@inproceedings{KrauseStahlOffergeldSandetal.2018, author = {Krause, Dennis and Stahl-Offergeld, Markus and Sand, Markus and Hohe, Hans-Peter and Kovacs, G{\"u}nter}, title = {CMOS Integrated Field Coils for Self-Calibration of 3D Hall-Sensors}, series = {Sensors and Measuring Systems, 19th ITG/GMA-Symposium, 26-27 June 2018}, volume = {2018}, booktitle = {Sensors and Measuring Systems, 19th ITG/GMA-Symposium, 26-27 June 2018}, publisher = {IEEE}, isbn = {978-3-8007-4683-5}, year = {2018}, abstract = {An integrated arrangement of field coils for on-chip self-calibration is presented. Routine tests for 3D Hall sensors are very complex and need special test hardware to generate a well-defined three-dimensional magnetic field. In combination with a high voltage current source, the integrated arrangement allows the generation of local magnetic fields up to 2 mT. In spite of process variations, the error of each coil's magnetic flux density is less than 1\%. Magnetic tests can be done on-chip without need for additional external test equipment. Additionally, a low power mode allows for validity checks and online calibrations during measurements with a small magnetic flux density of 0:2 mT.}, subject = {Magnetspule}, language = {en} }