TY - JOUR A1 - Sommer, David A1 - Götzendorfer, Babette A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Design Rules for Hybrid Additive Manufacturing Combining Selective Laser Melting and Micromilling JF - Design and Post Processing for Metal Additive Manufacturing N2 - We report on a comprehensive study to evaluate fundamental properties of a hybrid manufacturing approach, combining selective laser melting and high speed milling, and to characterize typical geometrical features and conclude on a catalogue of design rules. As for any additive manufacturing approach, the understanding of the machine properties and the process behaviour as well as such a selection guide is of upmost importance to foster the implementation of new machining concepts and support design engineers. Geometrical accuracy between digitally designed and physically realized parts made of maraging steel and dimensional limits are analyzed by stripe line projection. In particular, we identify design rules for numerous basic geometric elements like walls, cylinders, angles, inclinations, overhangs, notches, inner and outer radii of spheres, chamfers in build direction, and holes of different shape, respectively, as being manufactured by the hybrid approach and compare them to sole selective laser melting. While the cutting tool defines the manufacturability of, e.g., edges and corners, the milling itself improves the surface roughness to Ra < 2 µm. Thus, the given advantages of this hybrid process, e.g., space-resolved and custom-designed roughness and the superior geometrical accuracy are evaluated. Finally, we exemplify the potential of this particular promising hybrid approach by demonstrating an injection mold with a conformal cooling for a charge socket for an electro mobile KW - hybrid additive manufacturing; high-speed milling; selective laser melting; construction rules KW - Selektives Laserschmelzen KW - Hochgeschwindigkeitsfräsen Y1 - 2021 UR - https://www.mdpi.com/1996-1944/14/19/5753 U6 - https://doi.org/https://doi.org/10.3390/ma14195753 VL - 14 IS - 19 SP - 1 EP - 23 ER - TY - JOUR A1 - Sommer, David A1 - Pape, Dominik A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Tool Wear and Milling Characteristics for Hybrid Additive Manufacturing Combining Laser Powder Bed Fusion and In Situ High-Speed Milling JF - Ultra-Precision Manufacturing Technology for Difficult-to-Machine Materials N2 - We report on milling and tool wear characteristics of hybrid additive manufacturing comprising laser powder bed fusion and in situ high-speed milling, a particular process in which the cutter mills inside the powder bed without any cooling lubricant being applicable. Flank wear is found to be the dominant wear characteristic with its temporal evolution over utilization period revealing the typical s-shaped dependence. The flank wear land width is measured by microscopy and correlated to the achievable surface roughness of milled 3D-printed parts, showing that for flank wear levels up to 100 μm a superior surface roughness below 3 μm is accessible for hybrid additive manufacturing. Further, based on this correlation recommended tool, life scenarios can be deduced. In addition, by optimizing the finishing tool start position and the number of afore-built layers, the milling process is improved with respect to the maximum millable angle for undercut surfaces of 3D-printed parts to 30° for the roughing process and to 40° for the entire machining process including finishing KW - hybrid additive manufacturing; high-speed milling; laser powder bed fusion; tool wear KW - Hochgeschwindigkeitsfräsen KW - Werkzeugverschleiß Y1 - 2022 UR - https://www.mdpi.com/1996-1944/15/3/1236 U6 - https://doi.org/https://doi.org/10.3390/ma15031236 VL - 15 IS - 3 SP - 1 EP - 13 ER - TY - JOUR A1 - Kefer, Stefan A1 - Zettl, Julian A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces JF - Materials N2 - Sapphire is a robust and wear-resistant material. However, efficient and high-quality micromachining is still a challenge. This contribution demonstrates and discusses two novels, previously unreported approaches for femtosecond laser-based micromachining of rotational-symmetric sapphire workpieces, whereas both methods are in principal hybrids of laser scanning and laser turning or laser lathe. The first process, a combination of a sequential linear hatch pattern in parallel to the workpiece’s main axis with a defined incremental workpiece rotation, enables the fabrication of sapphire fibers with diameters of 50 µm over a length of 4.5 mm. Furthermore, sapphire specimens with a diameter of 25 µm over a length of 2 mm can be fabricated whereas an arithmetical mean height, i.e., Sa parameter, of 281 nm is achieved. The second process combines a constant workpiece feed and orthogonal scanning with incremental workpiece rotation. With this approach, workpiece length limitations of the first process are overcome and sapphire fibers with an average diameter of 90 µm over a length of 20 cm are manufactured. Again, the sapphire specimen exhibits a comparable surface roughness with an average Sa value of 249 nm over 20 cm. Based on the obtained results, the proposed manufacturing method paves an innovative and flexible, all laser-based way towards the fabrication or microstructuring of sapphire optical devices, and thus, a promising alternative to chemical processes. KW - sapphire KW - femtosecond laser KW - micromachining KW - laser turning KW - ablation threshold KW - Femtosekundenlaser KW - Saphir Y1 - 2022 UR - https://www.mdpi.com/1996-1944/15/18/6233 U6 - https://doi.org/10.3390/ ma15186233 VL - 15 IS - 18 SP - 6233 EP - 6233 ER - TY - JOUR A1 - Bischoff, Kay A1 - Mücke, Dominik A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV-Femtosecond-Laser Structuring of Cyclic Olefin Copolymer JF - Polymers N2 - We report on the laser ablation of cyclic olefin copolymer using an amplified ultrashort pulsed laser in the ultraviolet spectral range. In addition to a high ablation depth per laser-structured layer up to 74 μm at a fluence of 22 J cm−2, an excellent mean roughness 𝑅𝑎 of laser-patterned surfaces down to 0.5 μm is demonstrated. Furthermore, with increasing fluence, increasing ablation efficiencies up to 2.5 mm3 W−1 min−1 are determined. Regarding the quality of the ablation, we observed steep ablation flanks and low debris formation, though for fluences above 10.5 J cm−2 the formation of troughs was observed, being attributed to multiple reflections on the ablation flanks. For comparison, laser ablation was performed under identical conditions with an infrared laser wavelength. The results highlight that UV ablation exhibits significant advantages in terms of ablation efficiency, surface roughness and quality. Moreover, our results show that a larger UV focus spot accelerates the ablation process with comparable quality, paving the way for high-power UV ultrashort pulsed lasers towards an efficient and qualitative tool for the laser machining of cyclic olefin copolymer. The production of complex microfluidics further underlines the suitability of this type of laser. KW - Femtosekundenlaser Y1 - 2022 U6 - https://doi.org/https://doi.org/10.3390/polym14142962 VL - 14 IS - 14 SP - 2962 EP - 2962 ER - TY - JOUR A1 - Bischoff, Kay A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Preparation of Dispersed Copper(II) Oxide Nanosuspensions as Precursor for Femtosecond Reductive Laser Sintering by High-Energy Ball Milling JF - Nanomaterials N2 - This contribution demonstrates and discusses the preparation of finely dispersed copper(II) oxide nanosuspensions as precursors for reductive laser sintering (RLS). Since the presence of agglomerates interferes with the various RLS sub-processes, fine dispersion is required, and oversized particles must be identified by a measurement methodology. Aside from the established method of scanning electron microscopy for imaging individual dried particles, this work applies the holistic and statistically more significant laser diffraction in combination with dynamic image analysis in wet dispersion. In addition to direct ultrasonic homogenization, high-energy ball milling is introduced for RLS, to produce stable nanosuspensions with a high fine fraction, and, above all, the absence of oversize particles. Whereas ultrasonic dispersion stagnates at particle sizes between 500 nm and 20 μm, even after 8 h, milled suspension contains a high proportion of finest particles with diameters below 100 nm, no agglomerates larger than 1 μm and a trimodal particle size distribution with the median at 50 nm already, after 100 min of milling. The precursor layers produced by doctor blade coating are examined for their quality by laser scanning microscopy. The surface roughness of such a dry film can be reduced from 1.26 μm to 88 nm by milling. Finally, the novel precursor is used for femtosecond RLS, to produce homogeneous, high-quality copper layers with a sheet resistance of 0.28 Ω/sq and a copper mass concentration of 94.2%. KW - Laserstrahlsintern KW - Femtosekundenlaser Y1 - 2023 U6 - https://doi.org/https://doi.org/10.3390/nano13192693 VL - 13 IS - 19 SP - 2693 EP - 2693 ER - TY - JOUR A1 - Franz, Daniel A1 - Yang, Yongting A1 - Michel, Luis A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Evaluation of an ultrashort pulsed laser robot system for flexible and large-area micromachining JF - Journal of Laser Applications N2 - We report for the first time on the realization, characterization and application of an ultrashort pulsed laser robot system for flexible and large-area 2D and 3D laser micromachining with 6 articulated axes. To characterize the dynamic positioning of the laser beam during and after axes movement, CMOS image sensors were integrated into the beam path. A method introduced for the alignment of the optical axes allows a reduction of the deviations in laser beam positioning to less than 141.8 ± 92.9 μm within a 110° rotation range of axis 4. In addition, a high laser beam positioning repeatability of less than 102.2 μm is demonstrated over a total period of 14 h for a movement of axis 5 within a range of 0° to 90°. Initial laser cutting, laser structuring and laser marking applications on automotive dashboards and glass substrates are presented for flexible and large area 2D and 3D manufacturing. By applying a special laser cutting strategy for processing AF 32 eco thin glass, high cutting quality is achieved with a taper of up to 96.3% without the generation of cracks, demonstrating the innovative potential of the high-precision laser robot system. Nonetheless, different identified inherent influences of each axis 1–5 during robot axis movement demand for an innovative beam stabilization concept to achieve high precision in laser beam positioning. KW - Ultrakurzzeitlaser KW - Industrieroboter Y1 - 2023 N1 - Proceedings of the International Congress of Applications of Lasers & Electro-Optics (ICALEO 2023) VL - 35 IS - 4 SP - 042057 EP - 042065 ER - TY - CHAP A1 - Franz, Daniel A1 - Mücke, Dominik A1 - Kunz, Tim A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 % on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 % reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing. KW - Pikosekundenbereich KW - Laserbohren Y1 - 2023 ER - TY - JOUR A1 - Bischoff, Kay A1 - Kefer, Stefan A1 - Wienke, Alexander A1 - Overmeyer, Ludger A1 - Kaierle, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Integration of Bragg gratings in aerosol-jetted polymer optical waveguides for strain monitoring capabilities JF - Optics Letters N2 - We demonstrate and discuss the integration of Bragg gratings in aerosol-jetted polymer optical waveguides, produced in the optical assembly and connection technology for component-integrated bus systems (OPTAVER) process. By using a femtosecond laser and adaptive beam shaping, an elliptical focal voxel generates different types of single pulse modification by nonlinear absorption in the waveguide material, which are arranged periodically to form Bragg gratings. Integration of a single grating structure or, alternatively, an array of Bragg grating structures in the multimode waveguide yields a pronounced reflection signal with typical multimodal properties, i.e., a number of reflection peaks with non-Gaussian shapes. However, the main wavelength of reflection, located around 1555 nm, is evaluable by means of an appropriate smoothing algorithm. When loaded by mechanical bending, a pronounced Bragg wavelength shift of this reflected peak up to 160 pm is detected. This demonstrates that the additively manufactured waveguides can be used not only for signal transmission but also as a sensor. KW - Bragg-Reflektor KW - Lichtwellenleiter Y1 - 2023 U6 - https://doi.org/https://doi.org/10.1364/OL.481801 VL - 48 IS - 7 SP - 1778 EP - 1781 ER - TY - CHAP A1 - Bischoff, Kay A1 - Mücke, Dominik A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV-Femtosecond-Laser Structuring of Silicon Carbide T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on ultraviolet ultrashort pulsed laser processing of silicon carbide. Laser ablated cavities are evaluated with respect to their ablation rates, surface roughness and overall quality by varying the laser pulse fluence. Using this type of laser, high edge quality and surface roughness down to 107 nm can be achieved with an ablation efficiency of up to 0.228 mm 3 W −1 min −1. Functional surfaces are produced by generating laser induced periodic surface structures. The comparison with infrared wavelength underlines the advantages of the ultraviolet wavelength for laser micro machining this material. Significant differences with respect to the measured ablation depths and roughness as well as generated micro-and nanostructures appear. While infrared ablation is dominated by a chipping mechanism above a critical fluence of 9.93 Jcm −2 , higher ablation rates are observed with strong quality losses at the same time. In comparison to the infrared emission wavelength, in general , a significantly higher processing quality is achieved with the ultraviolet emission wavelength. In addition, the influence of spot size and repetition rate in UV processing is investigated. By increasing these parameters, a process acceleration without quality losses is enabled. The generation of a sophisticated microstructure exemplifies the advantages of processing silicon carbide with the UV laser reported here. KW - Femtosekundenlaser KW - Siliciumcarbid Y1 - 2023 ER - TY - CHAP A1 - Bischoff, Kay A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Acceleration of Femtosecond Reductive Laser Sintering of Copper(II) Oxide for Conductive Copper Patterns on Cyclic Olefin Copolymers T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on the acceleration of femtosecond reductive laser sintering of copper (II) oxide on the surface of transparent cyclic olefin copolymers (COC) by varying the focus size to generate metallic copper (Cu) layers. By using different focusing conditions, different process speeds are achieved, and the structural accuracies are controlled. The formation of Cu lines is observed for different focus sizes at various scan speeds, which is attributed to laser exposure duration and chemical reaction time. The formed lines are categorized and measured by optical microscopy and provide the basis for two-dimensional Cu surfaces. By hatching, high quality conductive films are produced with an increased focus diameter of up to 400 µm at a scan speed of 400 mm/s and a hatch distance of 250 µm resulting in a multiple increased process speed by a factor of thirteen compared to previous research. Using 4-tip measurement , a low sheet resistance of 0.165 Ω/sq was validated on these Cu films, which have an atomic Cu content of 89.5%. KW - Femtosekundenlaser Y1 - 2023 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Microchannels inside bulk PMMA generated by femtosecond laser using adaptive beam shaping JF - Optics Express N2 - In this contribution, we report on the generation of internal microchannels with basically unlimited channel length inside of PMMA bulk material by femtosecond laser. A precisely controllable and stable circular channel cross section is obtained by using a spatial light modulator to compensate the writing depth depending spherical aberration. Furthermore, the generation of a rotatable elliptical input beam by adaptive optics ensures a fitting of the beam shaping to the writing direction. In this study, we report on both, the effect of the ellipticity of the input beam and the effect of a correction of the spherical aberration on the circularity of the resulting internal microchannels. Moreover, we demonstrate the application of this writing technique by creating microfluidic testing structures inside of a transparent standard polymer. KW - Femtosekundenlaser KW - Polymethylmethacrylate Y1 - 2020 VL - 28 IS - 4 SP - 5801 EP - 5811 ER - TY - CHAP A1 - Kefer, Stefan A1 - Zettl, Julian A1 - Schmauss, Bernhard A1 - Esen, Cemal A1 - Hellmann, Ralf ED - Kling, Rainer ED - Pfleging, Wilhelm ED - Watanabe, Akira T1 - High-Precision Micromachining of Sapphire Towards Optical Waveguiding Structures using Femtosecond Lasers T2 - Laser-based Micro- and Nanoprocessing XVII N2 - While sapphire is one of the most durable materials, its properties entail that high-precision machining, especially in the sub-millimeter regime, is still challenging. This contribution demonstrates and discusses novel femtosecond laser-based micromachining approaches for the fabrication of rotational-symmetric sapphire workpieces, specifically the generation of optical fibers by means of laser lathe of sapphire rods and the practical realization of windmill fibers. In addition, volume refractive index modification in planar sapphire substrates is presented to induce photonic crystal waveguides. The micromachined structures are comprehensively examined with respect to geometric fidelity, surface roughness, refractive index modification, and potential optical waveguiding properties. All micromachining approaches are done by means of frequency-doubled or frequency-tripled femtosecond laser radiation. Different laser optical setups including laser scanning head, spatial beam profilers including a spatial light modulator and axial rotatory movement of the specimen are employed for micro structuring and in-depth refractive index modifications. In particular for laser lathe, a sophisticated scanning pattern, in combination with an incremental axial rotatory movement of the specimen, allows for the precise diameter reduction of sapphire rods with 250 µm diameter to fibers with outer diameters of 25 µm. By supporting the workpiece with a V-groove fixture, multi-mode fibers with lengths up to 20 cm can be processed with an average surface roughness of 250 nm. Additionally, an adapted ablation scanning sequence enables the first practical demonstration of sapphire windmill fibers. Furthermore, using a spatial light modulator allows for the adaption of the laser propagation properties as to enable volume refractive index modifications with free-form arrangement. Hexagonal patterns of refractive index modifications surrounding a pristine waveguide core are fabricated and single-mode waveguiding at 1550 nm is verified. Finally, the possibility of integrating Bragg gratings into this photonic waveguide type is demonstrated KW - sapphire KW - femtosecond laser KW - micromachining KW - laser lathe KW - rod-to-fiber KW - Femtosekundenlaser KW - Saphir Y1 - 2023 SN - 9781510659230 U6 - https://doi.org/10.1117/12.2648758 SP - 3 EP - 11 ER - TY - CHAP A1 - Roth, Gian-Luca A1 - Wolf, Bastian A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Generation of internal 3D microfluidic architectures in polymers by fs laser processing T2 - Lasers in Manufacturing 2019 N2 - Microfluidic lab on chip systems require components to transport, mix, separate and analyse small volumes of different fluids. In this study, we report on the laser generation of internal hollow architectures created by focused 514 nm femtosecond laser pulses inside PMMA bulk material. Size and cross-sectional shape of a single internal generated microchannel are determined by the intensity distribution inside the focal voxel and can be controlled either by the numerical aperture of the focusing objective or by laser beam shaping. As both approaches are practically limited with respect to the realizable cross-sectional shapes, we present a process based on an internal hatching to expand the achievable channel cross-sections and thereby enable the possibility to create complex 3D shaped internal structures. This process is applied to create fully internal functional microfluidic elements such as mixers which are part of most polymer lab-on-chip systems. KW - Femtosekundenlaser Y1 - 2019 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Axicon fabrication with ultrashort and CO2 laser T2 - LPM2018 The 19th International Symposium on Laser Precision Microfabrication KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser Y1 - 2018 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication of a high-quality axicon by femtosecond laser ablation and CO2 laser polishing for quasi-Bessel beam generation JF - Optics Express KW - Femtosekundenlaser Y1 - 2018 VL - 26 IS - 18 SP - 23287 EP - 23294 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Ultrashort pulsed laser backside ablation of fused silica JF - Optics Express KW - Femtosekundenlaser KW - Quarzglas KW - Mikrobearbeitung Y1 - 2021 VL - 29 IS - 15 SP - 23477 EP - 23486 ER - TY - JOUR A1 - Häfner, Tom A1 - Bischoff, Kay A1 - Helm, Jonas A1 - Kunz, Tim A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - KEINE FREISCHALTUNG - Urheberrecht 0 bei Dokument mit Volltext Picosecond laser microvia drilling of ABF material using MHz burst mode JF - Materials Research Express N2 - We report on a comprehensive study of laser percussion microvia drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in MHz burst mode. After laser processing, microvia drilling quality is being evaluated by the fabricated diameter and taper using laser scanning microscopy and metallography. The influences of the incubation effect, heat accumulation and shielding effects as a result of pulse to pulse interactions are being discussed on the ablation threshold, penetration depth and laser microvia drilling quality. We find that an increasing heat accumulation in MHz burst mode processing is responsible for the void formation and delamination of the insulating ABF layer. Therefore, the parameter clearance is introduced to evaluate these effects on the microvia sidewalls. For a comparable clearance, applying 2 intra-burst pulses achieves an average reduced taper of down to 19.5% compared to single pulse mode. At the same time, a reduced laser drilling time of 16.7% per microvia highlights the enormous potential of the MHz burst mode for laser drilling of ABF material in printed circuit board fabrication. KW - Ultrakurzzeitlaser KW - Pikosekundenbereich Y1 - 2023 VL - 10 IS - 9 SP - 096301 EP - 096311 ER - TY - CHAP A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Homogeneous low spatial frequency LIPSS on dielectrics generated by beam-shaped femtosecond pulsed laser irradiation T2 - LPM2018 The 19th International Symposium on Laser Precision Microfabrication KW - Femtosekundenlaser Y1 - 2018 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Current results on laser-based production of complex optics in glass T2 - 10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar KW - Laserbearbeitung KW - Fertigungstechnik Y1 - 2020 ER - TY - CHAP A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - CO2 laser polishing of femtosecond shaped micro-optical components T2 - 3rd Conference on Laser Polishing LaP 2018 KW - Kohlendioxidlaser Y1 - 2018 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Femtosecond laser direct generation of 3D-microfluidic channels inside bulk PMMA JF - Optics Express N2 - We report on laser direct generation of 3D-microchannels for microfluidic applications inside PMMA bulk material by focused femtosecond pulses. Inner lying channels with cross sectional areas from 100 µm2 to 4400 µm2 are directly created in the volume of a PMMA substrate. Using the presented process, the channel length is fundamentally unlimited. Here we demonstrate a channel length of 6 meters inside a substrate with dimensions of 20 × 20 × 1.1 mm. The formation of the micro channels is based on nonlinear absorption around the focal volume that triggers a material modification. The modified volume can be selectively opened to form the channel by a subsequent annealing process. The cross section of the channel is strongly influenced by the energy distribution and illumination around the focal volume determined by the optical setup and process design. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stage, allowing freely chosen complex shaped channel architectures. Within a comprehensive parameter study, varying laser power, number of multi-passes, writing speed and writing depths, we identify an optimized process in terms of attainable channel height, width and aspect ratio, as well as process stability and reproducibility. The proof of concept for an application in three dimensional microfluidic systems is provided by florescence microscopy using a dye rhodamine B solution in isopropanol. KW - Femtosekundenlaser Y1 - 2017 VL - 25 IS - 15 SP - 18442 EP - 18450 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Circular microchannels inside bulk polymethylmethacrylate generated by femtosecond laser using slit beam shaping JF - Journal of Laser Applications N2 - The authors report on the laser generation of three-dimensional microchannel architectures with fundamentally unlimited channel length by focused 514 nm femtosecond laser pulses inside polymethylmethacrylate bulk material. The three-dimensional channel layout is implemented by moving the specimen using three-dimensional motorized stages, allowing freely chosen complex shaped channel architectures. Based on nonlinear absorption of high intensities around the focal volume, a material modification, including a refractive-index shift is triggered. After laser exposure, the channel is created by a gaseous degradation of exposed areas during an annealing process. Cross section and aspect ratio of thus generated microchannels are strongly influenced by the numerical aperture of the applied objective. To obtain a circular cross-sectional shape, high focusing objectives are necessary. In this report, the authors improve the existing setup by using an elliptical input beam, transforming the intensity distribution of the focal area in the propagation direction to a circular shape even for low and medium numerical aperture focusing objectives and therefore avoiding a small working distance as a limiting factor for processing depth. The elliptical input beam is obtained by insertion of a slit mask in front of the focusing objective. The ellipticity of the incident beam defines the aspect ratio of the generated microchannels. Furthermore, the size of internal microchannels is adjustable by varying laser and annealing process parameters. KW - Femtosekundenlaser Y1 - 2019 VL - 31 IS - 2 SP - 022603-1 EP - 022603-5 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Vertical Microchannels for Microfluidic Multilayer Interconnections in PMMA JF - Journal of Laser Micro/Nanoengineering N2 - We report on laser generation of microchannels by focused femtosecond laser pulses inside PMMA bulk material. This process enables direct fabrication of three dimensional microfluidic channel architectures with generally unlimited channel length. Based on nonlinear ultrashort pulse laser absorption of high intensities around the focal volume, a material modification including a refractive index shift is triggered. After laser exposure the channel is created by a gaseous degradation of exposed areas during an annealing process. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stages, allowing freely chosen complex shaped channel architectures. In this report, the creation of inner lying vertical microchannels is examined. In addition to previously shown horizontal channel architectures vertical channels are necessary to fulfill the definition of an internal three-dimensional microfluidic structure and to create interconnections in multilevel lab on chip devices. The cross section and geometry of vertical channels are strongly influenced by laser parameters such as pulse duration, laser power and writing speed. The influence of these process parameters on the channels diameter is determined and parameters are optimized regarding a controllable, stable and reproducible process. The functionality of vertical microchannels as an interconnection between multilayer microfluidic devices is demonstrated using a Rhodamine B solution. KW - Polymethylmethacrylate KW - Femtosekundenlaser Y1 - 2018 VL - 13 IS - 3 SP - 155 EP - 159 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Control of femtosecond laser generated microfluidic channels inside poly (methyl methacrylate) JF - Journal of Laser Applications N2 - In this study, the authors report on femtosecond laser direct generation of microchannels inside poly(methyl methacrylate) with variable dimensions ranging from a channel height of 20 to 350 μm and an aspect ratio down to 1.2. Focused ultrashort laser pulses are used to trigger a material modification in the focal area which can be selectively opened by a subsequent annealing process. A 3D microchannel architecture can easily be realized by moving the specimen using motorized stages, allowing freely chosen complex shaped channel layouts. While the laser wavelength is identified as one of the main parameters determining process effectiveness, another core of this study is the variation of channel dimensions by the numerical aperture of the applied objective to focus the laser. The authors find that both size and shape of the modified region and the resulting microchannel can be controlled by altering the numerical aperture. KW - Femtosekundenlaser KW - Polymethylmethacrylate Y1 - 2018 VL - 30 IS - 3 SP - 032016-1 EP - 032016-6 ER - TY - JOUR A1 - Rung, Stefan A1 - Bokan, Kevin A1 - Kleinwort, Frederick A1 - Schwarz, Simon A1 - Simon, Peter A1 - Klein-Wiele, Jan-Hendrik A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Possibilities of Dry and Lubricated Friction Modification Enabled by Different Ultrashort Laser-Based Surface Structuring Methods JF - Lubricants N2 - In this contribution we report on the possibilities of dry and lubricated friction modification introduced by different laser surface texturing methods. We compare the potential of Laser-Induced Periodic Surface Structures and Laser Beam Interference Ablation on 100Cr6 steel in a linear reciprocating ball-on-disc configuration using 100Cr6 steel and tungsten carbide balls with load forces between 50mN and 1000 mN. For dry friction, we find a possibility to reduce the coefficient of friction and we observe a pronounced direction dependency for surfaces fabricated by Laser Beam Interference Ablation. Furthermore, Laser-Induced Periodic Surface Structures result in a load-dependent friction reduction for lubricated linear reciprocating movements. This work helps to identify the modification behaviour of laser generated micro structures with feature sizes of approximately 1μm and reveals new possibilities for surface engineering KW - laser-induced periodic surface structures KW - laser beam interference ablation KW - dry friction KW - lubricated friction KW - laser surface texturing KW - Laser KW - Oberflächenstruktur Y1 - 2019 U6 - https://doi.org/10.3390/lubricants7050043 VL - 7 IS - 43 SP - 1 EP - 13 ER - TY - JOUR A1 - Rung, Stefan A1 - Bokan, Kevin A1 - Rutsch, Kevin A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Laser Induced Periodic Surface Structures on 100Cr6 Steel for Modification of Friction Demonstrated with Stribeck Test JF - Journal of Laser Micro/Nanoengineering N2 - In this contribution, we report on surface functionalization by introducing laser induced periodic surface structures on 100Cr6 bearing steel to modify complex tribological properties. The advanced approach of this study is the measurement of the coefficient of friction by performing a ball-on-disk Stribeck test on laser structured surfaces with polytetrafluoroethylene balls in a lubricant environment. The Stribeck test reveals the modified friction behavior using translation speeds up to 106 mm/min and load forces between 100 mN and 5000 mN. Our results show increased stiction and coefficient of friction for laser structured surfaces in the regime of boundary lubrication which is attributed to the laser induced surface asperities. Decreased coefficient of friction is observed in the regime of mixed and hydrodynamic lubrication, i.e. for velocities higher than 1000 mm/min, for surfaces covered by laser induced periodic surface structures with low spatial frequency. KW - Laser KW - Oberflächenstruktur Y1 - 2018 U6 - https://doi.org/10.2961/jlmn.2018.03.0004 VL - 13 IS - 3 SP - 160 EP - 165 ER - TY - CHAP A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Internal micro structuring of transparent optical polymers by fs laser T2 - Laser-based Micro-and Nanoprocessing XIV 2020 N2 - Lab-on-chip systems are based on components to transport, mix, separate and analyse small volumes of different fluids. The consecutive integration of more complex functions into a single and compact chip demands on multilayer systems. As the classical production using a stacking and joining of single processed layers is elaborate and limited in terms of multilayer structures, an uprising trend to fabricate those devices is the internal, three dimensional processing of transparent substrates by using ultrashort laser pulses. In this study, we report on the generation of internal hollow architectures created by focused 514nm femtosecond laser pulses inside optical polymer bulk materials of different polymers. The three-dimensional channel layout is implemented by moving the sample using three-dimensional motorized stages, allowing arbitrary complex shaped internal channel architectures. Size and cross sectional shape of a single internal generated microchannel are determined by the intensity distribution of the focal voxel. In particular, we show a comprehensive parameter study to improve this laser process with respect to a higher processing speed and stability. KW - Femtosekundenlaser Y1 - 2020 U6 - https://doi.org/10.1117/12.2543487 VL - 11268 SP - 112681L PB - International Society for Optics and Photonics ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Laser beam microwelding of transparent plastics JF - Joining Plastics N2 - The laser beam welding of transparent plastic components is still a challenge according to the state of the art. A new approach for the joining of two transparent polymeric components using ultrashort laser beam pulses is presented in this report. In this respect, the high peak pulse intensity associated with these lasers permits non-linear absorption processes and thus the production of a locally well-defined heat source in the interior even of a transparent material or at the boundary layer between two transparent substrates. Welding results for transparent plastics of the cycloolefin copolymer and polycarbonate types are shown in this study. In addition to the investigation into the influences of fundamental process parameters on the weld geometry, the leak tightness is demonstrated in this study using a microfluidic system. KW - Laserschweißen Y1 - 2018 VL - 12 IS - 3/4 SP - 2 EP - 8 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Homogeneous low spatial frequency LIPSS on dielectric materials generated by beam-shaped femtosecond pulsed laser irradiation JF - Journal of Laser Micro/Nanoengineering KW - Femtosekundenlaser Y1 - 2018 VL - 13 IS - 2 SP - 90 EP - 94 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Influence of pulse duration on high-precision manufacturing of 3D geometries JF - Journal of Laser Micro/Nanoengineering KW - Dreidimensionale Geometrie Y1 - 2018 VL - 13 IS - 3 SP - 292 EP - 295 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Surface Plasmon Polariton Triggered Generation of 1D-Low Spatial Frequency LIPSS on Fused Silica JF - Applied Sciences KW - Femtosekundenlaser KW - Quarzglas Y1 - 2018 VL - 8 IS - 9 SP - 1624 EP - 1624 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Rapid fabrication of precise glass axicon arrays by an all laser-based manufacturing technology JF - Journal of Laser Applications KW - Femtosekundenlaser Y1 - 2020 VL - 32 IS - 1 SP - 012001 EP - 012001 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Hessler, Steffen A1 - Kefer, Stefan A1 - Girschikofsky, Maiko A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Femtosecond laser inscription of waveguides and Bragg gratings in transparent cyclic olefin copolymers JF - Optics Express N2 - We report on a femtosecond laser based fabrication technique that enables simultaneous single-step generation of optical waveguides and Bragg gratings inside bulk cyclic olefin copolymers. Due to the nonlinear absorption of focused and spatially modulated laser radiation with a wavelength of 514 nm and a pulse duration of 450 fs, a modification concluding a refractive index shift increase inside the substrate can be achieved. A sophisticated characterization of the generated waveguides by means of an elaborate cut-back method reveals a maximum attenuation of 3.2 dB/cm. Additionally, a Mach-Zehnder interferometer is used to examine the waveguide’s refractive index profile. The integrated Bragg grating structures exhibit reflectivities up to 95 % and a spectral full width at half maximum of 288 pm, at a Bragg wavelength of 1582 nm, whereas the grating period can be deliberately chosen by adapting the fabrication parameters. Thus, due to its increased flexibility and the resulting dispensability of cost-intensive phase masks, this method constitutes an especially promising fabrication process for polymer Bragg gratings inside of bulk materials. KW - Femtosekundenlaser KW - Wellenleiter KW - Bragg-Reflektor Y1 - 2020 U6 - https://doi.org/10.1364/OE.388364 VL - 28 IS - 12 SP - 18077 EP - 18084 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Haubner, Julian A1 - Kefer, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fs-laser based hybrid micromachining for polymer micro-opto electrical systems JF - Optics and Lasers in Engineering N2 - We report on femtosecond laser direct writing of electrically conductive copper structures on transparent cyclic olefin copolymer based planar optical chips. The process is based on a laser-induced reduction of CuO nanoparticles dissolved in a water-soluble resin. Thus generated conductive copper structures are characterized with respect to their chemical composition and electrical resistivity. In addition, the application of ultrashort laser pulses enables a hybrid micromachining approach comprising ablation of polymer substrates and the fabrication of copper patterns in a single laser processing setup. A possible electro-optical application of this approach is demonstrated by employing the copper structures as an electro-thermal microheater in combination with a polymer planar optical Bragg grating sensor. This, in turn, highlights the potential of generating copious micro-opto-electro-mechanical polymer structures for numerous sensing applications ranging from Lab-on-Chip to environmental applications using the presented hybrid micromachining approach. KW - Femtosekundenlaser KW - Bragg-Reflektor Y1 - 2020 U6 - https://doi.org/10.1016/j.optlaseng.2020.106362 VL - 137 IS - 10362 SP - 1 EP - 8 ER - TY - JOUR A1 - Rung, Stefan A1 - Bokan, Kevin A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Influence of laser wavelength on the modification of friction between 100Cr6 steel and polytetrafluoroethylene by femtosecond laser-induced periodic surface structures JF - Journal of Laser Applications KW - Femtosekundenlaser Y1 - 2020 U6 - https://doi.org/10.2351/7.0000036 VL - 32 IS - 3 SP - 032017-1 EP - 032017-6 ER - TY - JOUR A1 - Schleier, Max A1 - Adelmann, Benedikt A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Cross-correlation-based algorithm for monitoring laser cutting with high-power fiber lasers JF - IEEE Sensors Journal KW - Detection algorithm, laser cutting, online monitoring KW - Laserschneiden KW - Hochleistungslaser KW - Faserlaser Y1 - 2017 U6 - https://doi.org/10.1109/JSEN.2017.2783761 VL - 18 IS - 4 SP - 1585 EP - 1590 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Kefer, Stefan A1 - Hessler, Steffen A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Integration of Microfluidic and Photonic Components within Transparent Cyclic Olefin Copolymers by Using fs Laser JF - Journal of Laser Micro/Nanoengineering N2 - In this study, we report on the integration of microfluidic channels and optical components by focusing femtosecond laser radiation inside transparent cyclic olefin copolymer (COC) bulk material. An internal localized material modification is triggered based on nonlinear absorption of the laser radiation's high intensities inside the focal volume. The size and shape of the three-dimensional internal modification are controlled by using an adaptive beam shaping setup. The irradiated areas show a positive refractive index shift and can be used as Type I internal optical waveguides. Furthermore, precise control of the spatial pulse-to-pulse distance in combination with a suitable beam profile enables the integration of functional photonic elements, e.g., Bragg gratings, into the waveguide. Thus, it also enables the generation of integrated photonic sensors. In addition, internal fs laser-induced modifications are characterized by a lower thermal stability as compared to the pristine polymer material. By performing a post-annealing process step, internal hollow microstructures are created by gaseous degradation of the exposed areas. Circular microchannels can be generated in a deliberately chosen layout by employing motorized 3D stages. In comparison to etching-based fabrication methods the proposed technology facilitates unlimited channel lengths, as it omits restrictions arising from an etching selectivity and duration. Altogether, this contribution paves the way towards the fabrication of internal three-dimensional optofluidic devices, equipped with a photonic sensor. In contrast, microfluidic and photonic structures are both created by femtosecond laser direct writing inside of transparent polymers. KW - Femtosekundenlaser Y1 - 2021 U6 - https://doi.org/10.2961/jlmn.2021.01.2009 VL - 16 IS - 1 SP - 1 EP - 6 ER - TY - JOUR A1 - Zettl, Julian A1 - Klar, Maximilian A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Generation of Rotationally Symmetric Micro Tools using Ultrashort Laser Pulses JF - Journal of Laser Micro/Nanoengeneering N2 - We report on the fabrication of rotationally symmetrical geometries with ultrashort laser pulses impinging the constant rotating workpiece tangentially. This particular micro machin-ing of geometry is referred to as laser turning, upon which the laser beam is, in general, orient-ed perpendicularly to the rotational axis and tangentially to the work piece. The target geome-try is realized by moving the constantly rotating specimen according to the specified geometry along the focused laser spot. In contrast to mechanical turning, laser turning induces a mini-mized amount of lateral forces through friction that might deteriorate the geometry. In this study, laser turning is examined for stellite as a function of pulse energy and pulse length in the range between 240 fs and 10 ps. Shorter pulse lengths and higher pulse energies increase the achievable ablation rate, while in the pulse length regime of below 1 ps lower roughness is achieved. With a maximum ablation rate of 1.27 mm³/min and a minimum roughness of 0.17 µm, laser turning combines both, fast processing and high surface quality. KW - Ultrakurzzeitlaser Y1 - 2020 U6 - https://doi.org/10.2961/jlmn.2020.02.2007 VL - 15 IS - 2 SP - 118 EP - 122 ER - TY - JOUR A1 - Lutz, Christian A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Efficient Ultrashort Pulsed Laser Processing by Dynamic Spatial Light Modulator Beam Shaping for Industrial Use JF - Journal of Laser Micro/Nanoengineering N2 - We report on the effect of different transversal beam shapes on the efficiency of ablation processes and the resulting surface characteristics. A possibility to efficiently apply ultrashort pulsed lasers with high average power is beam shaping. By using a cooled reflective based liquid crystal spatial light modulator to generate different spot distributions, it is possible to spatially allocate the available power to avoid excessive high fluences. In our experiments, we determine the optimal fluence to ablate the maximum volume per watt to be in the range of 0.2-0.4 J/cm². Based on this fluence, we increase the number of spots from one to a maximum of twenty to ablate steel in a multilayer scanning-based process. In this context, we examine the influence of different separation distances between the spots on the ablation efficiency and roughness. Subsequently to these investigations, we develop an efficient roughing process with higher ablation rates and a nearly constant roughness. KW - Ultrakurzzeitlaser KW - Lichtmodulator Y1 - 2021 U6 - https://doi.org/10.2961/jlmn.2021.01.2011 VL - 16 IS - 1 SP - 1 EP - 6 ER - TY - CHAP A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator T2 - Lasers in Manufacturing - LiM 2021 N2 - We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing. KW - Ultrakurzzeitlaser KW - Lichtmodulator Y1 - 2021 ER - TY - CHAP A1 - Franz, Daniel A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Superimposed beam deflection using acousto-optical deflectors in combination with a galvanometer scanner T2 - Lasers in Manufacturing - LiM 2021 KW - Galvanometer Y1 - 2021 ER - TY - JOUR A1 - Schwarz, Simon A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fabrication and evaluation of negative axicons for ultrashort pulsed laser applications JF - Optics Express KW - Ultrakurzzeitlaser Y1 - 2020 VL - Optics Express IS - 28 SP - 26207 EP - 26217 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Manufacturing of optical elements by non-contact laser processing T2 - Seventh European Seminar on Precision Optics Manufacturing, Proceedings KW - Laserbearbeitung KW - Optisches Bauelement Y1 - 2020 IS - 11478 ER - TY - JOUR A1 - Zettl, Julian A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Tangential Laser Turning of Fused Silica Using Ultra-short Laser Pulses JF - Journal of Laser Micro/Nanoengineering N2 - Laser turning with ultra-short laser pulses provides the possibility of manufacturing rotationally symmetric geometries, even of hard to machine materials as fused silica, down to a micrometer scale. In this laser micro machining approach, the laser beam is oriented perpendicularly to the rotational axis and tangentially to the material, whereas the target geometry is realized by moving the constantly rotating specimen according to the specified geometry under the focused laser spot. Due to the fric-tion-less laser ablation it is possible to realize a turning process in fused silica without the use of a contacting tool and therefore without causing mechanical tensions in the work piece. The processing head focuses the laser to a calculated spot size of 18 μm in diameter and the applied processing gas pressure assists in removing the ablated material. In this study, femto-second laser turning of fused silica with a diameter of 3.7 mm is investigated. The influence of the applied pulse energy is stated and the use of a trepanning optic during the turning process is characterized. Furthermore, compre-hensive parameter studies in order to optimize roughness and to find the maximum achievable abla-tion rate are shown. Limited by the mechanical speed of the rotational axis, the highest feasible abla-tion rate is 19.5 mm³/min. A roughness of Ra 0.65 μm are demonstrated. KW - Ultra-short Laser Pulses KW - Laser Turning KW - Fused Silica KW - Ablation Rate KW - Process Efficiency KW - Laserbearbeitung KW - Mikrobearbeitung KW - Quarzglas KW - Ultrakurzer Lichtimpuls Y1 - 2021 U6 - https://doi.org/10.2961/jlmn.2021.01.2008 VL - 16 IS - 1 SP - 42 EP - 46 ER - TY - JOUR A1 - Schleier, Max A1 - Adelmann, Benedikt A1 - Esen, Cemal A1 - Glatzel, Uwe A1 - Hellmann, Ralf T1 - Development and evaluation of an image processing algorithm for monitoring fiber laser fusion cutting by a high-speed camera JF - Journal of Laser Applications KW - Laser cutting KW - Image processing KW - Optical imaging KW - Image sensors KW - Laser applications KW - Faserlaser KW - Laserschneiden KW - Bildverarbeitung Y1 - 2021 UR - https://doi.org/10.2351/7.0000391 U6 - https://doi.org/10.2351/7.0000391 VL - 2021 IS - 33 SP - 032004 EP - 032004 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UKP-Prozess mit anschließendem CO2-Laserpolieren zur Fertigung komplexer Optiken T2 - 10. Workshop Laserbearbeitung von Glaswerkstoffen KW - Linse KW - Array KW - Laserbearbeitung KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser Y1 - 2020 ER - TY - JOUR A1 - Schwarz, Simon A1 - Götzendorfer, Babette A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Compact Beam Homogenizer Module with Laser-Fabricated Lens-Arrays JF - applied sciences KW - Femtosekundenlaser KW - Linse KW - Array Y1 - 2021 VL - 2021 IS - 11 SP - 1018 EP - 1018 ER - TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Enhanced ablation efficiency using GHz bursts in micromachining fused silica JF - Optics Letters KW - Fräsen KW - Mikrobearbeitung KW - Quarzglas KW - Femtosekundenlaser Y1 - 2021 VL - 46 IS - 2 SP - 282 EP - 285 ER - TY - JOUR A1 - Zettl, Julian A1 - Klar, Maximilian A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Laser turning with ultrashort laser pulses JF - Journal of Manufacturing Processes N2 - We report on a comprehensive micromachining study of rotationally symmetric parts using femtosecond laser. A laser turning process with tangential impingement of the laser radiation complemented by a trepanning optics is implemented as to accomplish a true laser lathe micromachining approach. With the objective of optimized ablation rate and reduced surface roughness, the influence of pulse energy, feed rate, trepanning diameter and angular beam incidence, respectively, is investigated for processing stellite rods. We find the smallest feasible feature sizes of 8.5 μm in diameter and smoothest surfaces with an arithmetic average of the roughness profile as low as 0.18 μm. The surface roughness, however, appears to be limited by the occurrence of laser induced periodic surface structures provoked by the femtosecond laser radiation. Furthermore, the variation of the fluence in accordance to the incidence on a curved surface is discussed and the heat input into the material is examined through a longitudinal cross section. KW - Ultrashort laser pulses KW - Turning KW - Ablation rate KW - Tangential processing KW - Trepanning optic KW - Ultrakurzer Lichtimpuls KW - Laserbearbeitung KW - Mikrobearbeitung KW - Femtosekundenlaser Y1 - 2021 U6 - https://doi.org/10.1016/j.jmapro.2021.06.025 VL - 2021 IS - 68 SP - 1562 EP - 1568 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - A New Approach to Seal Polymer Microfluidic Devices Using Ultrashort Laser Pulses JF - Journal of Laser Micro/Nanoengineering N2 - We report on the joining of two different transparent thermoplastic polymers using infrared femtosecond laser pulses. Solely being based on nonlinear absorption, the developed micro-welding process for cyclo-olefin copolymers and polycarbonate does not require any intermediate absorbing layers or any surface pre-processing of the welding partners. In addition, it circumvents any heat damages at the outer surfaces of the welding partners. Femtosecond laser welding of cyclo-olefin copolymers is improved by increasing the numerical aperture of the focusing setup resulting in a wider and more homogenous welding cross-section. Welding results are classified by shear strength and fracture modes are analyzed using scanning electron microscopy. Furthermore, we demonstrate, to the best of our knowledge, first results of ultrashort pulse laser welding of transparent polycarbonate, one of the most used transparent polymers. In view of an optimized and stable micro-welding process, we study the influence of laser power and focal position on welding results. The application of ultrashort pulse laser welding for Lab-on-chip fabrication technologies is demonstrated by sealing an ultrashort pulse laser ablated microfluidic device based on a transparent polymer substrate. KW - Femtosekundenlaser KW - Laserschweißen Y1 - 2019 VL - 14 IS - 1 SP - 49 EP - 53 ER - TY - CHAP A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - All laser-based fabrication of optical elements T2 - Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX KW - Ultrakurzzeitlaser KW - Kohlendioxidlaser KW - Femtosekundenlaser Y1 - 2020 ER - TY - JOUR A1 - Zettl, Julian A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Fundamental Considerations and Analysis of the Energy Distribution in Laser Turning with Ultrashort Laser Pulses JF - mdpi Micromachines N2 - This article discusses the process of the laser turning of rotational symmetric, cylindrical components using ultrashort laser pulses with respect to the geometrical conditions and the resulting energy distribution during the laser turning process. As a result, process predictions and potential process optimizations are feasible. Particular attention is drawn to the laser spot formation on the cylindrical surface of the work piece in conjunction with the positioning of the laser beam relative to the rotation axis of the specimen. Based on fundamental calculations and experimental results, an optimum processing strategy is discussed, whereat the use of a trepanning optic in the laser turning process and the forming of a particular surface structure is additionally being issued. KW - ultrashort pulse laser KW - laser turning KW - tangential processing KW - trepanning optic KW - Ultrakurzzeitlaser Y1 - 2023 UR - https://www.mdpi.com/2072-666X/14/10/1838 U6 - https://doi.org/10.3390/mi14101838 VL - 14 IS - 10 SP - 1 EP - 15 ER - TY - JOUR A1 - Sommer, David A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Static and Dynamic Mechanical Behaviour of Hybrid-PBF-LB/M-Built and Hot Isostatic Pressed Lattice Structures JF - Mechanical Properties of Polymeric, Metallic, and Composite Materials N2 - We report on a comprehensive study of the mechanical properties of maraging steel body-centred cubic lattice structures fabricated by a hybrid additive manufacturing technology that combines laser powder bed fusion with in situ high-speed milling. As the mechanical properties of additive manufactured components are inferior to, e.g., cast components, surface modifications can improve the mechanical behaviour. Different hybrid additive manufacturing technologies have been designed using additive and subtractive processes, improving process quality. Following this, mechanical testing is performed with respect to static tensile properties and dynamic stress, hardness, and porosity, comparing specimens manufactured by laser powder bed fusion only to those manufactured by the hybrid approach. In addition, the influence of different heat-treatment techniques on the mechanical behaviour of the lattice structures is investigated, namely solution and aging treatment as well as hot isostatic pressing. Thus, the influence of the superior surface quality due to the hybrid approach is evaluated, leading to, e.g., an offset of about 14–16% for the static testing of HIP lattice structures. Furthermore, the dynamic load behaviour can be improved with a finished surface, heading to a shift of the different zones of fatigue behaviour in the testing of hybrid-built specimens. KW - Hybrid additive manufacturing KW - Lattice structures KW - Hot isostatic pressing KW - Fatigue behaviour KW - Isostatisches Heißpressen KW - Selektives Laserschmelzen Y1 - 2023 UR - https://www.mdpi.com/1996-1944/16/9/3556 U6 - https://doi.org/https://doi.org/10.3390/ma16093556 VL - 16 IS - 9 SP - 1 EP - 14 ER - TY - CHAP A1 - Marx, Jan A1 - Esen, Cemal A1 - Lutz, Christian A1 - Hellmann, Ralf A1 - Ostendorf, Andreas T1 - Holographic tuning of physical axicons N2 - Axicon generated Bessel beams are a popular tool for high aspect ratio precision laser drilling. Spot diameter and working distance are given by the geometric parameters of the axicon and the wavelength used. Thus, it is difficult to manipulate the beam shape of a Bessel beam for a given setup. Spatial light modulators (SLMs) overcome limitations in flexibility. However, due to the limited phase shift of SLMs, only Bessel beams with flat cone angles and large focal length can be generated. In this contribution, an approach for generating Bessel beams with a shorter, but tunable focal length is presented. A physical axicon was combined with an SLM. A holographic image of a negative axicon is put on the SLM to generate a ring beam, which is focused by a subsequent physical axicon to get a small focal diameter. Thus, different sized high aspect ratio micro holes can be drilled without using any moving components. KW - Bessel beam KW - Micro drilling KW - Axicon KW - Spatial light modulator KW - Beam shaping KW - Bessel-Bündel KW - Axicon KW - Strahlformung, Laser Y1 - 2023 VL - 2023 IS - 154 SP - 1 EP - 9 PB - LiM 2023 Proceedings ER - TY - JOUR A1 - Lutz, Christian A1 - Helm, Jonas A1 - Tschirpke, Katrin A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Drilling Sequence Optimization Using Evolutionary Algorithms to Reduce Heat Accumulation for Femtosecond Laser Drilling with Multi-Spot Beam Profiles JF - MDPI Materials N2 - We report on laser drilling borehole arrays using ultrashort pulsed lasers with a particular focus on reducing the inadvertent heat accumulation across the workpiece by optimizing the drilling sequence. For the optimization, evolutionary algorithms are used and their results are verified by thermal simulation using Comsol and experimentally evaluated using a thermal imaging camera. To enhance process efficiency in terms of boreholes drilled per second, multi-spot approaches are employed using a spatial light modulator. However, as higher temperatures occur across the workpiece when using simultaneous multi-spot drilling as compared to a single-spot process, a subtle spatial distribution and sequence of the multi-spot approach has to be selected in order to limit the resulting local heat input over the processing time. Different optimization approaches based on evolutionary algorithms aid to select those drilling sequences which allow for the combination of a high efficiency of multi-spot profiles, a low-generated process temperature and a high-component quality. In particular, using a 4 x 4 laser spot array allows for the drilling of 40,000 boreholes in less than 76 s (526 boreholes/s) with a reduced temperature increase by about 35%, as compared to a single spot process when employing an optimized drilling sequence. KW - USP laser processing KW - Laser drilling KW - Optimization of heat accumulation KW - Evolutionary Algorithms KW - Thermal simualtions KW - Laserbohren KW - Ultrakurzzeitlaser Y1 - 2023 UR - https://www.mdpi.com/1996-1944/16/17/5775 U6 - https://doi.org/10.3390/ma16175775 VL - 2023 IS - 16/5775 SP - 1 EP - 12 ER - TY - JOUR A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Multi-Bessel Beams Generated by an Axicon and a Spatial Light Modulator for Drilling Applications JF - MDPI Photonics N2 - We report on an optical setup to generate multi-Bessel beam profiles combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams offer advantageous properties for micro drilling processes and internal volume processing, especially for transparent materials. In addition, the laser power of industrial, ultrashort pulsed lasers has increased significantly over the last few years, offering the possibility for highly efficient processes using multi-spot profiles. Our optical concept combines the dynamic possibilities of beam splitting using a spatial light modulator with the benefits of Bessel beams, which facilitates multi-Bessel beam processing. Beside the simulation and experimental evaluation of the generated multi-Bessel beams, we exemplify the applicability of the developed module for the perforation of thin metal foils by micro drilling. KW - Bessel beam KW - Axicon KW - Optical System KW - Ultrashort pulsed laser KW - Material ablation KW - Bessel-Bündel KW - Ultrakurzzeitlaser Y1 - 2023 UR - https://www.mdpi.com/2304-6732/10/4/413 U6 - https://doi.org/10.3390/photonics10040413 VL - 2023 IS - 10/413 SP - 1 EP - 9 ER -