@article{SchmiedeskampKloidtStocketal.1994, author = {Schmiedeskamp, Bernt and Kloidt, Andreas and Stock, Hans-J{\"u}rgen and Kleineberg, Ulf and D{\"o}hring, Thorsten and Pr{\"o}pper, Michael and Rahn, Steffen and Hilgers, Kerstin and Heidemann, Bernhard and Tappe, Thorsten and Heinzmann, Ulrich and Krumrey, Michael K. and M{\"u}ller, Peter and Scholze, Frank and Heidemann, Klaus F.}, title = {Electronbeam-deposited Mo/Si and MoxSiySi multilayer X-ray mirrors and gratings}, series = {Optical Engineering}, volume = {33}, journal = {Optical Engineering}, number = {4}, pages = {1314 -- 1321}, year = {1994}, subject = {R{\"o}ntgenspiegel}, language = {en} } @inproceedings{KloidtStockKleinebergetal.1993, author = {Kloidt, Andreas and Stock, Hans-J{\"u}rgen and Kleineberg, Ulf and D{\"o}hring, Thorsten and Pr{\"o}pper, Michael and Hilgers, Kerstin and Heidemann, Bernhard and Tappe, Thorsten and Schmiedeskamp, Bernt and Heinzmann, Ulrich}, title = {Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical elements}, series = {Proceedings of Symposium on Surface Science 1993}, volume = {1993}, booktitle = {Proceedings of Symposium on Surface Science 1993}, pages = {115 -- 120}, year = {1993}, subject = {R{\"o}ntgenspiegel}, language = {en} }