@inproceedings{KollerHesslerRosenbergeretal.2012, author = {Koller, Georg and Hessler, Steffen and Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Micro-structured optical waveguide fabrication in PMMA using low frequency reactive ion etching}, series = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2012}, subject = {Wellenleiter}, language = {en} }