@article{HuernerSchlegelAdelmannetal.2013, author = {H{\"u}rner, Andreas and Schlegel, Tobias and Adelmann, Benedikt and Mitlehner, Heinz and Hellmann, Ralf and Bauer, Anton and Frey, Lothar}, title = {Alloying of Ohmic Contacts to n-type 4H-SiC via Laser Irradiation}, series = {Materials Science Forum}, volume = {740-742}, journal = {Materials Science Forum}, pages = {773 -- 776}, year = {2013}, subject = {Ohm-Kontakt}, language = {de} }