TY - CHAP A1 - Adelmann, Benedikt A1 - Neumeier, Benedikt A1 - Schleier, Max A1 - Wilmann, Eugen A1 - Hellmann, Ralf T1 - Optical cutting tear detection system for industrial fiber laser based cutting machines T2 - Lasers in Manufacturing Conference 2015 KW - Laserschneiden KW - Faserlaser Y1 - 2015 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Schleier, Max A1 - Neumeier, Benedikt A1 - Wilmann, Eugen A1 - Hellmann, Ralf T1 - Optical cutting interruption sensor for fiber lasers JF - Applied Sciences KW - Laserschneiden KW - Faserlaser Y1 - 2015 VL - 2015 IS - 5/3 SP - 544 EP - 554 ER - TY - JOUR A1 - Schleier, Max A1 - Adelmann, Benedikt A1 - Neumeier, Benedikt A1 - Hellmann, Ralf T1 - Burr formation detector for fiber laser cutting based on a photodiode sensor system JF - Optics & Laser Technology KW - Unique sensor; Detection of burr formation; Signal characteristics associated to melt bath dynamics; KW - Laserschneiden KW - Faserlaser Y1 - 2017 U6 - https://doi.org/10.1016/j.optlastec.2017.04.027 VL - 96 IS - - SP - 13 EP - 17 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Process optimization of laser fusion cutting of multilayer stacks of electrical sheets JF - International Journal of Advanced Manufacturing Technology KW - Laserschneiden Y1 - 2013 VL - 68 SP - 2693 EP - 2701 ER - TY - CHAP A1 - Hasenstab, Stefan A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Laser Cutting of Alumina and Aluminum Nitride with a 500 W Single Mode Fiber Laser T2 - XXVII. microCAD International Scientific Conference KW - Laserschneiden KW - Aluminiumoxide Y1 - 2013 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hürner, Andreas A1 - Schlegel, Tobias A1 - Bauer, Anton A1 - Frey, Lothar A1 - Hellmann, Ralf T1 - Laser Alloying Nickel on 4H-Silicon Carbide Substrate to Generate Ohmic Contacts JF - Journal of Laser Micro/Nanoengineering KW - Ohm-Kontakt KW - Nickellegierung Y1 - 2013 VL - 8 IS - 1 SP - 97 EP - 101 ER - TY - JOUR A1 - Hürner, Andreas A1 - Schlegel, Tobias A1 - Adelmann, Benedikt A1 - Mitlehner, Heinz A1 - Hellmann, Ralf A1 - Bauer, Anton A1 - Frey, Lothar T1 - Alloying of Ohmic Contacts to n-type 4H-SiC via Laser Irradiation JF - Materials Science Forum KW - Ohm-Kontakt KW - Legierung KW - Laser Y1 - 2013 VL - 740-742 SP - 773 EP - 776 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Investigation on Flexural Strength during Fiber Laser Cutting of Alumina JF - Physics Procedia KW - Faserlaser KW - Biegefestigkeit Y1 - 2013 VL - 41 SP - 405 EP - 407 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Fast Laser Cutting Optimization Algorithm JF - Physics Procedia 12-1, Elsevier Properties S.A KW - Laserschneiden KW - Optimierung Y1 - 2011 VL - 12 IS - Part A SP - 591 EP - 598 ER - TY - CHAP A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Different modulation schemes in fibre laser cutting T2 - Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies KW - Laserschneiden KW - Faserlaser Y1 - 2014 SP - 1 EP - 6 ER - TY - CHAP A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - DOE based optimization of fibre laser cutting of metals T2 - Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies KW - Laserschneiden KW - Faserlaser Y1 - 2014 SP - 7 EP - 12 ER - TY - JOUR A1 - Hock, Klaus A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Comparative study of remote fiber laser and water-jet guided laser cutting of thin film metal sheets JF - Physics procedia KW - laser KW - Laserschneiden Y1 - 2012 VL - 39 SP - 225 EP - 231 ER - TY - JOUR A1 - Schleier, Max A1 - Adelmann, Benedikt A1 - Esen, Cemal A1 - Glatzel, Uwe A1 - Hellmann, Ralf T1 - Development and evaluation of an image processing algorithm for monitoring fiber laser fusion cutting by a high-speed camera JF - Journal of Laser Applications KW - Laser cutting KW - Image processing KW - Optical imaging KW - Image sensors KW - Laser applications KW - Faserlaser KW - Laserschneiden KW - Bildverarbeitung Y1 - 2021 UR - https://doi.org/10.2351/7.0000391 U6 - https://doi.org/10.2351/7.0000391 VL - 2021 IS - 33 SP - 032004 EP - 032004 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Simultaneous Burr and Cut Interruption Detection during Laser Cutting with Neural Networks JF - Sensors KW - laser cutting KW - quality monitoring KW - artificial neural network KW - burr formation KW - cut interruption KW - Laserschneiden KW - Neuronales Netz Y1 - 2021 UR - https://doi.org/10.3390/s21175831 U6 - https://doi.org/10.3390/s21175831 VL - 2021 IS - 21 SP - 5831 EP - 5831 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Schleier, Max A1 - Hellmann, Ralf T1 - Laser Cut Interruption Detection from Small Images by Using Convolutional Neural Network JF - Sensors KW - laser cutting KW - remote sensing KW - convolutional neural network KW - cut interruption KW - image processing KW - Laserschneiden KW - Neuronales Netz Y1 - 2021 UR - https://doi.org/10.3390/s21020655 U6 - https://doi.org/10.3390/s21020655 VL - 2021 IS - 21(2) SP - 655 EP - 655 ER - TY - THES A1 - Adelmann, Benedikt T1 - Lasermaterialbearbeitung von Halbleitern und Keramiken für Anwendungen der Leistungselektronik KW - Laserbearbeitung KW - Leistungselektronik Y1 - 2019 SN - 978-3-8440-7111-5 PB - Shaker ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Cutting and Drilling of SiC Semiconductor by Fiber Laser JF - Journal of Laser Micro/Nanoengineering N2 - We present an experimental study on fiber laser micromachining of 4H-SiC semiconductor. In particular, we optimize the process time for percussion drilling of 440 µm and 330 µm thick wafers with a minimum drilling time of, eg, 7.5 ms being achieved for 330 µm thick wafers. The drilled holes are characterized by a low taper, a high circularity and entry diameters of about 60 µm. For laser cutting, effective cutting speeds of 2 mm/s and 0.63 mm/s are obtained for 330 µm and 440 µm wafer thickness, respectively, with the cut kerf width being 65 µm. Both processes are associated with a good quality that is characterized by no chipping and cracks. The capability of the fiber laser based micromachining process is highlighted by cutting complex micrometer scale inner and outer contours into partially metallized SiC wafers with high quality. KW - Laserschneiden KW - Faserlaser Y1 - 2015 VL - 10 IS - 3 SP - 279 EP - 283 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Temperature and stress simulation of 4H-SiC during laser-induced silicidation for ohmic contact generation JF - Metals KW - Ohm-Kontakt KW - Laserbestrahlung Y1 - 2017 VL - 2017 IS - 7 SP - 545 EP - 553 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - A study of SiC decomposition under laser irradiation JF - Applied Physics A KW - Laserbestrahlung KW - Faserlaser Y1 - 2017 VL - 2017 IS - 123 SP - 454 EP - 452 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Numerical and experimental study on flexural strength of laser microstructured alumina JF - Advances in Ceramic Science and Engineering KW - Faserlaser KW - Aluminiumoxide Y1 - 2016 VL - 2016 IS - 5 SP - 28 EP - 34 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - SiC absorption of near-infrared laser radiation at high temperatures JF - Applied Physics A KW - Laserbestrahlung KW - NIR Y1 - 2016 VL - 2016 IS - 122 SP - 1 EP - 7 ER - TY - JOUR A1 - Adelmann, Benedikt T1 - Fiber laser cutting of aumina substrates for electronic applications - comparison of the experimentally determined and simulated influence on the mechanical strength JF - Journal of Electrical Engineering KW - Laserschneiden KW - Faserlaser KW - Aluminiumoxide Y1 - 2015 VL - 2015 IS - 3 SP - 111 EP - 119 ER - TY - CHAP A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Comparative study of experimentally determined and simulated mechanical strength of fiber laser cut alumina substrates T2 - Proceedings of the 7th International Congress on Laser Advanced Materials Processing KW - Laserschneiden KW - Faserlaser KW - Aluminiumoxide Y1 - 2015 VL - 2015 IS - 15 SP - 1 EP - 9 ER - TY - CHAP A1 - Adelmann, Benedikt T1 - Substrate thinning of SiC semiconductor components using fiber laser T2 - Proceedings of the 7th International Congress on Laser Advanced Materials Processing KW - Faserlaser KW - Halbleiterbauelement Y1 - 2015 IS - 15 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Roth, Gian-Luca A1 - Hellmann, Ralf T1 - Back side ablation of SiC diodes using a q-switched NIR laser JF - Journal of Laser Micro/Nanoengineering KW - Halbleiterdiode KW - NIR Y1 - 2015 VL - 10 SP - 190 EP - 194 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Rapid micro hole laser drilling in ceramic substrates using single mode fiber laser JF - Journal of Materials Processing Technology KW - Laserbohren KW - Faserlaser Y1 - 2015 VL - 2015 IS - 221 SP - 80 EP - 86 ER - TY - JOUR A1 - Preusch, Florian A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Micromachining of AlN and Al2O3 using fiber laser JF - Micromachines KW - Faserlaser KW - NIR KW - Mikrobearbeitung Y1 - 2014 VL - 2014 IS - 5 SP - 1051 EP - 1060 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Hellmann, Ralf T1 - Investigation on flexural strength changes of alumina caused by cutting using fiber laser JF - Journal of Laser Micro/Nanoengineering KW - Laserschneiden KW - Faserlaser Y1 - 2014 VL - 9 SP - 153 EP - 160 ER - TY - JOUR A1 - Adelmann, Benedikt A1 - Ngo, Chan A1 - Hellmann, Ralf T1 - High aspect ratio cutting of metals using water jet guided laser JF - The International Journal of Advanced Manufacturing Technology KW - Laserschneiden KW - Wasserstrahlschneiden Y1 - 2015 VL - 2015 IS - 80 SP - 2053 EP - 2060 ER - TY - JOUR A1 - Schleier, Max A1 - Adelmann, Benedikt A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Cross-correlation-based algorithm for monitoring laser cutting with high-power fiber lasers JF - IEEE Sensors Journal KW - Detection algorithm, laser cutting, online monitoring KW - Laserschneiden KW - Hochleistungslaser KW - Faserlaser Y1 - 2017 U6 - https://doi.org/10.1109/JSEN.2017.2783761 VL - 18 IS - 4 SP - 1585 EP - 1590 ER - TY - JOUR A1 - Schleier, Max A1 - Adelmann, Benedikt A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Image Processing Algorithm for In Situ Monitoring Fiber Laser Remote Cutting by a High-Speed Camera JF - Sensors N2 - We present an in situ process monitoring approach for remote fiber laser cutting, which is based on evaluating images from a high-speed camera. A specifically designed image processing algorithm allows the distinction between complete and incomplete cuts by analyzing spectral and geometric information of the melt pool from the captured images of the high-speed camera. The camera-based monitoring system itself is fit to a conventional laser deflection unit for use with high-power fiber lasers, with the optical detection path being coaxially aligned to the incident laser. Without external illumination, the radiation of the melt from the process zone is recorded in the visible spectral range from the top view and spatially and temporally resolved. The melt pool size and emitted sparks are evaluated in dependence of machining parameters such as feed rate, cycles, and focus position during cutting electrical sheets. KW - Laserschneiden KW - Faserlaser Y1 - 2022 U6 - https://doi.org/10.3390/s22082863 SN - 1424-8220 VL - 22 IS - 8 PB - MDPI AG ER -