@article{HeilmannHellmannSeidl2011, author = {Heilmann, Eva-Maria and Hellmann, Ralf and Seidl, Albrecht}, title = {Water Jet Guided Laser Cutting of Silicon Thin Films Using 515nm Disc Laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {6}, journal = {Journal of Laser Micro/Nanoengineering}, number = {2}, pages = {168}, year = {2011}, subject = {Laserschneiden}, language = {en} } @article{HeilmannKowalskiHellmannetal.2013, author = {Heilmann, Eva-Maria and Kowalski, Thomas and Hellmann, Ralf and Teigelk{\"o}tter, Johannes}, title = {Water Jet Guided Laser Cutting of High Temperature Superconductors}, series = {Journal of Laser Micro/Nanoengineering}, volume = {8}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, doi = {10.2961/jlmn.2013.01.0014}, pages = {70 -- 74}, year = {2013}, subject = {Laserschneiden}, language = {en} }