@article{FranzYangMicheletal.2023, author = {Franz, Daniel and Yang, Yongting and Michel, Luis and Esen, Cemal and Hellmann, Ralf}, title = {Evaluation of an ultrashort pulsed laser robot system for flexible and large-area micromachining}, series = {Journal of Laser Applications}, volume = {35}, journal = {Journal of Laser Applications}, number = {4}, pages = {042057 -- 042065}, year = {2023}, abstract = {We report for the first time on the realization, characterization and application of an ultrashort pulsed laser robot system for flexible and large-area 2D and 3D laser micromachining with 6 articulated axes. To characterize the dynamic positioning of the laser beam during and after axes movement, CMOS image sensors were integrated into the beam path. A method introduced for the alignment of the optical axes allows a reduction of the deviations in laser beam positioning to less than 141.8 ± 92.9 μm within a 110° rotation range of axis 4. In addition, a high laser beam positioning repeatability of less than 102.2 μm is demonstrated over a total period of 14 h for a movement of axis 5 within a range of 0° to 90°. Initial laser cutting, laser structuring and laser marking applications on automotive dashboards and glass substrates are presented for flexible and large area 2D and 3D manufacturing. By applying a special laser cutting strategy for processing AF 32 eco thin glass, high cutting quality is achieved with a taper of up to 96.3\% without the generation of cracks, demonstrating the innovative potential of the high-precision laser robot system. Nonetheless, different identified inherent influences of each axis 1-5 during robot axis movement demand for an innovative beam stabilization concept to achieve high precision in laser beam positioning.}, subject = {Ultrakurzzeitlaser}, language = {en} }