<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>1291</id>
    <completedYear>1994</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1314</pageFirst>
    <pageLast>1321</pageLast>
    <pageNumber/>
    <edition/>
    <issue>4</issue>
    <volume>33</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-07-09</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Electronbeam-deposited Mo/Si and MoxSiySi multilayer X-ray mirrors and gratings</title>
    <parentTitle language="eng">Optical Engineering</parentTitle>
    <enrichment key="copyright">0</enrichment>
    <licence>Keine Lizenz - es gilt das deutsche Urheberrecht</licence>
    <author>Bernt Schmiedeskamp</author>
    <author>Andreas Kloidt</author>
    <author>Hans-Jürgen Stock</author>
    <author>Ulf Kleineberg</author>
    <author>Thorsten Döhring</author>
    <author>Michael Pröpper</author>
    <author>Steffen Rahn</author>
    <author>Kerstin Hilgers</author>
    <author>Bernhard Heidemann</author>
    <author>Thorsten Tappe</author>
    <author>Ulrich Heinzmann</author>
    <author>Michael K. Krumrey</author>
    <author>Peter Müller</author>
    <author>Frank Scholze</author>
    <author>Klaus F. Heidemann</author>
    <subject>
      <language>deu</language>
      <type>swd</type>
      <value>Röntgenspiegel</value>
    </subject>
    <collection role="forschungsschwerpunkte" number="">Innovative Material Processing</collection>
    <collection role="forschungsschwerpunkte" number="">Material Testing &amp; Sensor Technology</collection>
  </doc>
  <doc>
    <id>1292</id>
    <completedYear>1993</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>115</pageFirst>
    <pageLast>120</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>1993</volume>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-07-09</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical elements</title>
    <parentTitle language="eng">Proceedings of Symposium on Surface Science 1993</parentTitle>
    <enrichment key="copyright">0</enrichment>
    <licence>Keine Lizenz - es gilt das deutsche Urheberrecht</licence>
    <author>Andreas Kloidt</author>
    <author>Hans-Jürgen Stock</author>
    <author>Ulf Kleineberg</author>
    <author>Thorsten Döhring</author>
    <author>Michael Pröpper</author>
    <author>Kerstin Hilgers</author>
    <author>Bernhard Heidemann</author>
    <author>Thorsten Tappe</author>
    <author>Bernt Schmiedeskamp</author>
    <author>Ulrich Heinzmann</author>
    <subject>
      <language>deu</language>
      <type>swd</type>
      <value>Röntgenspiegel</value>
    </subject>
    <collection role="forschungsschwerpunkte" number="">Innovative Material Processing</collection>
    <collection role="forschungsschwerpunkte" number="">Material Testing &amp; Sensor Technology</collection>
  </doc>
  <doc>
    <id>1294</id>
    <completedYear>1993</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>154</pageFirst>
    <pageLast>157</pageLast>
    <pageNumber/>
    <edition/>
    <issue>1-2</issue>
    <volume>228</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-07-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Smoothing of interfaces in ultrathin Mo-Si multilayers by ion bombardment</title>
    <parentTitle language="eng">Thin Solid Films</parentTitle>
    <enrichment key="copyright">0</enrichment>
    <licence>Keine Lizenz - es gilt das deutsche Urheberrecht</licence>
    <author>Andreas Kloidt</author>
    <author>Hans-Jürgen Stock</author>
    <author>Ulf Kleineberg</author>
    <author>Thorsten Döhring</author>
    <author>Michael Pröpper</author>
    <author>Bernt Schmiedeskamp</author>
    <author>Ulrich Heinzmann</author>
    <subject>
      <language>deu</language>
      <type>swd</type>
      <value>Dünne Schicht</value>
    </subject>
    <subject>
      <language>deu</language>
      <type>swd</type>
      <value>Oberflächenphysik</value>
    </subject>
    <collection role="forschungsschwerpunkte" number="">Innovative Material Processing</collection>
    <collection role="forschungsschwerpunkte" number="">Material Testing &amp; Sensor Technology</collection>
  </doc>
  <doc>
    <id>1295</id>
    <completedYear>1992</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>593</pageFirst>
    <pageLast>603</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>1742</volume>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-07-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Fabrication, thermal stability, and reflectivity measurements of Mo/Si multilayers as x-ray mirrors and other optical elements</title>
    <parentTitle language="eng">Proceedings of SPIE</parentTitle>
    <enrichment key="copyright">0</enrichment>
    <licence>Keine Lizenz - es gilt das deutsche Urheberrecht</licence>
    <author>Andreas Kloidt</author>
    <author>Hans-Jürgen Stock</author>
    <author>Ulf Kleineberg</author>
    <author>Thorsten Döhring</author>
    <author>Michael Pröpper</author>
    <author>Kerstin Nolting</author>
    <author>Bernhard Heidemann</author>
    <author>Thorsten Tappe</author>
    <author>Bernt Schmiedeskamp</author>
    <author>Ulrich Heinzmann</author>
    <author>Michael K. Krumrey</author>
    <author>Peter Müller</author>
    <author>Frank Scholze</author>
    <author>Steffen Rahn</author>
    <author>Klaus F. Heidemann</author>
    <subject>
      <language>deu</language>
      <type>swd</type>
      <value>Röntgenspiegel</value>
    </subject>
    <collection role="forschungsschwerpunkte" number="">Innovative Material Processing</collection>
    <collection role="forschungsschwerpunkte" number="">Material Testing &amp; Sensor Technology</collection>
  </doc>
  <doc>
    <id>1297</id>
    <completedYear>1992</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst>329</pageFirst>
    <pageLast>336</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>bookpart</type>
    <publisherName>VDI Verlag</publisherName>
    <publisherPlace>Düsseldorf</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-07-10</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Verbundprojekt: Multischichten für optische Komponenten im weichen Röntgengebiet</title>
    <parentTitle language="deu">Dünnschichttechnologien `92</parentTitle>
    <enrichment key="copyright">0</enrichment>
    <licence>Keine Lizenz - es gilt das deutsche Urheberrecht</licence>
    <author>Bernt Schmiedeskamp</author>
    <author>Thorsten Döhring</author>
    <author>Bernhard Heidemann</author>
    <author>Ulf Kleineberg</author>
    <author>Andreas Kloidt</author>
    <author>Kerstin Nolting</author>
    <author>Michael Pröpper</author>
    <author>Hans-Jürgen Stock</author>
    <author>Thorsten Tappe</author>
    <author>Ulrich Heinzmann</author>
    <subject>
      <language>deu</language>
      <type>swd</type>
      <value>Dünnschichttechnik</value>
    </subject>
    <collection role="forschungsschwerpunkte" number="">Innovative Material Processing</collection>
    <collection role="forschungsschwerpunkte" number="">Material Testing &amp; Sensor Technology</collection>
  </doc>
  <doc>
    <id>1300</id>
    <completedYear>1990</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>deu</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>bookpart</type>
    <publisherName>VDI Verlag</publisherName>
    <publisherPlace>Düsseldorf</publisherPlace>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-07-11</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="deu">Multischichten für optische Komponenten im weichen Röntgengebiet</title>
    <parentTitle language="deu">Dünnschichttechnologien `90</parentTitle>
    <enrichment key="copyright">0</enrichment>
    <licence>Keine Lizenz - es gilt das deutsche Urheberrecht</licence>
    <author>Bernt Schmiedeskamp</author>
    <author>Thorsten Döhring</author>
    <author>Bernhard Heidemann</author>
    <author>Ulf Kleineberg</author>
    <author>Andreas Kloidt</author>
    <author>H. Müller</author>
    <author>Kerstin Nolting</author>
    <author>Ulrich Heinzmann</author>
    <collection role="forschungsschwerpunkte" number="">Innovative Material Processing</collection>
    <collection role="forschungsschwerpunkte" number="">Material Testing &amp; Sensor Technology</collection>
  </doc>
</export-example>
