@inproceedings{Adelmann2015, author = {Adelmann, Benedikt}, title = {Substrate thinning of SiC semiconductor components using fiber laser}, series = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, booktitle = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, number = {15}, year = {2015}, subject = {Faserlaser}, language = {en} } @inproceedings{BischoffEsenHellmann2023, author = {Bischoff, Kay and Esen, Cemal and Hellmann, Ralf}, title = {Acceleration of Femtosecond Reductive Laser Sintering of Copper(II) Oxide for Conductive Copper Patterns on Cyclic Olefin Copolymers}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on the acceleration of femtosecond reductive laser sintering of copper (II) oxide on the surface of transparent cyclic olefin copolymers (COC) by varying the focus size to generate metallic copper (Cu) layers. By using different focusing conditions, different process speeds are achieved, and the structural accuracies are controlled. The formation of Cu lines is observed for different focus sizes at various scan speeds, which is attributed to laser exposure duration and chemical reaction time. The formed lines are categorized and measured by optical microscopy and provide the basis for two-dimensional Cu surfaces. By hatching, high quality conductive films are produced with an increased focus diameter of up to 400 µm at a scan speed of 400 mm/s and a hatch distance of 250 µm resulting in a multiple increased process speed by a factor of thirteen compared to previous research. Using 4-tip measurement , a low sheet resistance of 0.165 Ω/sq was validated on these Cu films, which have an atomic Cu content of 89.5\%.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{BischoffMueckeEsenetal.2023, author = {Bischoff, Kay and M{\"u}cke, Dominik and Esen, Cemal and Hellmann, Ralf}, title = {UV-Femtosecond-Laser Structuring of Silicon Carbide}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on ultraviolet ultrashort pulsed laser processing of silicon carbide. Laser ablated cavities are evaluated with respect to their ablation rates, surface roughness and overall quality by varying the laser pulse fluence. Using this type of laser, high edge quality and surface roughness down to 107 nm can be achieved with an ablation efficiency of up to 0.228 mm 3 W -1 min -1. Functional surfaces are produced by generating laser induced periodic surface structures. The comparison with infrared wavelength underlines the advantages of the ultraviolet wavelength for laser micro machining this material. Significant differences with respect to the measured ablation depths and roughness as well as generated micro-and nanostructures appear. While infrared ablation is dominated by a chipping mechanism above a critical fluence of 9.93 Jcm -2 , higher ablation rates are observed with strong quality losses at the same time. In comparison to the infrared emission wavelength, in general , a significantly higher processing quality is achieved with the ultraviolet emission wavelength. In addition, the influence of spot size and repetition rate in UV processing is investigated. By increasing these parameters, a process acceleration without quality losses is enabled. The generation of a sophisticated microstructure exemplifies the advantages of processing silicon carbide with the UV laser reported here.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{SommerHornungEsenetal.2024, author = {Sommer, David and Hornung, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Optimization of mechanical properties of additive manufactured IN 718 parts combining LPBF and in-situ high-speed milling}, series = {Laser 3D Manufacturing XI}, booktitle = {Laser 3D Manufacturing XI}, editor = {Gu, Bo and Chen, Hongqiang}, publisher = {SPIE}, doi = {http://dx.doi.org/10.1117/12.3000952}, year = {2024}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {en} } @inproceedings{SommerSafiEsenetal.2024, author = {Sommer, David and Safi, Abdulrahman and Esen, Cemal and Hellmann, Ralf}, title = {Additive manufacturing of Nickel-based superalloy: optimization of surface roughness using integrated high-speed milling}, series = {Laser 3D Manufacturing XI}, booktitle = {Laser 3D Manufacturing XI}, editor = {Gu, Bo and Chen, Hongqiang}, publisher = {SPIE}, doi = {http://dx.doi.org/10.1117/12.3000972}, year = {2024}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {en} } @inproceedings{LutzSommerhuberKettneretal.2024, author = {Lutz, Christian and Sommerhuber, Ryan and Kettner, Matthias and Esen, Cemal and Hellmann, Ralf}, title = {Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000954}, year = {2024}, abstract = {We report on process sensing using a membrane-free optical microphone to monitor the acoustic emission during ultrashort pulsed laser ablation of multilayer materials. The acoustic emission during ablation is used to detect material transitions, with the specific signatures allowing to create a reliable process control for identifying individual layers. The outstanding properties of membrane-free optical microphones in terms of high bandwidth and high temporal resolution are ideally qualified for characterizing an ultrashort pulsed laser process, with its properties and capabilities being presented in this contribution. In particular, for layer- and material-selective ablation of multilayer printed circuit board components, copper and polyimide layers are ablated and the material transition is detected by analyzing the acoustic signal at different frequency levels, which is a novelty in the field of ultrashort pulsed laser process sensing. The investigations show, that the optical microphone can be used to resolve both the scanning paths and ablated layers by means of interruptions in a time-resolved acoustic spectrogram. Furthermore, as a result of a higher ablation rate of polyimide compared to copper and thus the increase of the emitted acoustic energy, the material transition between copper and polyimide layers can clearly be detected. The detection of this process event can be used for process control.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{LutzHelmEsenetal.2024, author = {Lutz, Christian and Helm, Jonas and Esen, Cemal and Hellmann, Ralf}, title = {Computational optimization of borehole sequences for the reduction of heat accumulation in drilling processes using ultrashort pulse lasers}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000930}, year = {2024}, abstract = {We report on laser drilling of borehole arrays using a high-power ultrashort pulse laser with particular focus on reducing heat accumulation in the workpiece by optimizing the drilling sequence, particularly for highly efficient multi-spot drilling. Different optimization approaches are chosen to improve the drilling sequence, also comparing a simplex algorithm and an evolutionary algorithm. From a laser application point of view, we also compare drilling sequences using a single spot and up to 16-fold multi-spots generated by a spatial light modulator, as to accelerate the drilling process in terms of the number of drilled holes per second. To evaluate the temperatures generated during drilling of up to 40,000 holes in less than 76 seconds in stainless steel foil, temperatures are measured by a thermal imaging camera and subsequently compared to a COMSOL-based simulation for all optimized drilling sequences. With respect to an average temperature of 706 °C without optimization, a reduction by 252 °C, i.e., a reduction by nearly 36 \% based on the Celsius scale, is achieved using a 4 × 4 beam splitter and an optimized drilling sequence with a drilling rate of 526 holes per second. In addition, using a 2 × 2 beam splitter, a temperature reduction of up to 40.5 \% is achieved for a drilling process with a rate of 129 holes per second using an optimized drilling sequence.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{KeferZettlSchmaussetal.2023, author = {Kefer, Stefan and Zettl, Julian and Schmauss, Bernhard and Esen, Cemal and Hellmann, Ralf}, title = {High-Precision Micromachining of Sapphire Towards Optical Waveguiding Structures using Femtosecond Lasers}, series = {Laser-based Micro- and Nanoprocessing XVII}, booktitle = {Laser-based Micro- and Nanoprocessing XVII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Watanabe, Akira}, isbn = {9781510659230}, doi = {10.1117/12.2648758}, pages = {3 -- 11}, year = {2023}, abstract = {While sapphire is one of the most durable materials, its properties entail that high-precision machining, especially in the sub-millimeter regime, is still challenging. This contribution demonstrates and discusses novel femtosecond laser-based micromachining approaches for the fabrication of rotational-symmetric sapphire workpieces, specifically the generation of optical fibers by means of laser lathe of sapphire rods and the practical realization of windmill fibers. In addition, volume refractive index modification in planar sapphire substrates is presented to induce photonic crystal waveguides. The micromachined structures are comprehensively examined with respect to geometric fidelity, surface roughness, refractive index modification, and potential optical waveguiding properties. All micromachining approaches are done by means of frequency-doubled or frequency-tripled femtosecond laser radiation. Different laser optical setups including laser scanning head, spatial beam profilers including a spatial light modulator and axial rotatory movement of the specimen are employed for micro structuring and in-depth refractive index modifications. In particular for laser lathe, a sophisticated scanning pattern, in combination with an incremental axial rotatory movement of the specimen, allows for the precise diameter reduction of sapphire rods with 250 µm diameter to fibers with outer diameters of 25 µm. By supporting the workpiece with a V-groove fixture, multi-mode fibers with lengths up to 20 cm can be processed with an average surface roughness of 250 nm. Additionally, an adapted ablation scanning sequence enables the first practical demonstration of sapphire windmill fibers. Furthermore, using a spatial light modulator allows for the adaption of the laser propagation properties as to enable volume refractive index modifications with free-form arrangement. Hexagonal patterns of refractive index modifications surrounding a pristine waveguide core are fabricated and single-mode waveguiding at 1550 nm is verified. Finally, the possibility of integrating Bragg gratings into this photonic waveguide type is demonstrated}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{KeferPapeGriesetal.2023, author = {Kefer, Stefan and Pape, Natalie and Gries, Nikola and Roth, Gian-Luca and Schmauss, Bernhard and Hellmann, Ralf}, title = {Towards Pressure Sensors Based on Polymer Planar Bragg Gratings}, series = {Organic Photonic Materials and Devices XXV}, booktitle = {Organic Photonic Materials and Devices XXV}, isbn = {9781510659414}, doi = {10.1117/12.2648723}, year = {2023}, abstract = {While Bragg grating-based optical devices have shown promising performances for pressure sensing applications, their sensitivity, especially in the low-pressure regime, is unsatisfying and needs to be optimized by elaborate designs, such as cantilevers or other extrinsic mechanical transducers. This contribution demonstrates and discusses a novel concept for optical pressure sensors based on polymer planar Bragg gratings. Waveguide and Bragg grating are fabricated underneath the surface of a temperature-stable and humidity-insensitive cyclic olefin copolymer substrate by means of a femtosecond laser. Based on the employed direct-writing procedure, in combination with adaptive, in-situ beam shaping with a spatial light modulator, writing depth, i.e., location of the photonic structures within the substrate, as well as Bragg grating periodicity and positioning can be deliberately chosen. Afterwards, the polymer substrate is post-processed with a high-precision micro mill, so a diaphragm comprising the integrated photonic structures is generated. The resulting diaphragm exhibits a thickness of 300 µm and a diameter of 10 mm. Finally, the optical sensor is packaged and sealed to form an air-filled gas pocket underneath the diaphragm. Deformations of the diaphragm by external pressure changes translate to strain variations along the waveguide axis and thus perturb the Bragg grating period. This leads to changes in the grating's wavelength of main reflection, which can be evaluated in order to quantify the relative external pressure. With this straightforward optical sensor concept, pressure sensitivities up to 39 pm kPa-1, within relative pressures ranges from 78 kPa to 372 kPa, are achieved.}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{KeferSchmaussHellmann2021, author = {Kefer, Stefan and Schmauss, Bernhard and Hellmann, Ralf}, title = {POLYMER PLANAR BRAGG GRATINGS BASED ON BULK CYCLIC OLEFIN COPOLYMERS: FABRICATION AND FUNCTIONALIZATION}, series = {Proceedings of Student Conference on Sensors, Systems and Measurement 2021}, booktitle = {Proceedings of Student Conference on Sensors, Systems and Measurement 2021}, isbn = {978-80-01-06822-9}, year = {2021}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{KeferPapeSchmaussetal.2023, author = {Kefer, Stefan and Pape, Natalie and Schmauss, Bernhard and Hellmann, Ralf}, title = {Fabrication of Lattice-Like Waveguides in Planar Cyclic Olefin Copolymers}, series = {28th International Conference on Optical Fiber Sensors}, booktitle = {28th International Conference on Optical Fiber Sensors}, isbn = {978-1-957171-30-2}, doi = {10.1364/OFS.2023.Th6.69}, year = {2023}, abstract = {This work demonstrates the femtosecond laser-based fabrication of lattice-like waveguides in planar cyclic olefin copolymers. An overview of the fabrication process is provided and waveguiding in the C-band is proven via optical near-field analysis.}, subject = {Wellenleiter}, language = {en} } @inproceedings{KeferSchmaussHellmann2023, author = {Kefer, Stefan and Schmauss, Bernhard and Hellmann, Ralf}, title = {Sapphire-Based Planar Bragg Grating Devices}, series = {28th International Conference on Optical Fiber Sensors}, booktitle = {28th International Conference on Optical Fiber Sensors}, isbn = {978-1-957171-30-2}, doi = {10.1364/OFS.2023.W2.4}, year = {2023}, abstract = {This study reports on the long-term stability and the high-temperature capability of sapphire-based photonic crystal waveguides with integrated Bragg gratings. Furthermore, their Bragg grating reflectivity as well as their temperature sensitivity is quantified.}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{MarxEsenLutzetal.2023, author = {Marx, Jan and Esen, Cemal and Lutz, Christian and Hellmann, Ralf and Ostendorf, Andreas}, title = {Holographic tuning of physical axicons}, volume = {2023}, number = {154}, publisher = {LiM 2023 Proceedings}, pages = {1 -- 9}, year = {2023}, abstract = {Axicon generated Bessel beams are a popular tool for high aspect ratio precision laser drilling. Spot diameter and working distance are given by the geometric parameters of the axicon and the wavelength used. Thus, it is difficult to manipulate the beam shape of a Bessel beam for a given setup. Spatial light modulators (SLMs) overcome limitations in flexibility. However, due to the limited phase shift of SLMs, only Bessel beams with flat cone angles and large focal length can be generated. In this contribution, an approach for generating Bessel beams with a shorter, but tunable focal length is presented. A physical axicon was combined with an SLM. A holographic image of a negative axicon is put on the SLM to generate a ring beam, which is focused by a subsequent physical axicon to get a small focal diameter. Thus, different sized high aspect ratio micro holes can be drilled without using any moving components.}, subject = {Bessel-B{\"u}ndel}, language = {en} } @inproceedings{LutzSchwarzMarxetal.2024, author = {Lutz, Christian and Schwarz, Simon and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Combination of an axicon and a spatial light modulator for the generation of multiBessel beams for microdrilling using ultrashort pulsed laser}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000946}, year = {2024}, abstract = {Due to their special beam profile, Bessel beams offer advantageous properties for micro-drilling and internal volume processing, especially for transparent materials. In addition, the laser power of industrial ultrashort pulsed lasers hasnincreased significantly in recent years, offering the possibility of highly efficient processes using multi-spot profiles. We report on optical simulations and an experimental optical setup for generating multi-Bessel beams by combining a refractive axicon and a spatial light modulator. This setup offers a new possibility of multi-Bessel beam generation by functional division of the Bessel beam generation by the axicon and the possibility of separation flexible beam splitting by a spatial light modulator. The beam profiles generated with this setup are analyzed and compared in this study using optical simulations and experiments. In addition to the analysis of the Bessel beams in the machining plane, they are also analyzed in the propagation direction by means of intensity distributions measured by a camera in small-step z positions. Furthermore, the experimental applicability of the module-based beam shaping system is demonstrated by integrating into an existing laser system.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{FranzMueckeKunzetal.2023, author = {Franz, Daniel and M{\"u}cke, Dominik and Kunz, Tim and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 \% on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6\% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 \% reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing.}, subject = {Pikosekundenbereich}, language = {en} } @inproceedings{FranzSchusterSchwarzetal.2025, author = {Franz, Daniel and Schuster, David and Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Ultrashort pulsed laser drilling of through-glass vias for glass core packaging}, series = {Proceedings of LAMP2025 - the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025}, booktitle = {Proceedings of LAMP2025 - the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025}, year = {2025}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SommerTruetschEsenetal.2025, author = {Sommer, David and Truetsch, Ben and Esen, Cemal and Hellmann, Ralf}, title = {Microstructural Fracture Behaviour of PBF-LB/M Inconel 718 Components within different HIP Processes}, series = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, booktitle = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, year = {2025}, abstract = {We report on a study of different hot isostatic pressing (HIP) cycles, improving the mechanical properties of additively manufactured Inconel 718 components. For this, PBF-LB/M built components are post-processed by different HIP sequences, as gas pressure and processing time are varied, leading to differences in microstructure and material characteristics. Static and dynamic mechanical testing are performed, evaluating the changes in mechanical properties with particular focus on the ultimate tensile strength and endurance limit. Furthermore, metallographic analysis is employed to investigate the achieved density and microhardness. Microstructural analysis, showing the grain boundaries, is used to identify generated phases and precipitations of the material matrix. Moreover, the fracture behaviour is classified by grain deformation during mechanical testing. As the HIP leads to microstructural changes of Inconel 718 components, mechanical properties can be improved significantly, enhancing the ultimate tensile strength and simultaneously the endurance limit.}, subject = {Isostatisches Heißpressen}, language = {de} } @inproceedings{SommerPetersEsenetal.2025, author = {Sommer, David and Peters, Maximilian and Esen, Cemal and Hellmann, Ralf}, title = {Influence of in-situ high-speed milling within a hybrid additive manufacturing approach on the fatigue behaviour of Inconel 718 lattice structures}, series = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, booktitle = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, year = {2025}, abstract = {As lattice structures in various designs are used in additive manufacturing for lightweight components, the mechanical characterisation and fracture behaviour is of upmost importance for their industrial application. In this study, the fatigue behaviour of Inconel 718 lattice structures is evaluated, comparing sole PBF-LB/M to a hybrid additive manufacturing process combining PBF-LB/M with in-situ high-speed milling. At first, the static and dynamic mechanical load behaviour of different packing densities is analysed, determining the compressive strength and the endurance limit. Secondly, hybrid additive manufactured components are compared to PBF-LB/M built parts with respect to these mechanical properties, revealing improved compressive properties and modified regimes of fatigue. In addition, differences in fracture behaviour are qualified by fractographic and surface analysis. Overall, it can be summarized that the mechanical load characteristics, especially the fatigue behaviour, are improved for hybrid additively manufactured components with a superior surface quality of Ra < 1 µm.}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {de} } @inproceedings{BischoffKeferEsenetal.2024, author = {Bischoff, Kay and Kefer, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Towards entirely ultrashort pulsed laser based process chain to manufacture polymer lab-on-chip systems with electrical, photonic, and microfluidic functionalities}, series = {The 5th Smart Laser Processing Conference (SLPC)}, booktitle = {The 5th Smart Laser Processing Conference (SLPC)}, year = {2024}, subject = {Ultrakurzzeitlaser}, language = {de} }