@article{RischHuehnleinKnoelletal.2010, author = {Risch, Anna and H{\"u}hnlein, Kristof and Kn{\"o}ll, J{\"u}rgen and Hellmann, Ralf}, title = {Picosecond and nanosecond pulsed laserscribing on transparent conductive indium tin oxide}, series = {Journal of Material processing technolgies}, journal = {Journal of Material processing technolgies}, issn = {0924-0136}, year = {2010}, subject = {Laserbearbeitung}, language = {en} } @article{BochtlerHellmannKaloudis2010, author = {Bochtler, Ulrich and Hellmann, Ralf and Kaloudis, Michael}, title = {Neuartige UV-Lichtquelle auf Leuchtdiodenbasis, Packaging und Hybridschaltungen}, series = {PLUS}, journal = {PLUS}, number = {2}, publisher = {Leuze-Verlag}, year = {2010}, subject = {Lumineszenzdiode}, language = {de} } @inproceedings{GlaabHellmann2010, author = {Glaab, Johannes and Hellmann, Ralf}, title = {Germicidal potential of ultraviolet-LED emitting different wavelength for the inactivation of indigenous coliform bacteria}, series = {Water research conference, Lissabon, Portugal}, booktitle = {Water research conference, Lissabon, Portugal}, year = {2010}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{RosenbergerBelleHellmann2009, author = {Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Optical interrogation of bragg grating sensors using tunable fibre based bandpass filter}, series = {Proceedings of the 20st international science conference, Mittweida}, booktitle = {Proceedings of the 20st international science conference, Mittweida}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{BelleScheurichHellmann2009, author = {Belle, Stefan and Scheurich, Steffen and Hellmann, Ralf}, title = {Interrogation water content in organic solvents by planar bragg grating sensors}, series = {Proceedings SENSOR}, booktitle = {Proceedings SENSOR}, number = {Vol. II, P3.2}, isbn = {978-3-9810993-6-2}, pages = {324 -- 329}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{ScheurichBelleHellmannetal.2009, author = {Scheurich, Steffen and Belle, Stefan and Hellmann, Ralf and So, Sik and Sparrow, Ian and Emmerson, Greg}, title = {Application of a silica-on-silicon planar optical waveguide. Bragg grating sensor for organic liquid compound detection}, series = {SPIE Optics an optoelectronics conference, Proceedings of SPIE, Vol. 7356, Prag, CR}, booktitle = {SPIE Optics an optoelectronics conference, Proceedings of SPIE, Vol. 7356, Prag, CR}, number = {7356}, isbn = {978-0819476302}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{ScheurichBelleHellmannetal.2009, author = {Scheurich, Steffen and Belle, Stefan and Hellmann, Ralf and So, Sik and Sparrow, Ian and Emmerson, Greg}, title = {Planar optical waveguide bragg grating chemical sensor for online process control}, series = {3rd integrated optics - sensors, sensing structures and methodes Korbielow, PL}, booktitle = {3rd integrated optics - sensors, sensing structures and methodes Korbielow, PL}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @article{HockAdelmannHellmann2012, author = {Hock, Klaus and Adelmann, Benedikt and Hellmann, Ralf}, title = {Comparative study of remote fiber laser and water-jet guided laser cutting of thin film metal sheets}, series = {Physics procedia}, volume = {39}, journal = {Physics procedia}, pages = {225 -- 231}, year = {2012}, subject = {Laserschneiden}, language = {en} } @inproceedings{KalmarHellmannRegertetal.2012, author = {Kalm{\´a}r, L{\´a}szl{\´o} and Hellmann, Ralf and R{\´e}gert, Tam{\´a}s and Varga, Zoltan}, title = {Numerical investigation of heat transport procedure in high power LED modules}, series = {Proceedings of the XXVI International MicroCAD Conference, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference, Miskolc (Hungary)}, pages = {43 -- 46}, year = {2012}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{BischoffJaegerRungetal.2012, author = {Bischoff, Christian and J{\"a}ger, Erwin and Rung, Stefan and Hellmann, Ralf}, title = {Diffractive beam shaping optics for efficient micromachining}, series = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, booktitle = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, year = {2012}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{KollerHesslerRosenbergeretal.2012, author = {Koller, Georg and Hessler, Steffen and Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Micro-structured optical waveguide fabrication in PMMA using low frequency reactive ion etching}, series = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2012}, subject = {Wellenleiter}, language = {en} } @inproceedings{GirschikofskyRosenbergerBelleetal.2012, author = {Girschikofsky, Maiko and Rosenberger, Manuel and Belle, Stefan and Brutschy, Malte and Waldvogel, Siegfried and Hellmann, Ralf}, title = {α-Cyclodextrin functionalized planar Bragg grating sensor for the detection of small arene traces in solvamt vapour}, series = {14th international meeting on chemical sensors (IMCS 2012)}, booktitle = {14th international meeting on chemical sensors (IMCS 2012)}, isbn = {978-3-9813484-2-2}, doi = {10.5162/IMCS2012/7.5.1}, pages = {646 -- 648}, year = {2012}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{RungHellmann2012, author = {Rung, Stefan and Hellmann, Ralf}, title = {Laser scribing of metallized transparent conductive oxide - A comparative study using top hat and Gaussian beam profiles}, series = {Proceedings of the XXVI International MicroCAD Conference - Material Processing Technologies}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Material Processing Technologies}, year = {2012}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{GirschikofskyRosenbergerBelleetal.2012, author = {Girschikofsky, Maiko and Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Surface modifications of planar bragg grating refractive index sensors for gas detection}, series = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2012}, subject = {Bragg-Reflektor}, language = {en} } @article{PreuschRungHellmann2016, author = {Preusch, Florian and Rung, Stefan and Hellmann, Ralf}, title = {Influence of Polishing Orientation on the Generation of LIPSS on Stainless Steel}, series = {Journal of Laser Micro/Nanoengineering}, volume = {11}, journal = {Journal of Laser Micro/Nanoengineering}, doi = {10.2961/jlmn.2016.01.0025}, pages = {137 -- 142}, year = {2016}, subject = {Laserbearbeitung}, language = {en} } @article{RungBarthHellmann2014, author = {Rung, Stefan and Barth, Johannes and Hellmann, Ralf}, title = {Characterization of Laser Beam Shaping Optics Based on Their Ablation Geometry of Thin Films}, series = {Micromachines}, volume = {5}, journal = {Micromachines}, number = {4}, pages = {943 -- 953}, year = {2014}, abstract = {Thin film ablation with pulsed nanosecond lasers can benefit from the use of beam shaping optics to transform the Gaussian beam profile with a circular footprint into a Top-Hat beam profile with a rectangular footprint. In general, the quality of the transformed beam profile depends strongly on the beam alignment of the entire laser system. In particular, the adjustment of the beam shaping element is of upmost importance. For an appropriate alignment of the beam shaper, it is generally necessary to observe the intensity distribution near the focal position of the applied focusing optics. Systems with a low numerical aperture (NA) can commonly be qualified by means of laser beam profilers, such as a charge-coupled device (CCD) camera. However, laser systems for micromachining typically employ focus lenses with a high NA, which generate focal spot sizes of only several microns in diameter. This turns out to be a challenge for common beam profiling measurement systems and complicates the adjustment of the beam shaper strongly. In this contribution, we evaluate the quality of a Top-Hat beam profiling element and its alignment in the working area based on the ablated geometry of single pulse ablation of thin transparent conductive oxides. To determine the best achievable adjustment, we develop a quality index for rectangular laser ablation spots and investigate the influences of different alignment parameters, which can affect the intensity distribution of a Top-Hat laser beam profile.}, subject = {D{\"u}nne Schicht}, language = {en} } @inproceedings{JaegerRaedelBischoffetal.2014, author = {J{\"a}ger, Erwin and R{\"a}del, Ulrich and Bischoff, Christian and Umhofer, Udo and Rung, Stefan and Hellmann, Ralf}, title = {Laser micromachining - parallel processing with multiple top hat beams}, series = {8th International Conference on Photonic Technologies LANE 2014}, booktitle = {8th International Conference on Photonic Technologies LANE 2014}, year = {2014}, subject = {Laserbearbeitung}, language = {de} } @article{SommerGoetzendorferEsenetal.2021, author = {Sommer, David and G{\"o}tzendorfer, Babette and Esen, Cemal and Hellmann, Ralf}, title = {Design Rules for Hybrid Additive Manufacturing Combining Selective Laser Melting and Micromilling}, series = {Design and Post Processing for Metal Additive Manufacturing}, volume = {14}, journal = {Design and Post Processing for Metal Additive Manufacturing}, number = {19}, doi = {https://doi.org/10.3390/ma14195753}, pages = {1 -- 23}, year = {2021}, abstract = {We report on a comprehensive study to evaluate fundamental properties of a hybrid manufacturing approach, combining selective laser melting and high speed milling, and to characterize typical geometrical features and conclude on a catalogue of design rules. As for any additive manufacturing approach, the understanding of the machine properties and the process behaviour as well as such a selection guide is of upmost importance to foster the implementation of new machining concepts and support design engineers. Geometrical accuracy between digitally designed and physically realized parts made of maraging steel and dimensional limits are analyzed by stripe line projection. In particular, we identify design rules for numerous basic geometric elements like walls, cylinders, angles, inclinations, overhangs, notches, inner and outer radii of spheres, chamfers in build direction, and holes of different shape, respectively, as being manufactured by the hybrid approach and compare them to sole selective laser melting. While the cutting tool defines the manufacturability of, e.g., edges and corners, the milling itself improves the surface roughness to Ra < 2 µm. Thus, the given advantages of this hybrid process, e.g., space-resolved and custom-designed roughness and the superior geometrical accuracy are evaluated. Finally, we exemplify the potential of this particular promising hybrid approach by demonstrating an injection mold with a conformal cooling for a charge socket for an electro mobile}, subject = {Selektives Laserschmelzen}, language = {en} } @article{SommerPapeEsenetal.2022, author = {Sommer, David and Pape, Dominik and Esen, Cemal and Hellmann, Ralf}, title = {Tool Wear and Milling Characteristics for Hybrid Additive Manufacturing Combining Laser Powder Bed Fusion and In Situ High-Speed Milling}, series = {Ultra-Precision Manufacturing Technology for Difficult-to-Machine Materials}, volume = {15}, journal = {Ultra-Precision Manufacturing Technology for Difficult-to-Machine Materials}, number = {3}, doi = {https://doi.org/10.3390/ma15031236}, pages = {1 -- 13}, year = {2022}, abstract = {We report on milling and tool wear characteristics of hybrid additive manufacturing comprising laser powder bed fusion and in situ high-speed milling, a particular process in which the cutter mills inside the powder bed without any cooling lubricant being applicable. Flank wear is found to be the dominant wear characteristic with its temporal evolution over utilization period revealing the typical s-shaped dependence. The flank wear land width is measured by microscopy and correlated to the achievable surface roughness of milled 3D-printed parts, showing that for flank wear levels up to 100 μm a superior surface roughness below 3 μm is accessible for hybrid additive manufacturing. Further, based on this correlation recommended tool, life scenarios can be deduced. In addition, by optimizing the finishing tool start position and the number of afore-built layers, the milling process is improved with respect to the maximum millable angle for undercut surfaces of 3D-printed parts to 30° for the roughing process and to 40° for the entire machining process including finishing}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {de} } @article{RungHellmann2021, author = {Rung, Stefan and Hellmann, Ralf}, title = {Laser-Induced Period Surface Structures to Improve Solderability of Electrical Solder Pads}, series = {Applied Sciences}, volume = {2022}, journal = {Applied Sciences}, number = {12/1}, doi = {10.3390/app12010080}, pages = {80 -- 88}, year = {2021}, subject = {Laserstrahll{\"o}ten}, language = {en} } @article{RungHaeckerHellmann2021, author = {Rung, Stefan and H{\"a}cker, Niklas and Hellmann, Ralf}, title = {Thermal imaging of high power ultrashort pulse laser ablation of alumina towards temperature optimized micro machining strategies}, series = {IOP Conference Series: Materials Science and Engineering}, volume = {1135}, journal = {IOP Conference Series: Materials Science and Engineering}, number = {012027}, doi = {0.1088/1757-899X/1135/1/012027}, pages = {1 -- 9}, year = {2021}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Current results on laser-based production of complex optics in glass}, series = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, booktitle = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UKP-Prozess mit anschließendem CO2-Laserpolieren zur Fertigung komplexer Optiken}, series = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, booktitle = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, year = {2020}, subject = {Linse}, language = {en} } @misc{SchwarzHellmann2021, author = {Schwarz, Simon and Hellmann, Ralf}, title = {Rapid laser fabrication of complex glass optics}, series = {International Research Days}, journal = {International Research Days}, year = {2021}, abstract = {Poster}, subject = {Laserbearbeitung}, language = {en} } @article{SchleierAdelmannEsenetal.2021, author = {Schleier, Max and Adelmann, Benedikt and Esen, Cemal and Glatzel, Uwe and Hellmann, Ralf}, title = {Development and evaluation of an image processing algorithm for monitoring fiber laser fusion cutting by a high-speed camera}, series = {Journal of Laser Applications}, volume = {2021}, journal = {Journal of Laser Applications}, number = {33}, doi = {10.2351/7.0000391}, pages = {032004 -- 032004}, year = {2021}, subject = {Faserlaser}, language = {en} } @article{AdelmannHellmann2021, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Simultaneous Burr and Cut Interruption Detection during Laser Cutting with Neural Networks}, series = {Sensors}, volume = {2021}, journal = {Sensors}, number = {21}, doi = {10.3390/s21175831}, pages = {5831 -- 5831}, year = {2021}, subject = {Laserschneiden}, language = {en} } @article{AdelmannSchleierHellmann2021, author = {Adelmann, Benedikt and Schleier, Max and Hellmann, Ralf}, title = {Laser Cut Interruption Detection from Small Images by Using Convolutional Neural Network}, series = {Sensors}, volume = {2021}, journal = {Sensors}, number = {21(2)}, doi = {10.3390/s21020655}, pages = {655 -- 655}, year = {2021}, subject = {Laserschneiden}, language = {en} } @article{ZettlRungEsenetal.2021, author = {Zettl, Julian and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Tangential Laser Turning of Fused Silica Using Ultra-short Laser Pulses}, series = {Journal of Laser Micro/Nanoengineering}, volume = {16}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, doi = {10.2961/jlmn.2021.01.2008}, pages = {42 -- 46}, year = {2021}, abstract = {Laser turning with ultra-short laser pulses provides the possibility of manufacturing rotationally symmetric geometries, even of hard to machine materials as fused silica, down to a micrometer scale. In this laser micro machining approach, the laser beam is oriented perpendicularly to the rotational axis and tangentially to the material, whereas the target geometry is realized by moving the constantly rotating specimen according to the specified geometry under the focused laser spot. Due to the fric-tion-less laser ablation it is possible to realize a turning process in fused silica without the use of a contacting tool and therefore without causing mechanical tensions in the work piece. The processing head focuses the laser to a calculated spot size of 18 μm in diameter and the applied processing gas pressure assists in removing the ablated material. In this study, femto-second laser turning of fused silica with a diameter of 3.7 mm is investigated. The influence of the applied pulse energy is stated and the use of a trepanning optic during the turning process is characterized. Furthermore, compre-hensive parameter studies in order to optimize roughness and to find the maximum achievable abla-tion rate are shown. Limited by the mechanical speed of the rotational axis, the highest feasible abla-tion rate is 19.5 mm³/min. A roughness of Ra 0.65 μm are demonstrated.}, subject = {Laserbearbeitung}, language = {en} } @article{ZettlKlarRungetal.2021, author = {Zettl, Julian and Klar, Maximilian and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Laser turning with ultrashort laser pulses}, series = {Journal of Manufacturing Processes}, volume = {2021}, journal = {Journal of Manufacturing Processes}, number = {68}, doi = {10.1016/j.jmapro.2021.06.025}, pages = {1562 -- 1568}, year = {2021}, abstract = {We report on a comprehensive micromachining study of rotationally symmetric parts using femtosecond laser. A laser turning process with tangential impingement of the laser radiation complemented by a trepanning optics is implemented as to accomplish a true laser lathe micromachining approach. With the objective of optimized ablation rate and reduced surface roughness, the influence of pulse energy, feed rate, trepanning diameter and angular beam incidence, respectively, is investigated for processing stellite rods. We find the smallest feasible feature sizes of 8.5 μm in diameter and smoothest surfaces with an arithmetic average of the roughness profile as low as 0.18 μm. The surface roughness, however, appears to be limited by the occurrence of laser induced periodic surface structures provoked by the femtosecond laser radiation. Furthermore, the variation of the fluence in accordance to the incidence on a curved surface is discussed and the heat input into the material is examined through a longitudinal cross section.}, subject = {Ultrakurzer Lichtimpuls}, language = {en} } @article{GoetzendorferMohrHellmann2020, author = {G{\"o}tzendorfer, Babette and Mohr, Thomas and Hellmann, Ralf}, title = {Hybrid Approaches for Selective Laser Sintering by Building on Dissimilar Materials}, series = {Materials}, volume = {2020}, journal = {Materials}, number = {13 (22)}, doi = {doi.org/10.3390/ma13225285}, pages = {5285 -- 5296}, year = {2020}, subject = {Laserstrahlsintern}, language = {en} } @article{GoetzendorferKirchgaessnerHellmann2021, author = {G{\"o}tzendorfer, Babette and Kirchg{\"a}ssner, Hannah and Hellmann, Ralf}, title = {Tunable, Anisotropic Permeability and Spatial Flow of SLM Manufactured Structures}, series = {Materials}, volume = {2021}, journal = {Materials}, number = {14}, doi = {doi.org/10.3390/ma14185205}, pages = {5205 -- 5220}, year = {2021}, subject = {Permeabilit{\"a}t}, language = {en} } @article{SchwarzRungEsenetal.2021, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Enhanced ablation efficiency using GHz bursts in micromachining fused silica}, series = {Optics Letters}, volume = {46}, journal = {Optics Letters}, number = {2}, pages = {282 -- 285}, year = {2021}, subject = {Fr{\"a}sen}, language = {de} } @article{SchwarzGoetzendorferRungetal.2021, author = {Schwarz, Simon and G{\"o}tzendorfer, Babette and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Compact Beam Homogenizer Module with Laser-Fabricated Lens-Arrays}, series = {applied sciences}, volume = {2021}, journal = {applied sciences}, number = {11}, pages = {1018 -- 1018}, year = {2021}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2021, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Ultrashort pulsed laser backside ablation of fused silica}, series = {Optics Express}, volume = {29}, journal = {Optics Express}, number = {15}, pages = {23477 -- 23486}, year = {2021}, subject = {Femtosekundenlaser}, language = {de} } @inproceedings{SauerKeferRuppertetal.2019, author = {Sauer, Theresia and Kefer, Stefan and Ruppert, Wolfgang and Hellmann, Ralf and Kaloudis, Michael}, title = {Integration of Bragg grating sensors in components made of carbon fiber reinforced polymers}, series = {Tagungsband der 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019, 25.06.2019 - 26.06.2019, N{\"u}rnberg, Deutschland}, booktitle = {Tagungsband der 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019, 25.06.2019 - 26.06.2019, N{\"u}rnberg, Deutschland}, isbn = {978-3-9819376-0-2}, doi = {10.5162/sensoren2019/P3.12}, pages = {806 -- 810}, year = {2019}, abstract = {This contribution discusses the integration of polymer planar Bragg grating sensors (PPBG) into carbon fiber reinforced polymer (CFRP) components. For the first time, it is shown that PPBGs based on cyclic olefin copolymers can be integrated into commercial-grade composites, thereby withstanding the demanding production processes. Pre-impregnated fibers are stacked and partially modified to form a sensor pocket. Afterwards, the CFRP specimen containing the optical sensor is cured in a heated mechanical press for 2 hours at a pressure of 7 bar and a temperature of 120 °C. A subsequent evalutaion of the sensor signal shows a Bragg wavelength shift of 1236 pm and a decline in signal amplitude of -2 dB. Three-point flexural tests of the cured sample reveal a linear behavior of the sensor signal towards external loads. The determined sensitivity in dependence of the CFRP specimen's maximum central deflection is -112 pm/mm, while correlation to the applied force results in a sensitivity of -5 pm/N.}, subject = {Bragg-Reflektor}, language = {en} } @article{RungBokanKleinwortetal.2019, author = {Rung, Stefan and Bokan, Kevin and Kleinwort, Frederick and Schwarz, Simon and Simon, Peter and Klein-Wiele, Jan-Hendrik and Esen, Cemal and Hellmann, Ralf}, title = {Possibilities of Dry and Lubricated Friction Modification Enabled by Different Ultrashort Laser-Based Surface Structuring Methods}, series = {Lubricants}, volume = {7}, journal = {Lubricants}, number = {43}, doi = {10.3390/lubricants7050043}, pages = {1 -- 13}, year = {2019}, abstract = {In this contribution we report on the possibilities of dry and lubricated friction modification introduced by different laser surface texturing methods. We compare the potential of Laser-Induced Periodic Surface Structures and Laser Beam Interference Ablation on 100Cr6 steel in a linear reciprocating ball-on-disc configuration using 100Cr6 steel and tungsten carbide balls with load forces between 50mN and 1000 mN. For dry friction, we find a possibility to reduce the coefficient of friction and we observe a pronounced direction dependency for surfaces fabricated by Laser Beam Interference Ablation. Furthermore, Laser-Induced Periodic Surface Structures result in a load-dependent friction reduction for lubricated linear reciprocating movements. This work helps to identify the modification behaviour of laser generated micro structures with feature sizes of approximately 1μm and reveals new possibilities for surface engineering}, subject = {Laser}, language = {en} } @article{RungBokanRutschetal.2018, author = {Rung, Stefan and Bokan, Kevin and Rutsch, Kevin and Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Laser Induced Periodic Surface Structures on 100Cr6 Steel for Modification of Friction Demonstrated with Stribeck Test}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, doi = {10.2961/jlmn.2018.03.0004}, pages = {160 -- 165}, year = {2018}, abstract = {In this contribution, we report on surface functionalization by introducing laser induced periodic surface structures on 100Cr6 bearing steel to modify complex tribological properties. The advanced approach of this study is the measurement of the coefficient of friction by performing a ball-on-disk Stribeck test on laser structured surfaces with polytetrafluoroethylene balls in a lubricant environment. The Stribeck test reveals the modified friction behavior using translation speeds up to 106 mm/min and load forces between 100 mN and 5000 mN. Our results show increased stiction and coefficient of friction for laser structured surfaces in the regime of boundary lubrication which is attributed to the laser induced surface asperities. Decreased coefficient of friction is observed in the regime of mixed and hydrodynamic lubrication, i.e. for velocities higher than 1000 mm/min, for surfaces covered by laser induced periodic surface structures with low spatial frequency.}, subject = {Laser}, language = {en} } @article{SchwarzRungHellmann2016, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {Generation of laser-induced periodic surface structures on transparent material-fused silica}, series = {Applied Physics Letters}, volume = {108}, journal = {Applied Physics Letters}, number = {18}, pages = {181607 -- 181607}, year = {2016}, subject = {Laser}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Fabrication of a high-quality axicon by femtosecond laser ablation and CO2 laser polishing for quasi-Bessel beam generation}, series = {Optics Express}, volume = {26}, journal = {Optics Express}, number = {18}, pages = {23287 -- 23294}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungHellmann2017, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {One-dimensional low spatial frequency LIPSS with rotating orientation on fused silica}, series = {Applied Surface Science}, volume = {2017}, journal = {Applied Surface Science}, number = {411}, pages = {113 -- 116}, year = {2017}, subject = {Quarzglas}, language = {en} } @article{SchwarzHellmann2017, author = {Schwarz, Simon and Hellmann, Ralf}, title = {Fabrication of Cylindrical Lenses by Combining Ultrashort Pulsed Laser and CO2 Laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {12}, journal = {Journal of Laser Micro/Nanoengineering}, number = {2}, pages = {76 -- 79}, year = {2017}, subject = {Zylinderlinse}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Influence of pulse duration on high-precision manufacturing of 3D geometries}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, pages = {292 -- 295}, year = {2018}, subject = {Dreidimensionale Geometrie}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Homogeneous low spatial frequency LIPSS on dielectric materials generated by beam-shaped femtosecond pulsed laser irradiation}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {2}, pages = {90 -- 94}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Rapid fabrication of precise glass axicon arrays by an all laser-based manufacturing technology}, series = {Journal of Laser Applications}, volume = {32}, journal = {Journal of Laser Applications}, number = {1}, pages = {012001 -- 012001}, year = {2020}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Surface Plasmon Polariton Triggered Generation of 1D-Low Spatial Frequency LIPSS on Fused Silica}, series = {Applied Sciences}, volume = {8}, journal = {Applied Sciences}, number = {9}, pages = {1624 -- 1624}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{TrautmannRothNujiqietal.2019, author = {Trautmann, Anika and Roth, Gian-Luca and Nujiqi, Benedikt and Walter, Thomas and Hellmann, Ralf}, title = {Towards a versatile point-of-care system combining femtosecond laser generated microfluidic channels and direct laser written microneedle arrays}, series = {Microsystems \& Nanoengineering}, volume = {5}, journal = {Microsystems \& Nanoengineering}, number = {6}, pages = {1 -- 9}, year = {2019}, abstract = {Microneedle-based microfluidic systems have a great potential to become well-accepted medical devices for simple, accurate, and painless drug delivery and lab-on-a-chip diagnostics. In this work, we report on a novel hybrid approach combining femtosecond direct laser written microneedles with femtosecond laser generated microfluidic channels providing an important step towards versatile medical point-of-care systems. Hollow microneedle arrays are fabricated by a laser system designed for two-photon polymerization applications. Compression tests of two different types of truncated cone-shaped microneedle arrays prepared from OrmoComp® give information about the microneedle mechanical strength, and the results are compared to skin insertion forces. Three-dimensional microchannels are directly created inside PMMA bulk material by an ultrashort pulse laser system with vertical channels having adjustable cross-sectional areas, which allow attaching of microneedles to the microfluidic system. A comprehensive parameter study varying pulse duration and repetition rate is performed on two-photon polymerization to identify an optimal laser power range for fabricating microneedles using the same pulse duration and repetition rate as for microchannels. This addresses the advantage of a single laser system process that overcomes complex fabrication methods. A proof of concept flow test with a rhodamine B dye solution in distilled water demonstrates that the combination of microneedles and microchannels qualifies for microfluidic injection and extraction applications.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2018, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Control of femtosecond laser generated microfluidic channels inside poly (methyl methacrylate)}, series = {Journal of Laser Applications}, volume = {30}, journal = {Journal of Laser Applications}, number = {3}, pages = {032016-1 -- 032016-6}, year = {2018}, abstract = {In this study, the authors report on femtosecond laser direct generation of microchannels inside poly(methyl methacrylate) with variable dimensions ranging from a channel height of 20 to 350 μm and an aspect ratio down to 1.2. Focused ultrashort laser pulses are used to trigger a material modification in the focal area which can be selectively opened by a subsequent annealing process. A 3D microchannel architecture can easily be realized by moving the specimen using motorized stages, allowing freely chosen complex shaped channel layouts. While the laser wavelength is identified as one of the main parameters determining process effectiveness, another core of this study is the variation of channel dimensions by the numerical aperture of the applied objective to focus the laser. The authors find that both size and shape of the modified region and the resulting microchannel can be controlled by altering the numerical aperture.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothAdelmannHellmann2015, author = {Roth, Gian-Luca and Adelmann, Benedikt and Hellmann, Ralf}, title = {Cutting and Drilling of SiC Semiconductor by Fiber Laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {10}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, pages = {279 -- 283}, year = {2015}, abstract = {We present an experimental study on fiber laser micromachining of 4H-SiC semiconductor. In particular, we optimize the process time for percussion drilling of 440 µm and 330 µm thick wafers with a minimum drilling time of, eg, 7.5 ms being achieved for 330 µm thick wafers. The drilled holes are characterized by a low taper, a high circularity and entry diameters of about 60 µm. For laser cutting, effective cutting speeds of 2 mm/s and 0.63 mm/s are obtained for 330 µm and 440 µm wafer thickness, respectively, with the cut kerf width being 65 µm. Both processes are associated with a good quality that is characterized by no chipping and cracks. The capability of the fiber laser based micromachining process is highlighted by cutting complex micrometer scale inner and outer contours into partially metallized SiC wafers with high quality.}, subject = {Laserschneiden}, language = {en} } @article{RothEsenHellmann2019, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Circular microchannels inside bulk polymethylmethacrylate generated by femtosecond laser using slit beam shaping}, series = {Journal of Laser Applications}, volume = {31}, journal = {Journal of Laser Applications}, number = {2}, pages = {022603-1 -- 022603-5}, year = {2019}, abstract = {The authors report on the laser generation of three-dimensional microchannel architectures with fundamentally unlimited channel length by focused 514 nm femtosecond laser pulses inside polymethylmethacrylate bulk material. The three-dimensional channel layout is implemented by moving the specimen using three-dimensional motorized stages, allowing freely chosen complex shaped channel architectures. Based on nonlinear absorption of high intensities around the focal volume, a material modification, including a refractive-index shift is triggered. After laser exposure, the channel is created by a gaseous degradation of exposed areas during an annealing process. Cross section and aspect ratio of thus generated microchannels are strongly influenced by the numerical aperture of the applied objective. To obtain a circular cross-sectional shape, high focusing objectives are necessary. In this report, the authors improve the existing setup by using an elliptical input beam, transforming the intensity distribution of the focal area in the propagation direction to a circular shape even for low and medium numerical aperture focusing objectives and therefore avoiding a small working distance as a limiting factor for processing depth. The elliptical input beam is obtained by insertion of a slit mask in front of the focusing objective. The ellipticity of the incident beam defines the aspect ratio of the generated microchannels. Furthermore, the size of internal microchannels is adjustable by varying laser and annealing process parameters.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2018, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Vertical Microchannels for Microfluidic Multilayer Interconnections in PMMA}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, pages = {155 -- 159}, year = {2018}, abstract = {We report on laser generation of microchannels by focused femtosecond laser pulses inside PMMA bulk material. This process enables direct fabrication of three dimensional microfluidic channel architectures with generally unlimited channel length. Based on nonlinear ultrashort pulse laser absorption of high intensities around the focal volume, a material modification including a refractive index shift is triggered. After laser exposure the channel is created by a gaseous degradation of exposed areas during an annealing process. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stages, allowing freely chosen complex shaped channel architectures. In this report, the creation of inner lying vertical microchannels is examined. In addition to previously shown horizontal channel architectures vertical channels are necessary to fulfill the definition of an internal three-dimensional microfluidic structure and to create interconnections in multilevel lab on chip devices. The cross section and geometry of vertical channels are strongly influenced by laser parameters such as pulse duration, laser power and writing speed. The influence of these process parameters on the channels diameter is determined and parameters are optimized regarding a controllable, stable and reproducible process. The functionality of vertical microchannels as an interconnection between multilayer microfluidic devices is demonstrated using a Rhodamine B solution.}, subject = {Polymethylmethacrylate}, language = {en} }