@article{HuernerSchlegelAdelmannetal.2013, author = {H{\"u}rner, Andreas and Schlegel, Tobias and Adelmann, Benedikt and Mitlehner, Heinz and Hellmann, Ralf and Bauer, Anton and Frey, Lothar}, title = {Alloying of Ohmic Contacts to n-type 4H-SiC via Laser Irradiation}, series = {Materials Science Forum}, volume = {740-742}, journal = {Materials Science Forum}, pages = {773 -- 776}, year = {2013}, subject = {Ohm-Kontakt}, language = {de} } @article{AdelmannHuernerSchlegeletal.2013, author = {Adelmann, Benedikt and H{\"u}rner, Andreas and Schlegel, Tobias and Bauer, Anton and Frey, Lothar and Hellmann, Ralf}, title = {Laser Alloying Nickel on 4H-Silicon Carbide Substrate to Generate Ohmic Contacts}, series = {Journal of Laser Micro/Nanoengineering}, volume = {8}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, pages = {97 -- 101}, year = {2013}, subject = {Ohm-Kontakt}, language = {en} }