TY - JOUR A1 - Sommer, David A1 - Götzendorfer, Babette A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Design Rules for Hybrid Additive Manufacturing Combining Selective Laser Melting and Micromilling JF - Design and Post Processing for Metal Additive Manufacturing N2 - We report on a comprehensive study to evaluate fundamental properties of a hybrid manufacturing approach, combining selective laser melting and high speed milling, and to characterize typical geometrical features and conclude on a catalogue of design rules. As for any additive manufacturing approach, the understanding of the machine properties and the process behaviour as well as such a selection guide is of upmost importance to foster the implementation of new machining concepts and support design engineers. Geometrical accuracy between digitally designed and physically realized parts made of maraging steel and dimensional limits are analyzed by stripe line projection. In particular, we identify design rules for numerous basic geometric elements like walls, cylinders, angles, inclinations, overhangs, notches, inner and outer radii of spheres, chamfers in build direction, and holes of different shape, respectively, as being manufactured by the hybrid approach and compare them to sole selective laser melting. While the cutting tool defines the manufacturability of, e.g., edges and corners, the milling itself improves the surface roughness to Ra < 2 µm. Thus, the given advantages of this hybrid process, e.g., space-resolved and custom-designed roughness and the superior geometrical accuracy are evaluated. Finally, we exemplify the potential of this particular promising hybrid approach by demonstrating an injection mold with a conformal cooling for a charge socket for an electro mobile KW - hybrid additive manufacturing; high-speed milling; selective laser melting; construction rules KW - Selektives Laserschmelzen KW - Hochgeschwindigkeitsfräsen Y1 - 2021 UR - https://www.mdpi.com/1996-1944/14/19/5753 U6 - https://doi.org/https://doi.org/10.3390/ma14195753 VL - 14 IS - 19 SP - 1 EP - 23 ER - TY - JOUR A1 - Sommer, David A1 - Pape, Dominik A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Tool Wear and Milling Characteristics for Hybrid Additive Manufacturing Combining Laser Powder Bed Fusion and In Situ High-Speed Milling JF - Ultra-Precision Manufacturing Technology for Difficult-to-Machine Materials N2 - We report on milling and tool wear characteristics of hybrid additive manufacturing comprising laser powder bed fusion and in situ high-speed milling, a particular process in which the cutter mills inside the powder bed without any cooling lubricant being applicable. Flank wear is found to be the dominant wear characteristic with its temporal evolution over utilization period revealing the typical s-shaped dependence. The flank wear land width is measured by microscopy and correlated to the achievable surface roughness of milled 3D-printed parts, showing that for flank wear levels up to 100 μm a superior surface roughness below 3 μm is accessible for hybrid additive manufacturing. Further, based on this correlation recommended tool, life scenarios can be deduced. In addition, by optimizing the finishing tool start position and the number of afore-built layers, the milling process is improved with respect to the maximum millable angle for undercut surfaces of 3D-printed parts to 30° for the roughing process and to 40° for the entire machining process including finishing KW - hybrid additive manufacturing; high-speed milling; laser powder bed fusion; tool wear KW - Hochgeschwindigkeitsfräsen KW - Werkzeugverschleiß Y1 - 2022 UR - https://www.mdpi.com/1996-1944/15/3/1236 U6 - https://doi.org/https://doi.org/10.3390/ma15031236 VL - 15 IS - 3 SP - 1 EP - 13 ER - TY - JOUR A1 - Kefer, Stefan A1 - Zettl, Julian A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces JF - Materials N2 - Sapphire is a robust and wear-resistant material. However, efficient and high-quality micromachining is still a challenge. This contribution demonstrates and discusses two novels, previously unreported approaches for femtosecond laser-based micromachining of rotational-symmetric sapphire workpieces, whereas both methods are in principal hybrids of laser scanning and laser turning or laser lathe. The first process, a combination of a sequential linear hatch pattern in parallel to the workpiece’s main axis with a defined incremental workpiece rotation, enables the fabrication of sapphire fibers with diameters of 50 µm over a length of 4.5 mm. Furthermore, sapphire specimens with a diameter of 25 µm over a length of 2 mm can be fabricated whereas an arithmetical mean height, i.e., Sa parameter, of 281 nm is achieved. The second process combines a constant workpiece feed and orthogonal scanning with incremental workpiece rotation. With this approach, workpiece length limitations of the first process are overcome and sapphire fibers with an average diameter of 90 µm over a length of 20 cm are manufactured. Again, the sapphire specimen exhibits a comparable surface roughness with an average Sa value of 249 nm over 20 cm. Based on the obtained results, the proposed manufacturing method paves an innovative and flexible, all laser-based way towards the fabrication or microstructuring of sapphire optical devices, and thus, a promising alternative to chemical processes. KW - sapphire KW - femtosecond laser KW - micromachining KW - laser turning KW - ablation threshold KW - Femtosekundenlaser KW - Saphir Y1 - 2022 UR - https://www.mdpi.com/1996-1944/15/18/6233 U6 - https://doi.org/10.3390/ ma15186233 VL - 15 IS - 18 SP - 6233 EP - 6233 ER - TY - CHAP A1 - Kefer, Stefan A1 - Pape, Natalie A1 - Schmauss, Bernhard A1 - Hellmann, Ralf T1 - Fabrication of Lattice-Like Waveguides in Planar Cyclic Olefin Copolymers T2 - 28th International Conference on Optical Fiber Sensors N2 - This work demonstrates the femtosecond laser-based fabrication of lattice-like waveguides in planar cyclic olefin copolymers. An overview of the fabrication process is provided and waveguiding in the C-band is proven via optical near-field analysis. KW - Wellenleiter KW - Femtosekundenlaser Y1 - 2023 SN - 978-1-957171-30-2 U6 - https://doi.org/10.1364/OFS.2023.Th6.69 ER - TY - CHAP A1 - Kefer, Stefan A1 - Schmauss, Bernhard A1 - Hellmann, Ralf T1 - Sapphire-Based Planar Bragg Grating Devices T2 - 28th International Conference on Optical Fiber Sensors N2 - This study reports on the long-term stability and the high-temperature capability of sapphire-based photonic crystal waveguides with integrated Bragg gratings. Furthermore, their Bragg grating reflectivity as well as their temperature sensitivity is quantified. KW - Bragg-Reflektor KW - Wellenleiter Y1 - 2023 SN - 978-1-957171-30-2 U6 - https://doi.org/10.1364/OFS.2023.W2.4 ER - TY - JOUR A1 - Kefer, Stefan A1 - Limbach, Tobias A1 - Pape, Natalie A1 - Klamt, Kathrin A1 - Schmauss, Bernhard A1 - Hellmann, Ralf T1 - Birefringence in Injection-Molded Cyclic Olefin Copolymer Substrates and Its Impact on Integrated Photonic Structures JF - Polymers N2 - This contribution quantifies the birefringence within injection-molded cyclic olefin copolymer plates and discusses its impact on the mechanical properties of the plates. It also focuses on the impact of birefringence on integrated waveguides and Bragg gratings and provides fabrication guidelines for such structures. The anisotropy in all three dimensions of the workpiece is examined by means of polarimetry and a prism coupler. It is found that the birefringence is inhomogenously distributed within the workpieces, whereas the maximum birefringence not only varies locally, but also depends on the observation direction. Overall, a maximum birefringence of 10 × 10−4 is found at the plate’s surface near the injection gate. The anisotropy then reduces exponentially towards the center of the workpiece and saturates at 1.8 × 10−4, in a depth of 0.4 mm. Thus, the birefringence strongly affects near-surface photonic structures. It is found that, depending on their orientation and the local birefringence of the substrate, waveguides and Bragg gratings fabricated with comparable parameters behave completely differently in terms of polarization-dependent optical attenuation, cross-sectional intensity distribution and Bragg reflection signal. For example, the support of the TM mode can vary between total loss and an optical attenuation of 0.9 dB × cm−1. In consequence, this study underlines the importance of quantifying the birefringent state of an injection-molded cyclic olefin copolymer workpiece if it is supposed to serve as a substrate for integrated photonic structures. The study furthermore demonstrates that birefringence effects can be omitted by burying the photonic structures deeper into the volume of the thermoplastic. KW - cyclic olefin copolymer KW - birefringence KW - integrated photonics KW - Bragg grating KW - injection molding KW - Bragg-Reflektor KW - Wellenleiter KW - Doppelbrechung Y1 - 2024 UR - https://www.mdpi.com/2073-4360/16/2/168 U6 - https://doi.org/10.3390/polym16020168 VL - 16 IS - 2 SP - 168 EP - 168 ER - TY - JOUR A1 - Voigt, Jorrit A1 - Bock, Thomas A1 - Hilpert, Uwe A1 - Hellmann, Ralf A1 - Moeckel, Michael T1 - Increased relative density and characteristic melt pool Signals at the edge in PBF-LB/M JF - Additive Manufacturing N2 - Limited process control can cause metallurgical defect formation and inhomogeneous relative density in laser powder bed fusion manufactured parts. This study shows that process monitoring, based on optical melt-pool signal analysis is capable of tracing relative density variations: Unsupervised machine learning, applied to cluster multiple-slice monitoring data, reveals characteristic patterns in this noisy time-series signal, which can be co-registered with geometrical positions in the build part. For cylindrical 15–5 PH stainless steel specimens, manufactured under constant process parameters and post-analyzed by µ-computer tomography, correlations between such patterns and an increased local relative density at the edge have been observed. Finite element method (FEM) modeling of thermal histories at exemplary positions close to the edge suggest pre-heating effects caused by neighboring laser scan trajectories as possible reasons for the increased melt pool intensity at the edge. KW - Maschinelles Lernen KW - Schmelze Y1 - 2022 UR - https://www.sciencedirect.com/science/article/pii/S2214860422001993?via%3Dihub U6 - https://doi.org/https://doi.org/10.1016/j.addma.2022.102798 VL - 2022 IS - 57/102798 SP - * EP - * ER - TY - JOUR A1 - Bischoff, Kay A1 - Mücke, Dominik A1 - Roth, Gian-Luca A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV-Femtosecond-Laser Structuring of Cyclic Olefin Copolymer JF - Polymers N2 - We report on the laser ablation of cyclic olefin copolymer using an amplified ultrashort pulsed laser in the ultraviolet spectral range. In addition to a high ablation depth per laser-structured layer up to 74 μm at a fluence of 22 J cm−2, an excellent mean roughness 𝑅𝑎 of laser-patterned surfaces down to 0.5 μm is demonstrated. Furthermore, with increasing fluence, increasing ablation efficiencies up to 2.5 mm3 W−1 min−1 are determined. Regarding the quality of the ablation, we observed steep ablation flanks and low debris formation, though for fluences above 10.5 J cm−2 the formation of troughs was observed, being attributed to multiple reflections on the ablation flanks. For comparison, laser ablation was performed under identical conditions with an infrared laser wavelength. The results highlight that UV ablation exhibits significant advantages in terms of ablation efficiency, surface roughness and quality. Moreover, our results show that a larger UV focus spot accelerates the ablation process with comparable quality, paving the way for high-power UV ultrashort pulsed lasers towards an efficient and qualitative tool for the laser machining of cyclic olefin copolymer. The production of complex microfluidics further underlines the suitability of this type of laser. KW - Femtosekundenlaser Y1 - 2022 U6 - https://doi.org/https://doi.org/10.3390/polym14142962 VL - 14 IS - 14 SP - 2962 EP - 2962 ER - TY - JOUR A1 - Preusch, Florian A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Influence of Polishing Orientation on the Generation of LIPSS on Stainless Steel JF - Journal of Laser Micro/Nanoengineering KW - Laserbearbeitung KW - Nicht rostender Stahl Y1 - 2016 U6 - https://doi.org/10.2961/jlmn.2016.01.0025 VL - 11 SP - 137 EP - 142 ER - TY - JOUR A1 - Bischoff, Kay A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Preparation of Dispersed Copper(II) Oxide Nanosuspensions as Precursor for Femtosecond Reductive Laser Sintering by High-Energy Ball Milling JF - Nanomaterials N2 - This contribution demonstrates and discusses the preparation of finely dispersed copper(II) oxide nanosuspensions as precursors for reductive laser sintering (RLS). Since the presence of agglomerates interferes with the various RLS sub-processes, fine dispersion is required, and oversized particles must be identified by a measurement methodology. Aside from the established method of scanning electron microscopy for imaging individual dried particles, this work applies the holistic and statistically more significant laser diffraction in combination with dynamic image analysis in wet dispersion. In addition to direct ultrasonic homogenization, high-energy ball milling is introduced for RLS, to produce stable nanosuspensions with a high fine fraction, and, above all, the absence of oversize particles. Whereas ultrasonic dispersion stagnates at particle sizes between 500 nm and 20 μm, even after 8 h, milled suspension contains a high proportion of finest particles with diameters below 100 nm, no agglomerates larger than 1 μm and a trimodal particle size distribution with the median at 50 nm already, after 100 min of milling. The precursor layers produced by doctor blade coating are examined for their quality by laser scanning microscopy. The surface roughness of such a dry film can be reduced from 1.26 μm to 88 nm by milling. Finally, the novel precursor is used for femtosecond RLS, to produce homogeneous, high-quality copper layers with a sheet resistance of 0.28 Ω/sq and a copper mass concentration of 94.2%. KW - Laserstrahlsintern KW - Femtosekundenlaser Y1 - 2023 U6 - https://doi.org/https://doi.org/10.3390/nano13192693 VL - 13 IS - 19 SP - 2693 EP - 2693 ER - TY - JOUR A1 - Franz, Daniel A1 - Yang, Yongting A1 - Michel, Luis A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Evaluation of an ultrashort pulsed laser robot system for flexible and large-area micromachining JF - Journal of Laser Applications N2 - We report for the first time on the realization, characterization and application of an ultrashort pulsed laser robot system for flexible and large-area 2D and 3D laser micromachining with 6 articulated axes. To characterize the dynamic positioning of the laser beam during and after axes movement, CMOS image sensors were integrated into the beam path. A method introduced for the alignment of the optical axes allows a reduction of the deviations in laser beam positioning to less than 141.8 ± 92.9 μm within a 110° rotation range of axis 4. In addition, a high laser beam positioning repeatability of less than 102.2 μm is demonstrated over a total period of 14 h for a movement of axis 5 within a range of 0° to 90°. Initial laser cutting, laser structuring and laser marking applications on automotive dashboards and glass substrates are presented for flexible and large area 2D and 3D manufacturing. By applying a special laser cutting strategy for processing AF 32 eco thin glass, high cutting quality is achieved with a taper of up to 96.3% without the generation of cracks, demonstrating the innovative potential of the high-precision laser robot system. Nonetheless, different identified inherent influences of each axis 1–5 during robot axis movement demand for an innovative beam stabilization concept to achieve high precision in laser beam positioning. KW - Ultrakurzzeitlaser KW - Industrieroboter Y1 - 2023 N1 - Proceedings of the International Congress of Applications of Lasers & Electro-Optics (ICALEO 2023) VL - 35 IS - 4 SP - 042057 EP - 042065 ER - TY - CHAP A1 - Franz, Daniel A1 - Mücke, Dominik A1 - Kunz, Tim A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 % on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 % reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing. KW - Pikosekundenbereich KW - Laserbohren Y1 - 2023 ER - TY - JOUR A1 - Bischoff, Kay A1 - Kefer, Stefan A1 - Wienke, Alexander A1 - Overmeyer, Ludger A1 - Kaierle, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Integration of Bragg gratings in aerosol-jetted polymer optical waveguides for strain monitoring capabilities JF - Optics Letters N2 - We demonstrate and discuss the integration of Bragg gratings in aerosol-jetted polymer optical waveguides, produced in the optical assembly and connection technology for component-integrated bus systems (OPTAVER) process. By using a femtosecond laser and adaptive beam shaping, an elliptical focal voxel generates different types of single pulse modification by nonlinear absorption in the waveguide material, which are arranged periodically to form Bragg gratings. Integration of a single grating structure or, alternatively, an array of Bragg grating structures in the multimode waveguide yields a pronounced reflection signal with typical multimodal properties, i.e., a number of reflection peaks with non-Gaussian shapes. However, the main wavelength of reflection, located around 1555 nm, is evaluable by means of an appropriate smoothing algorithm. When loaded by mechanical bending, a pronounced Bragg wavelength shift of this reflected peak up to 160 pm is detected. This demonstrates that the additively manufactured waveguides can be used not only for signal transmission but also as a sensor. KW - Bragg-Reflektor KW - Lichtwellenleiter Y1 - 2023 U6 - https://doi.org/https://doi.org/10.1364/OL.481801 VL - 48 IS - 7 SP - 1778 EP - 1781 ER - TY - CHAP A1 - Bischoff, Kay A1 - Mücke, Dominik A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - UV-Femtosecond-Laser Structuring of Silicon Carbide T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on ultraviolet ultrashort pulsed laser processing of silicon carbide. Laser ablated cavities are evaluated with respect to their ablation rates, surface roughness and overall quality by varying the laser pulse fluence. Using this type of laser, high edge quality and surface roughness down to 107 nm can be achieved with an ablation efficiency of up to 0.228 mm 3 W −1 min −1. Functional surfaces are produced by generating laser induced periodic surface structures. The comparison with infrared wavelength underlines the advantages of the ultraviolet wavelength for laser micro machining this material. Significant differences with respect to the measured ablation depths and roughness as well as generated micro-and nanostructures appear. While infrared ablation is dominated by a chipping mechanism above a critical fluence of 9.93 Jcm −2 , higher ablation rates are observed with strong quality losses at the same time. In comparison to the infrared emission wavelength, in general , a significantly higher processing quality is achieved with the ultraviolet emission wavelength. In addition, the influence of spot size and repetition rate in UV processing is investigated. By increasing these parameters, a process acceleration without quality losses is enabled. The generation of a sophisticated microstructure exemplifies the advantages of processing silicon carbide with the UV laser reported here. KW - Femtosekundenlaser KW - Siliciumcarbid Y1 - 2023 ER - TY - CHAP A1 - Bischoff, Kay A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Acceleration of Femtosecond Reductive Laser Sintering of Copper(II) Oxide for Conductive Copper Patterns on Cyclic Olefin Copolymers T2 - International Congress on Applications of Lasers & Electro-Optics (ICALEO) 2023 N2 - We report on the acceleration of femtosecond reductive laser sintering of copper (II) oxide on the surface of transparent cyclic olefin copolymers (COC) by varying the focus size to generate metallic copper (Cu) layers. By using different focusing conditions, different process speeds are achieved, and the structural accuracies are controlled. The formation of Cu lines is observed for different focus sizes at various scan speeds, which is attributed to laser exposure duration and chemical reaction time. The formed lines are categorized and measured by optical microscopy and provide the basis for two-dimensional Cu surfaces. By hatching, high quality conductive films are produced with an increased focus diameter of up to 400 µm at a scan speed of 400 mm/s and a hatch distance of 250 µm resulting in a multiple increased process speed by a factor of thirteen compared to previous research. Using 4-tip measurement , a low sheet resistance of 0.165 Ω/sq was validated on these Cu films, which have an atomic Cu content of 89.5%. KW - Femtosekundenlaser Y1 - 2023 ER - TY - JOUR A1 - Rung, Stefan A1 - Häcker, Niklas A1 - Hellmann, Ralf T1 - Thermal imaging of high power ultrashort pulse laser ablation of alumina towards temperature optimized micro machining strategies JF - IOP Conference Series: Materials Science and Engineering KW - Ultrakurzzeitlaser KW - Aluminiumoxide Y1 - 2021 UR - https://iopscience.iop.org/article/10.1088/1757-899X/1135/1/012027 U6 - https://doi.org/0.1088/1757-899X/1135/1/012027 VL - 1135 IS - 012027 SP - 1 EP - 9 ER - TY - JOUR A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Laser-Induced Period Surface Structures to Improve Solderability of Electrical Solder Pads JF - Applied Sciences KW - Laserstrahllöten Y1 - 2021 UR - https://www.mdpi.com/2076-3417/12/1/80/htm U6 - https://doi.org/10.3390/app12010080 VL - 2022 IS - 12/1 SP - 80 EP - 88 ER - TY - JOUR A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Microchannels inside bulk PMMA generated by femtosecond laser using adaptive beam shaping JF - Optics Express N2 - In this contribution, we report on the generation of internal microchannels with basically unlimited channel length inside of PMMA bulk material by femtosecond laser. A precisely controllable and stable circular channel cross section is obtained by using a spatial light modulator to compensate the writing depth depending spherical aberration. Furthermore, the generation of a rotatable elliptical input beam by adaptive optics ensures a fitting of the beam shaping to the writing direction. In this study, we report on both, the effect of the ellipticity of the input beam and the effect of a correction of the spherical aberration on the circularity of the resulting internal microchannels. Moreover, we demonstrate the application of this writing technique by creating microfluidic testing structures inside of a transparent standard polymer. KW - Femtosekundenlaser KW - Polymethylmethacrylate Y1 - 2020 VL - 28 IS - 4 SP - 5801 EP - 5811 ER - TY - CHAP A1 - Kefer, Stefan A1 - Zettl, Julian A1 - Schmauss, Bernhard A1 - Esen, Cemal A1 - Hellmann, Ralf ED - Kling, Rainer ED - Pfleging, Wilhelm ED - Watanabe, Akira T1 - High-Precision Micromachining of Sapphire Towards Optical Waveguiding Structures using Femtosecond Lasers T2 - Laser-based Micro- and Nanoprocessing XVII N2 - While sapphire is one of the most durable materials, its properties entail that high-precision machining, especially in the sub-millimeter regime, is still challenging. This contribution demonstrates and discusses novel femtosecond laser-based micromachining approaches for the fabrication of rotational-symmetric sapphire workpieces, specifically the generation of optical fibers by means of laser lathe of sapphire rods and the practical realization of windmill fibers. In addition, volume refractive index modification in planar sapphire substrates is presented to induce photonic crystal waveguides. The micromachined structures are comprehensively examined with respect to geometric fidelity, surface roughness, refractive index modification, and potential optical waveguiding properties. All micromachining approaches are done by means of frequency-doubled or frequency-tripled femtosecond laser radiation. Different laser optical setups including laser scanning head, spatial beam profilers including a spatial light modulator and axial rotatory movement of the specimen are employed for micro structuring and in-depth refractive index modifications. In particular for laser lathe, a sophisticated scanning pattern, in combination with an incremental axial rotatory movement of the specimen, allows for the precise diameter reduction of sapphire rods with 250 µm diameter to fibers with outer diameters of 25 µm. By supporting the workpiece with a V-groove fixture, multi-mode fibers with lengths up to 20 cm can be processed with an average surface roughness of 250 nm. Additionally, an adapted ablation scanning sequence enables the first practical demonstration of sapphire windmill fibers. Furthermore, using a spatial light modulator allows for the adaption of the laser propagation properties as to enable volume refractive index modifications with free-form arrangement. Hexagonal patterns of refractive index modifications surrounding a pristine waveguide core are fabricated and single-mode waveguiding at 1550 nm is verified. Finally, the possibility of integrating Bragg gratings into this photonic waveguide type is demonstrated KW - sapphire KW - femtosecond laser KW - micromachining KW - laser lathe KW - rod-to-fiber KW - Femtosekundenlaser KW - Saphir Y1 - 2023 SN - 9781510659230 U6 - https://doi.org/10.1117/12.2648758 SP - 3 EP - 11 ER - TY - CHAP A1 - Kefer, Stefan A1 - Pape, Natalie A1 - Gries, Nikola A1 - Roth, Gian-Luca A1 - Schmauss, Bernhard A1 - Hellmann, Ralf T1 - Towards Pressure Sensors Based on Polymer Planar Bragg Gratings T2 - Organic Photonic Materials and Devices XXV N2 - While Bragg grating-based optical devices have shown promising performances for pressure sensing applications, their sensitivity, especially in the low-pressure regime, is unsatisfying and needs to be optimized by elaborate designs, such as cantilevers or other extrinsic mechanical transducers. This contribution demonstrates and discusses a novel concept for optical pressure sensors based on polymer planar Bragg gratings. Waveguide and Bragg grating are fabricated underneath the surface of a temperature-stable and humidity-insensitive cyclic olefin copolymer substrate by means of a femtosecond laser. Based on the employed direct-writing procedure, in combination with adaptive, in-situ beam shaping with a spatial light modulator, writing depth, i.e., location of the photonic structures within the substrate, as well as Bragg grating periodicity and positioning can be deliberately chosen. Afterwards, the polymer substrate is post-processed with a high-precision micro mill, so a diaphragm comprising the integrated photonic structures is generated. The resulting diaphragm exhibits a thickness of 300 µm and a diameter of 10 mm. Finally, the optical sensor is packaged and sealed to form an air-filled gas pocket underneath the diaphragm. Deformations of the diaphragm by external pressure changes translate to strain variations along the waveguide axis and thus perturb the Bragg grating period. This leads to changes in the grating’s wavelength of main reflection, which can be evaluated in order to quantify the relative external pressure. With this straightforward optical sensor concept, pressure sensitivities up to 39 pm kPa-1, within relative pressures ranges from 78 kPa to 372 kPa, are achieved. KW - Bragg grating KW - pressure sensor KW - integrated photonics KW - cyclic olefin copolymers KW - femtosecond laser KW - Bragg-Reflektor KW - Drucksensor Y1 - 2023 SN - 9781510659414 U6 - https://doi.org/10.1117/12.2648723 ER -