TY - JOUR A1 - Bischoff, Christian A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Efficient micromachining of thin film layers with nanosecond lasers – beam shaping optics improve process quality and enhance throughput JF - Laser Technik Journal KW - Laser KW - Nanosekundenbereich KW - Dünne Schicht Y1 - 2012 VL - 9 IS - 5 SP - 15 EP - 20 ER -