIPSS on dielectric materials generated by beam-shaped femtosecond pulsed laser irradiation JF - Journal of Laser Micro/Nanoengineering KW - Femtosekundenlaser Y1 - 2018 VL - 13 IS - 2 SP - 90 EP - 94 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Rapid fabrication of precise glass axicon arrays by an all laser-based manufacturing technology JF - Journal of Laser Applications KW - Femtosekundenlaser Y1 - 2020 VL - 32 IS - 1 SP - 012001 EP - 012001 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Surface Plasmon Polariton Triggered Generation of 1D-Low Spatial Frequency LIPSS on Fused Silica JF - Applied Sciences KW - Femtosekundenlaser KW - Quarzglas Y1 - 2018 VL - 8 IS - 9 SP - 1624 EP - 1624 ER - TY - JOUR A1 - Rung, Stefan A1 - Bokan, Kevin A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Influence of laser wavelength on the modification of friction between 100Cr6 steel and polytetrafluoroethylene by femtosecond laser-induced periodic surface structures JF - Journal of Laser Applications KW - Femtosekundenlaser Y1 - 2020 U6 - https://doi.org/10.2351/7.0000036 VL - 32 IS - 3 SP - 032017-1 EP - 032017-6 ER - TY - JOUR A1 - Schwarz, Simon A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication and evaluation of negative axicons for ultrashort pulsed laser applications JF - Optics Express KW - Ultrakurzzeitlaser Y1 - 2020 VL - Optics Express IS - 28 SP - 26207 EP - 26217 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Manufacturing of optical elements by non-contact laser processing T2 - Seventh European Seminar on Precision Optics Manufacturing, Proceedings KW - Laserbearbeitung KW - Optisches Bauelement Y1 - 2020 IS - 11478 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - All laser-based fabrication of optical elements T2 - Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser KW - Femtosekundenlaser Y1 - 2020 ER - TY - CHAP A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - CO2 laser polishing of femtosecond shaped micro-optical components T2 - 3rd Conference on Laser Polishing LaP 2018 KW - Kohlendioxidlaser Y1 - 2018 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Axicon fabrication with ultrashort and CO2 laser T2 - LPM2018 The 19th International Symposium on Laser Precision Microfabrication KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser Y1 - 2018 ER - TY - CHAP A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Homogeneous low spatial frequency LIPSS on dielectrics generated by beam-shaped femtosecond pulsed laser irradiation T2 - LPM2018 The 19th International Symposium on Laser Precision Microfabrication KW - Femtosekundenlaser Y1 - 2018 ER - TY - CHAP A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator T2 - Lasers in Manufacturing - LiM 2021 N2 - We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing. KW - Ultrakurzzeitlaser KW - Lichtmodulator Y1 - 2021 ER - TY - JOUR A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Multi-Bessel Beams Generated by an Axicon and a Spatial Light Modulator for Drilling Applications JF - MDPI Photonics N2 - We report on an optical setup to generate multi-Bessel beam profiles combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams offer advantageous properties for micro drilling processes and internal volume processing, especially for transparent materials. In addition, the laser power of industrial, ultrashort pulsed lasers has increased significantly over the last few years, offering the possibility for highly efficient processes using multi-spot profiles. Our optical concept combines the dynamic possibilities of beam splitting using a spatial light modulator with the benefits of Bessel beams, which facilitates multi-Bessel beam processing. Beside the simulation and experimental evaluation of the generated multi-Bessel beams, we exemplify the applicability of the developed module for the perforation of thin metal foils by micro drilling. KW - Bessel beam KW - Axicon KW - Optical System KW - Ultrashort pulsed laser KW - Material ablation KW - Bessel-Bündel KW - Ultrakurzzeitlaser Y1 - 2023 UR - https://www.mdpi.com/2304-6732/10/4/413 U6 - https://doi.org/10.3390/photonics10040413 VL - 2023 IS - 10/413 SP - 1 EP - 9 ER - TY - CHAP A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf ED - Kling, Rainer ED - Pfleging, Wilhelm ED - Sugioka, Koji T1 - Combination of an axicon and a spatial light modulator for the generation of multiBessel beams for microdrilling using ultrashort pulsed laser T2 - Laser-based Micro- and Nanoprocessing XVIII N2 - Due to their special beam profile, Bessel beams offer advantageous properties for micro-drilling and internal volume processing, especially for transparent materials. In addition, the laser power of industrial ultrashort pulsed lasers hasnincreased significantly in recent years, offering the possibility of highly efficient processes using multi-spot profiles. We report on optical simulations and an experimental optical setup for generating multi-Bessel beams by combining a refractive axicon and a spatial light modulator. This setup offers a new possibility of multi-Bessel beam generation by functional division of the Bessel beam generation by the axicon and the possibility of separation flexible beam splitting by a spatial light modulator. The beam profiles generated with this setup are analyzed and compared in this study using optical simulations and experiments. In addition to the analysis of the Bessel beams in the machining plane, they are also analyzed in the propagation direction by means of intensity distributions measured by a camera in small-step z positions. Furthermore, the experimental applicability of the module-based beam shaping system is demonstrated by integrating into an existing laser system. KW - Ultrakurzzeitlaser Y1 - 2024 U6 - https://doi.org/10.1117/12.3000946 PB - SPIE ER - TY - JOUR A1 - Franz, Daniel A1 - Schuster, David A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication and analysis of through-glass vias for glass-based electronic packaging using an ultrashort pulsed laser JF - Optics and Lasers in Engineering KW - Ultrakurzzeitlaser KW - Laserbohren Y1 - 2025 U6 - https://doi.org/10.1016/j.optlaseng.2025.109106 SN - 0143-8166 VL - 193 PB - Elsevier BV ER - TY - CHAP A1 - Franz, Daniel A1 - Schuster, David A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Ultrashort pulsed laser drilling of through-glass vias for glass core packaging T2 - Proceedings of LAMP2025 – the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025 KW - Ultrakurzzeitlaser KW - Laserbohren Y1 - 2025 ER -