@misc{EmmerichCiba2017, author = {Emmerich, Florian and Ciba, Stefan}, title = {Thin-film Micro-Heater for Fusion Bonding of Teflon-FEP Foils}, series = {21th International Student Conference on Electrical Engineering POSTER 2017}, volume = {2017}, journal = {21th International Student Conference on Electrical Engineering POSTER 2017}, number = {POSTER 2017}, pages = {1 -- 5}, year = {2017}, abstract = {MEMS-based Micro-Heaters, in combination with thin-film temperature sensors, are often used for providing the necessary amount of thermal energy for sensor-applications. In this work, we propose an integrated micro-heater as actuator for fusion bonding of polymers, which can optimize the production process of electret-based micro-energy-harvesters. By adjusting the design parameters of thermoforming-molds, we can implement thin-film micro-heaters that are capable of generating temperatures of above 300°C for numerous cycles. Utilizing the integrated micro-heater allows local fusion bonding of Fluoroethylenepropylene (Teflon-FEP) foils on a micrometer-scale while reducing unnecessary thermal stress. This is beneficial for the longevity of the micro-energy-harvesters, while simultaneously improving its performance.}, subject = {Mikrosystemtechnik}, language = {en} }