@inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Current results on laser-based production of complex optics in glass}, series = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, booktitle = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UKP-Prozess mit anschließendem CO2-Laserpolieren zur Fertigung komplexer Optiken}, series = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, booktitle = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, year = {2020}, subject = {Linse}, language = {en} } @article{SchwarzRungEsenetal.2021, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Enhanced ablation efficiency using GHz bursts in micromachining fused silica}, series = {Optics Letters}, volume = {46}, journal = {Optics Letters}, number = {2}, pages = {282 -- 285}, year = {2021}, subject = {Fr{\"a}sen}, language = {de} } @article{SchwarzGoetzendorferRungetal.2021, author = {Schwarz, Simon and G{\"o}tzendorfer, Babette and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Compact Beam Homogenizer Module with Laser-Fabricated Lens-Arrays}, series = {applied sciences}, volume = {2021}, journal = {applied sciences}, number = {11}, pages = {1018 -- 1018}, year = {2021}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2021, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Ultrashort pulsed laser backside ablation of fused silica}, series = {Optics Express}, volume = {29}, journal = {Optics Express}, number = {15}, pages = {23477 -- 23486}, year = {2021}, subject = {Femtosekundenlaser}, language = {de} } @article{RungBokanKleinwortetal.2019, author = {Rung, Stefan and Bokan, Kevin and Kleinwort, Frederick and Schwarz, Simon and Simon, Peter and Klein-Wiele, Jan-Hendrik and Esen, Cemal and Hellmann, Ralf}, title = {Possibilities of Dry and Lubricated Friction Modification Enabled by Different Ultrashort Laser-Based Surface Structuring Methods}, series = {Lubricants}, volume = {7}, journal = {Lubricants}, number = {43}, doi = {10.3390/lubricants7050043}, pages = {1 -- 13}, year = {2019}, abstract = {In this contribution we report on the possibilities of dry and lubricated friction modification introduced by different laser surface texturing methods. We compare the potential of Laser-Induced Periodic Surface Structures and Laser Beam Interference Ablation on 100Cr6 steel in a linear reciprocating ball-on-disc configuration using 100Cr6 steel and tungsten carbide balls with load forces between 50mN and 1000 mN. For dry friction, we find a possibility to reduce the coefficient of friction and we observe a pronounced direction dependency for surfaces fabricated by Laser Beam Interference Ablation. Furthermore, Laser-Induced Periodic Surface Structures result in a load-dependent friction reduction for lubricated linear reciprocating movements. This work helps to identify the modification behaviour of laser generated micro structures with feature sizes of approximately 1μm and reveals new possibilities for surface engineering}, subject = {Laser}, language = {en} } @article{RungBokanRutschetal.2018, author = {Rung, Stefan and Bokan, Kevin and Rutsch, Kevin and Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Laser Induced Periodic Surface Structures on 100Cr6 Steel for Modification of Friction Demonstrated with Stribeck Test}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, doi = {10.2961/jlmn.2018.03.0004}, pages = {160 -- 165}, year = {2018}, abstract = {In this contribution, we report on surface functionalization by introducing laser induced periodic surface structures on 100Cr6 bearing steel to modify complex tribological properties. The advanced approach of this study is the measurement of the coefficient of friction by performing a ball-on-disk Stribeck test on laser structured surfaces with polytetrafluoroethylene balls in a lubricant environment. The Stribeck test reveals the modified friction behavior using translation speeds up to 106 mm/min and load forces between 100 mN and 5000 mN. Our results show increased stiction and coefficient of friction for laser structured surfaces in the regime of boundary lubrication which is attributed to the laser induced surface asperities. Decreased coefficient of friction is observed in the regime of mixed and hydrodynamic lubrication, i.e. for velocities higher than 1000 mm/min, for surfaces covered by laser induced periodic surface structures with low spatial frequency.}, subject = {Laser}, language = {en} } @article{SchwarzRungHellmann2016, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {Generation of laser-induced periodic surface structures on transparent material-fused silica}, series = {Applied Physics Letters}, volume = {108}, journal = {Applied Physics Letters}, number = {18}, pages = {181607 -- 181607}, year = {2016}, subject = {Laser}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Fabrication of a high-quality axicon by femtosecond laser ablation and CO2 laser polishing for quasi-Bessel beam generation}, series = {Optics Express}, volume = {26}, journal = {Optics Express}, number = {18}, pages = {23287 -- 23294}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungHellmann2017, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {One-dimensional low spatial frequency LIPSS with rotating orientation on fused silica}, series = {Applied Surface Science}, volume = {2017}, journal = {Applied Surface Science}, number = {411}, pages = {113 -- 116}, year = {2017}, subject = {Quarzglas}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Influence of pulse duration on high-precision manufacturing of 3D geometries}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, pages = {292 -- 295}, year = {2018}, subject = {Dreidimensionale Geometrie}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Homogeneous low spatial frequency LIPSS on dielectric materials generated by beam-shaped femtosecond pulsed laser irradiation}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {2}, pages = {90 -- 94}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Rapid fabrication of precise glass axicon arrays by an all laser-based manufacturing technology}, series = {Journal of Laser Applications}, volume = {32}, journal = {Journal of Laser Applications}, number = {1}, pages = {012001 -- 012001}, year = {2020}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Surface Plasmon Polariton Triggered Generation of 1D-Low Spatial Frequency LIPSS on Fused Silica}, series = {Applied Sciences}, volume = {8}, journal = {Applied Sciences}, number = {9}, pages = {1624 -- 1624}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{RungBokanSchwarzetal.2020, author = {Rung, Stefan and Bokan, Kevin and Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Influence of laser wavelength on the modification of friction between 100Cr6 steel and polytetrafluoroethylene by femtosecond laser-induced periodic surface structures}, series = {Journal of Laser Applications}, volume = {32}, journal = {Journal of Laser Applications}, number = {3}, doi = {10.2351/7.0000036}, pages = {032017-1 -- 032017-6}, year = {2020}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRothRungetal.2020, author = {Schwarz, Simon and Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Fabrication and evaluation of negative axicons for ultrashort pulsed laser applications}, series = {Optics Express}, volume = {Optics Express}, journal = {Optics Express}, number = {28}, pages = {26207 -- 26217}, year = {2020}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Manufacturing of optical elements by non-contact laser processing}, series = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, booktitle = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, number = {11478}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @article{DudutisPipirasSchwarzetal.2020, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Račiukaitis, Gediminas and Gečys, Paulius}, title = {Laser-fabricated axicons challenging the conventional optics in glass processing applications}, series = {Optics Express}, volume = {28}, journal = {Optics Express}, number = {4}, pages = {5715 -- 5730}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @article{SchwarzRungHellmann2017, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {Two-Dimensional Low Spatial Frequency Laser-Induced Periodic Surface Structuring of Sapphire}, series = {Journal of Laser Micro/Nanoengineering}, volume = {12}, journal = {Journal of Laser Micro/Nanoengineering}, number = {2}, pages = {67 -- 71}, year = {2017}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {All laser-based fabrication of optical elements}, series = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, booktitle = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, year = {2020}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Axicon fabrication with ultrashort and CO2 laser}, series = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, booktitle = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, year = {2018}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{SchwarzRungHellmann2017, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {High quality one-dimensional low spatial frequency LIPSS on sapphire generated by Top-Hat beam shaped ultrashort-pulsed laser}, series = {MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference}, booktitle = {MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference}, year = {2017}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SchwarzRungHellmann2016, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {Simulation of process parameters towards the generation of low spatial frequency LIPSS on dielectric materials}, series = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, booktitle = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, year = {2016}, subject = {Laserbestrahlung}, language = {en} } @inproceedings{DudutisPipirasSchwarzetal.2019, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Gečys, Paulius}, title = {Bessel beam formation with all laser fabricated axicon - case of glass dicing applications}, series = {COLA 2019, 15th International Conference on Laser Ablation}, booktitle = {COLA 2019, 15th International Conference on Laser Ablation}, year = {2019}, subject = {Laserbestrahlung}, language = {en} } @inproceedings{DudutisPipirasSchwarzetal.2019, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Račiukaitis, Gediminas and Gečys, Paulius}, title = {Glass cutting by oblate-tip axicon-generated Bessel-Gaussian beams}, series = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, booktitle = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, year = {2019}, subject = {Laserschneiden}, language = {en} } @inproceedings{LutzSchwarzRungetal.2021, author = {Lutz, Christian and Schwarz, Simon and Rung, Stefan and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, abstract = {We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing.}, subject = {Ultrakurzzeitlaser}, language = {en} } @article{FranzSchusterSchwarzetal.2025, author = {Franz, Daniel and Schuster, David and Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Fabrication and analysis of through-glass vias for glass-based electronic packaging using an ultrashort pulsed laser}, series = {Optics and Lasers in Engineering}, volume = {193}, journal = {Optics and Lasers in Engineering}, publisher = {Elsevier BV}, issn = {0143-8166}, doi = {10.1016/j.optlaseng.2025.109106}, year = {2025}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{FranzSchusterSchwarzetal.2025, author = {Franz, Daniel and Schuster, David and Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Ultrashort pulsed laser drilling of through-glass vias for glass core packaging}, series = {Proceedings of LAMP2025 - the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025}, booktitle = {Proceedings of LAMP2025 - the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025}, year = {2025}, subject = {Ultrakurzzeitlaser}, language = {en} }