@article{AlexanderShortJonesetal.1995, author = {Alexander, Morgan and Short, Robert and Jones, Frank and Stollenwerk, Manfred and Mathar, Gerd and Zabold, Jochen and Michaeli, Walter}, title = {The heterogeneous nature of deposits from hexamethyldisiloxane/oxygen plasmas}, series = {Ceramic films and coatings}, volume = {1995}, journal = {Ceramic films and coatings}, number = {54}, pages = {87 -- 99}, year = {1995}, subject = {Hexamethyldisiloxan}, language = {en} } @article{AlexanderShortJonesetal.1996, author = {Alexander, Morgan and Short, Robert and Jones, Frank and Stollenwerk, Manfred and Mathar, Gerd and Zabold, Jochen and Michaeli, Walter}, title = {An XPS investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxgen plasmas}, series = {Journal of Materials Science}, volume = {31}, journal = {Journal of Materials Science}, pages = {1879 -- 1885}, year = {1996}, subject = {Hexamethyldisiloxan}, language = {en} }