@inproceedings{KloidtStockKleinebergetal.1993, author = {Kloidt, Andreas and Stock, Hans-J{\"u}rgen and Kleineberg, Ulf and D{\"o}hring, Thorsten and Pr{\"o}pper, Michael and Hilgers, Kerstin and Heidemann, Bernhard and Tappe, Thorsten and Schmiedeskamp, Bernt and Heinzmann, Ulrich}, title = {Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical elements}, series = {Proceedings of Symposium on Surface Science 1993}, volume = {1993}, booktitle = {Proceedings of Symposium on Surface Science 1993}, pages = {115 -- 120}, year = {1993}, subject = {R{\"o}ntgenspiegel}, language = {en} } @article{KloidtStockKleinebergetal.1993, author = {Kloidt, Andreas and Stock, Hans-J{\"u}rgen and Kleineberg, Ulf and D{\"o}hring, Thorsten and Pr{\"o}pper, Michael and Schmiedeskamp, Bernt and Heinzmann, Ulrich}, title = {Smoothing of interfaces in ultrathin Mo-Si multilayers by ion bombardment}, series = {Thin Solid Films}, volume = {228}, journal = {Thin Solid Films}, number = {1-2}, pages = {154 -- 157}, year = {1993}, subject = {D{\"u}nne Schicht}, language = {en} }