@article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Homogeneous low spatial frequency LIPSS on dielectric materials generated by beam-shaped femtosecond pulsed laser irradiation}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {2}, pages = {90 -- 94}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Rapid fabrication of precise glass axicon arrays by an all laser-based manufacturing technology}, series = {Journal of Laser Applications}, volume = {32}, journal = {Journal of Laser Applications}, number = {1}, pages = {012001 -- 012001}, year = {2020}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Surface Plasmon Polariton Triggered Generation of 1D-Low Spatial Frequency LIPSS on Fused Silica}, series = {Applied Sciences}, volume = {8}, journal = {Applied Sciences}, number = {9}, pages = {1624 -- 1624}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2018, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Control of femtosecond laser generated microfluidic channels inside poly (methyl methacrylate)}, series = {Journal of Laser Applications}, volume = {30}, journal = {Journal of Laser Applications}, number = {3}, pages = {032016-1 -- 032016-6}, year = {2018}, abstract = {In this study, the authors report on femtosecond laser direct generation of microchannels inside poly(methyl methacrylate) with variable dimensions ranging from a channel height of 20 to 350 μm and an aspect ratio down to 1.2. Focused ultrashort laser pulses are used to trigger a material modification in the focal area which can be selectively opened by a subsequent annealing process. A 3D microchannel architecture can easily be realized by moving the specimen using motorized stages, allowing freely chosen complex shaped channel layouts. While the laser wavelength is identified as one of the main parameters determining process effectiveness, another core of this study is the variation of channel dimensions by the numerical aperture of the applied objective to focus the laser. The authors find that both size and shape of the modified region and the resulting microchannel can be controlled by altering the numerical aperture.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2019, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Circular microchannels inside bulk polymethylmethacrylate generated by femtosecond laser using slit beam shaping}, series = {Journal of Laser Applications}, volume = {31}, journal = {Journal of Laser Applications}, number = {2}, pages = {022603-1 -- 022603-5}, year = {2019}, abstract = {The authors report on the laser generation of three-dimensional microchannel architectures with fundamentally unlimited channel length by focused 514 nm femtosecond laser pulses inside polymethylmethacrylate bulk material. The three-dimensional channel layout is implemented by moving the specimen using three-dimensional motorized stages, allowing freely chosen complex shaped channel architectures. Based on nonlinear absorption of high intensities around the focal volume, a material modification, including a refractive-index shift is triggered. After laser exposure, the channel is created by a gaseous degradation of exposed areas during an annealing process. Cross section and aspect ratio of thus generated microchannels are strongly influenced by the numerical aperture of the applied objective. To obtain a circular cross-sectional shape, high focusing objectives are necessary. In this report, the authors improve the existing setup by using an elliptical input beam, transforming the intensity distribution of the focal area in the propagation direction to a circular shape even for low and medium numerical aperture focusing objectives and therefore avoiding a small working distance as a limiting factor for processing depth. The elliptical input beam is obtained by insertion of a slit mask in front of the focusing objective. The ellipticity of the incident beam defines the aspect ratio of the generated microchannels. Furthermore, the size of internal microchannels is adjustable by varying laser and annealing process parameters.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2018, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Vertical Microchannels for Microfluidic Multilayer Interconnections in PMMA}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, pages = {155 -- 159}, year = {2018}, abstract = {We report on laser generation of microchannels by focused femtosecond laser pulses inside PMMA bulk material. This process enables direct fabrication of three dimensional microfluidic channel architectures with generally unlimited channel length. Based on nonlinear ultrashort pulse laser absorption of high intensities around the focal volume, a material modification including a refractive index shift is triggered. After laser exposure the channel is created by a gaseous degradation of exposed areas during an annealing process. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stages, allowing freely chosen complex shaped channel architectures. In this report, the creation of inner lying vertical microchannels is examined. In addition to previously shown horizontal channel architectures vertical channels are necessary to fulfill the definition of an internal three-dimensional microfluidic structure and to create interconnections in multilevel lab on chip devices. The cross section and geometry of vertical channels are strongly influenced by laser parameters such as pulse duration, laser power and writing speed. The influence of these process parameters on the channels diameter is determined and parameters are optimized regarding a controllable, stable and reproducible process. The functionality of vertical microchannels as an interconnection between multilayer microfluidic devices is demonstrated using a Rhodamine B solution.}, subject = {Polymethylmethacrylate}, language = {en} } @inproceedings{RothEsenHellmann2020, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Internal micro structuring of transparent optical polymers by fs laser}, series = {Laser-based Micro-and Nanoprocessing XIV 2020}, volume = {11268}, booktitle = {Laser-based Micro-and Nanoprocessing XIV 2020}, publisher = {International Society for Optics and Photonics}, doi = {10.1117/12.2543487}, pages = {112681L}, year = {2020}, abstract = {Lab-on-chip systems are based on components to transport, mix, separate and analyse small volumes of different fluids. The consecutive integration of more complex functions into a single and compact chip demands on multilayer systems. As the classical production using a stacking and joining of single processed layers is elaborate and limited in terms of multilayer structures, an uprising trend to fabricate those devices is the internal, three dimensional processing of transparent substrates by using ultrashort laser pulses. In this study, we report on the generation of internal hollow architectures created by focused 514nm femtosecond laser pulses inside optical polymer bulk materials of different polymers. The three-dimensional channel layout is implemented by moving the sample using three-dimensional motorized stages, allowing arbitrary complex shaped internal channel architectures. Size and cross sectional shape of a single internal generated microchannel are determined by the intensity distribution of the focal voxel. In particular, we show a comprehensive parameter study to improve this laser process with respect to a higher processing speed and stability.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothRungEsenetal.2020, author = {Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Microchannels inside bulk PMMA generated by femtosecond laser using adaptive beam shaping}, series = {Optics Express}, volume = {28}, journal = {Optics Express}, number = {4}, pages = {5801 -- 5811}, year = {2020}, abstract = {In this contribution, we report on the generation of internal microchannels with basically unlimited channel length inside of PMMA bulk material by femtosecond laser. A precisely controllable and stable circular channel cross section is obtained by using a spatial light modulator to compensate the writing depth depending spherical aberration. Furthermore, the generation of a rotatable elliptical input beam by adaptive optics ensures a fitting of the beam shaping to the writing direction. In this study, we report on both, the effect of the ellipticity of the input beam and the effect of a correction of the spherical aberration on the circularity of the resulting internal microchannels. Moreover, we demonstrate the application of this writing technique by creating microfluidic testing structures inside of a transparent standard polymer.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2019, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {A New Approach to Seal Polymer Microfluidic Devices Using Ultrashort Laser Pulses}, series = {Journal of Laser Micro/Nanoengineering}, volume = {14}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, pages = {49 -- 53}, year = {2019}, abstract = {We report on the joining of two different transparent thermoplastic polymers using infrared femtosecond laser pulses. Solely being based on nonlinear absorption, the developed micro-welding process for cyclo-olefin copolymers and polycarbonate does not require any intermediate absorbing layers or any surface pre-processing of the welding partners. In addition, it circumvents any heat damages at the outer surfaces of the welding partners. Femtosecond laser welding of cyclo-olefin copolymers is improved by increasing the numerical aperture of the focusing setup resulting in a wider and more homogenous welding cross-section. Welding results are classified by shear strength and fracture modes are analyzed using scanning electron microscopy. Furthermore, we demonstrate, to the best of our knowledge, first results of ultrashort pulse laser welding of transparent polycarbonate, one of the most used transparent polymers. In view of an optimized and stable micro-welding process, we study the influence of laser power and focal position on welding results. The application of ultrashort pulse laser welding for Lab-on-chip fabrication technologies is demonstrated by sealing an ultrashort pulse laser ablated microfluidic device based on a transparent polymer substrate.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{RothWolfEsenetal.2019, author = {Roth, Gian-Luca and Wolf, Bastian and Esen, Cemal and Hellmann, Ralf}, title = {Generation of internal 3D microfluidic architectures in polymers by fs laser processing}, series = {Lasers in Manufacturing 2019}, booktitle = {Lasers in Manufacturing 2019}, year = {2019}, abstract = {Microfluidic lab on chip systems require components to transport, mix, separate and analyse small volumes of different fluids. In this study, we report on the laser generation of internal hollow architectures created by focused 514 nm femtosecond laser pulses inside PMMA bulk material. Size and cross-sectional shape of a single internal generated microchannel are determined by the intensity distribution inside the focal voxel and can be controlled either by the numerical aperture of the focusing objective or by laser beam shaping. As both approaches are practically limited with respect to the realizable cross-sectional shapes, we present a process based on an internal hatching to expand the achievable channel cross-sections and thereby enable the possibility to create complex 3D shaped internal structures. This process is applied to create fully internal functional microfluidic elements such as mixers which are part of most polymer lab-on-chip systems.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2018, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Laser beam microwelding of transparent plastics}, series = {Joining Plastics}, volume = {12}, journal = {Joining Plastics}, number = {3/4}, pages = {2 -- 8}, year = {2018}, abstract = {The laser beam welding of transparent plastic components is still a challenge according to the state of the art. A new approach for the joining of two transparent polymeric components using ultrashort laser beam pulses is presented in this report. In this respect, the high peak pulse intensity associated with these lasers permits non-linear absorption processes and thus the production of a locally well-defined heat source in the interior even of a transparent material or at the boundary layer between two transparent substrates. Welding results for transparent plastics of the cycloolefin copolymer and polycarbonate types are shown in this study. In addition to the investigation into the influences of fundamental process parameters on the weld geometry, the leak tightness is demonstrated in this study using a microfluidic system.}, subject = {Laserschweißen}, language = {en} } @article{RothEsenHellmann2017, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Femtosecond laser direct generation of 3D-microfluidic channels inside bulk PMMA}, series = {Optics Express}, volume = {25}, journal = {Optics Express}, number = {15}, pages = {18442 -- 18450}, year = {2017}, abstract = {We report on laser direct generation of 3D-microchannels for microfluidic applications inside PMMA bulk material by focused femtosecond pulses. Inner lying channels with cross sectional areas from 100 µm2 to 4400 µm2 are directly created in the volume of a PMMA substrate. Using the presented process, the channel length is fundamentally unlimited. Here we demonstrate a channel length of 6 meters inside a substrate with dimensions of 20 × 20 × 1.1 mm. The formation of the micro channels is based on nonlinear absorption around the focal volume that triggers a material modification. The modified volume can be selectively opened to form the channel by a subsequent annealing process. The cross section of the channel is strongly influenced by the energy distribution and illumination around the focal volume determined by the optical setup and process design. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stage, allowing freely chosen complex shaped channel architectures. Within a comprehensive parameter study, varying laser power, number of multi-passes, writing speed and writing depths, we identify an optimized process in terms of attainable channel height, width and aspect ratio, as well as process stability and reproducibility. The proof of concept for an application in three dimensional microfluidic systems is provided by florescence microscopy using a dye rhodamine B solution in isopropanol.}, subject = {Femtosekundenlaser}, language = {en} } @article{RungBokanSchwarzetal.2020, author = {Rung, Stefan and Bokan, Kevin and Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Influence of laser wavelength on the modification of friction between 100Cr6 steel and polytetrafluoroethylene by femtosecond laser-induced periodic surface structures}, series = {Journal of Laser Applications}, volume = {32}, journal = {Journal of Laser Applications}, number = {3}, doi = {10.2351/7.0000036}, pages = {032017-1 -- 032017-6}, year = {2020}, subject = {Femtosekundenlaser}, language = {en} } @article{RothHesslerKeferetal.2020, author = {Roth, Gian-Luca and Hessler, Steffen and Kefer, Stefan and Girschikofsky, Maiko and Esen, Cemal and Hellmann, Ralf}, title = {Femtosecond laser inscription of waveguides and Bragg gratings in transparent cyclic olefin copolymers}, series = {Optics Express}, volume = {28}, journal = {Optics Express}, number = {12}, doi = {10.1364/OE.388364}, pages = {18077 -- 18084}, year = {2020}, abstract = {We report on a femtosecond laser based fabrication technique that enables simultaneous single-step generation of optical waveguides and Bragg gratings inside bulk cyclic olefin copolymers. Due to the nonlinear absorption of focused and spatially modulated laser radiation with a wavelength of 514 nm and a pulse duration of 450 fs, a modification concluding a refractive index shift increase inside the substrate can be achieved. A sophisticated characterization of the generated waveguides by means of an elaborate cut-back method reveals a maximum attenuation of 3.2 dB/cm. Additionally, a Mach-Zehnder interferometer is used to examine the waveguide's refractive index profile. The integrated Bragg grating structures exhibit reflectivities up to 95 \% and a spectral full width at half maximum of 288 pm, at a Bragg wavelength of 1582 nm, whereas the grating period can be deliberately chosen by adapting the fabrication parameters. Thus, due to its increased flexibility and the resulting dispensability of cost-intensive phase masks, this method constitutes an especially promising fabrication process for polymer Bragg gratings inside of bulk materials.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothHaubnerKeferetal.2020, author = {Roth, Gian-Luca and Haubner, Julian and Kefer, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Fs-laser based hybrid micromachining for polymer micro-opto electrical systems}, series = {Optics and Lasers in Engineering}, volume = {137}, journal = {Optics and Lasers in Engineering}, number = {10362}, doi = {10.1016/j.optlaseng.2020.106362}, pages = {1 -- 8}, year = {2020}, abstract = {We report on femtosecond laser direct writing of electrically conductive copper structures on transparent cyclic olefin copolymer based planar optical chips. The process is based on a laser-induced reduction of CuO nanoparticles dissolved in a water-soluble resin. Thus generated conductive copper structures are characterized with respect to their chemical composition and electrical resistivity. In addition, the application of ultrashort laser pulses enables a hybrid micromachining approach comprising ablation of polymer substrates and the fabrication of copper patterns in a single laser processing setup. A possible electro-optical application of this approach is demonstrated by employing the copper structures as an electro-thermal microheater in combination with a polymer planar optical Bragg grating sensor. This, in turn, highlights the potential of generating copious micro-opto-electro-mechanical polymer structures for numerous sensing applications ranging from Lab-on-Chip to environmental applications using the presented hybrid micromachining approach.}, subject = {Femtosekundenlaser}, language = {en} } @article{SchwarzRothRungetal.2020, author = {Schwarz, Simon and Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Fabrication and evaluation of negative axicons for ultrashort pulsed laser applications}, series = {Optics Express}, volume = {Optics Express}, journal = {Optics Express}, number = {28}, pages = {26207 -- 26217}, year = {2020}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Manufacturing of optical elements by non-contact laser processing}, series = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, booktitle = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, number = {11478}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @article{ZettlKlarEsenetal.2020, author = {Zettl, Julian and Klar, Maximilian and Esen, Cemal and Hellmann, Ralf}, title = {Generation of Rotationally Symmetric Micro Tools using Ultrashort Laser Pulses}, series = {Journal of Laser Micro/Nanoengeneering}, volume = {15}, journal = {Journal of Laser Micro/Nanoengeneering}, number = {2}, doi = {10.2961/jlmn.2020.02.2007}, pages = {118 -- 122}, year = {2020}, abstract = {We report on the fabrication of rotationally symmetrical geometries with ultrashort laser pulses impinging the constant rotating workpiece tangentially. This particular micro machin-ing of geometry is referred to as laser turning, upon which the laser beam is, in general, orient-ed perpendicularly to the rotational axis and tangentially to the work piece. The target geome-try is realized by moving the constantly rotating specimen according to the specified geometry along the focused laser spot. In contrast to mechanical turning, laser turning induces a mini-mized amount of lateral forces through friction that might deteriorate the geometry. In this study, laser turning is examined for stellite as a function of pulse energy and pulse length in the range between 240 fs and 10 ps. Shorter pulse lengths and higher pulse energies increase the achievable ablation rate, while in the pulse length regime of below 1 ps lower roughness is achieved. With a maximum ablation rate of 1.27 mm³/min and a minimum roughness of 0.17 µm, laser turning combines both, fast processing and high surface quality.}, subject = {Ultrakurzzeitlaser}, language = {en} } @article{SchleierAdelmannEsenetal.2017, author = {Schleier, Max and Adelmann, Benedikt and Esen, Cemal and Hellmann, Ralf}, title = {Cross-correlation-based algorithm for monitoring laser cutting with high-power fiber lasers}, series = {IEEE Sensors Journal}, volume = {18}, journal = {IEEE Sensors Journal}, number = {4}, doi = {10.1109/JSEN.2017.2783761}, pages = {1585 -- 1590}, year = {2017}, subject = {Laserschneiden}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {All laser-based fabrication of optical elements}, series = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, booktitle = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, year = {2020}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{SchwarzEsenHellmann2018, author = {Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {CO2 laser polishing of femtosecond shaped micro-optical components}, series = {3rd Conference on Laser Polishing LaP 2018}, booktitle = {3rd Conference on Laser Polishing LaP 2018}, year = {2018}, subject = {Kohlendioxidlaser}, language = {en} } @inproceedings{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Axicon fabrication with ultrashort and CO2 laser}, series = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, booktitle = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, year = {2018}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{SchwarzEsenHellmann2018, author = {Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Homogeneous low spatial frequency LIPSS on dielectrics generated by beam-shaped femtosecond pulsed laser irradiation}, series = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, booktitle = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @article{LutzRothRungetal.2021, author = {Lutz, Christian and Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Efficient Ultrashort Pulsed Laser Processing by Dynamic Spatial Light Modulator Beam Shaping for Industrial Use}, series = {Journal of Laser Micro/Nanoengineering}, volume = {16}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, doi = {10.2961/jlmn.2021.01.2011}, pages = {1 -- 6}, year = {2021}, abstract = {We report on the effect of different transversal beam shapes on the efficiency of ablation processes and the resulting surface characteristics. A possibility to efficiently apply ultrashort pulsed lasers with high average power is beam shaping. By using a cooled reflective based liquid crystal spatial light modulator to generate different spot distributions, it is possible to spatially allocate the available power to avoid excessive high fluences. In our experiments, we determine the optimal fluence to ablate the maximum volume per watt to be in the range of 0.2-0.4 J/cm². Based on this fluence, we increase the number of spots from one to a maximum of twenty to ablate steel in a multilayer scanning-based process. In this context, we examine the influence of different separation distances between the spots on the ablation efficiency and roughness. Subsequently to these investigations, we develop an efficient roughing process with higher ablation rates and a nearly constant roughness.}, subject = {Ultrakurzzeitlaser}, language = {en} } @article{RothKeferHessleretal.2021, author = {Roth, Gian-Luca and Kefer, Stefan and Hessler, Steffen and Esen, Cemal and Hellmann, Ralf}, title = {Integration of Microfluidic and Photonic Components within Transparent Cyclic Olefin Copolymers by Using fs Laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {16}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, doi = {10.2961/jlmn.2021.01.2009}, pages = {1 -- 6}, year = {2021}, abstract = {In this study, we report on the integration of microfluidic channels and optical components by focusing femtosecond laser radiation inside transparent cyclic olefin copolymer (COC) bulk material. An internal localized material modification is triggered based on nonlinear absorption of the laser radiation's high intensities inside the focal volume. The size and shape of the three-dimensional internal modification are controlled by using an adaptive beam shaping setup. The irradiated areas show a positive refractive index shift and can be used as Type I internal optical waveguides. Furthermore, precise control of the spatial pulse-to-pulse distance in combination with a suitable beam profile enables the integration of functional photonic elements, e.g., Bragg gratings, into the waveguide. Thus, it also enables the generation of integrated photonic sensors. In addition, internal fs laser-induced modifications are characterized by a lower thermal stability as compared to the pristine polymer material. By performing a post-annealing process step, internal hollow microstructures are created by gaseous degradation of the exposed areas. Circular microchannels can be generated in a deliberately chosen layout by employing motorized 3D stages. In comparison to etching-based fabrication methods the proposed technology facilitates unlimited channel lengths, as it omits restrictions arising from an etching selectivity and duration. Altogether, this contribution paves the way towards the fabrication of internal three-dimensional optofluidic devices, equipped with a photonic sensor. In contrast, microfluidic and photonic structures are both created by femtosecond laser direct writing inside of transparent polymers.}, subject = {Femtosekundenlaser}, language = {en} } @article{KeferZettlEsenetal.2022, author = {Kefer, Stefan and Zettl, Julian and Esen, Cemal and Hellmann, Ralf}, title = {Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces}, series = {Materials}, volume = {15}, journal = {Materials}, number = {18}, doi = {10.3390/ ma15186233}, pages = {6233 -- 6233}, year = {2022}, abstract = {Sapphire is a robust and wear-resistant material. However, efficient and high-quality micromachining is still a challenge. This contribution demonstrates and discusses two novels, previously unreported approaches for femtosecond laser-based micromachining of rotational-symmetric sapphire workpieces, whereas both methods are in principal hybrids of laser scanning and laser turning or laser lathe. The first process, a combination of a sequential linear hatch pattern in parallel to the workpiece's main axis with a defined incremental workpiece rotation, enables the fabrication of sapphire fibers with diameters of 50 µm over a length of 4.5 mm. Furthermore, sapphire specimens with a diameter of 25 µm over a length of 2 mm can be fabricated whereas an arithmetical mean height, i.e., Sa parameter, of 281 nm is achieved. The second process combines a constant workpiece feed and orthogonal scanning with incremental workpiece rotation. With this approach, workpiece length limitations of the first process are overcome and sapphire fibers with an average diameter of 90 µm over a length of 20 cm are manufactured. Again, the sapphire specimen exhibits a comparable surface roughness with an average Sa value of 249 nm over 20 cm. Based on the obtained results, the proposed manufacturing method paves an innovative and flexible, all laser-based way towards the fabrication or microstructuring of sapphire optical devices, and thus, a promising alternative to chemical processes.}, subject = {Femtosekundenlaser}, language = {en} } @article{ZettlEsenHellmann2023, author = {Zettl, Julian and Esen, Cemal and Hellmann, Ralf}, title = {Fundamental Considerations and Analysis of the Energy Distribution in Laser Turning with Ultrashort Laser Pulses}, series = {mdpi Micromachines}, volume = {14}, journal = {mdpi Micromachines}, number = {10}, doi = {10.3390/mi14101838}, pages = {1 -- 15}, year = {2023}, abstract = {This article discusses the process of the laser turning of rotational symmetric, cylindrical components using ultrashort laser pulses with respect to the geometrical conditions and the resulting energy distribution during the laser turning process. As a result, process predictions and potential process optimizations are feasible. Particular attention is drawn to the laser spot formation on the cylindrical surface of the work piece in conjunction with the positioning of the laser beam relative to the rotation axis of the specimen. Based on fundamental calculations and experimental results, an optimum processing strategy is discussed, whereat the use of a trepanning optic in the laser turning process and the forming of a particular surface structure is additionally being issued.}, subject = {Ultrakurzzeitlaser}, language = {en} } @article{LutzHelmTschirpkeetal.2023, author = {Lutz, Christian and Helm, Jonas and Tschirpke, Katrin and Esen, Cemal and Hellmann, Ralf}, title = {Drilling Sequence Optimization Using Evolutionary Algorithms to Reduce Heat Accumulation for Femtosecond Laser Drilling with Multi-Spot Beam Profiles}, series = {MDPI Materials}, volume = {2023}, journal = {MDPI Materials}, number = {16/5775}, doi = {10.3390/ma16175775}, pages = {1 -- 12}, year = {2023}, abstract = {We report on laser drilling borehole arrays using ultrashort pulsed lasers with a particular focus on reducing the inadvertent heat accumulation across the workpiece by optimizing the drilling sequence. For the optimization, evolutionary algorithms are used and their results are verified by thermal simulation using Comsol and experimentally evaluated using a thermal imaging camera. To enhance process efficiency in terms of boreholes drilled per second, multi-spot approaches are employed using a spatial light modulator. However, as higher temperatures occur across the workpiece when using simultaneous multi-spot drilling as compared to a single-spot process, a subtle spatial distribution and sequence of the multi-spot approach has to be selected in order to limit the resulting local heat input over the processing time. Different optimization approaches based on evolutionary algorithms aid to select those drilling sequences which allow for the combination of a high efficiency of multi-spot profiles, a low-generated process temperature and a high-component quality. In particular, using a 4 x 4 laser spot array allows for the drilling of 40,000 boreholes in less than 76 s (526 boreholes/s) with a reduced temperature increase by about 35\%, as compared to a single spot process when employing an optimized drilling sequence.}, subject = {Laserbohren}, language = {en} } @article{SommerEsenHellmann2023, author = {Sommer, David and Esen, Cemal and Hellmann, Ralf}, title = {Static and Dynamic Mechanical Behaviour of Hybrid-PBF-LB/M-Built and Hot Isostatic Pressed Lattice Structures}, series = {Mechanical Properties of Polymeric, Metallic, and Composite Materials}, volume = {16}, journal = {Mechanical Properties of Polymeric, Metallic, and Composite Materials}, number = {9}, doi = {https://doi.org/10.3390/ma16093556}, pages = {1 -- 14}, year = {2023}, abstract = {We report on a comprehensive study of the mechanical properties of maraging steel body-centred cubic lattice structures fabricated by a hybrid additive manufacturing technology that combines laser powder bed fusion with in situ high-speed milling. As the mechanical properties of additive manufactured components are inferior to, e.g., cast components, surface modifications can improve the mechanical behaviour. Different hybrid additive manufacturing technologies have been designed using additive and subtractive processes, improving process quality. Following this, mechanical testing is performed with respect to static tensile properties and dynamic stress, hardness, and porosity, comparing specimens manufactured by laser powder bed fusion only to those manufactured by the hybrid approach. In addition, the influence of different heat-treatment techniques on the mechanical behaviour of the lattice structures is investigated, namely solution and aging treatment as well as hot isostatic pressing. Thus, the influence of the superior surface quality due to the hybrid approach is evaluated, leading to, e.g., an offset of about 14-16\% for the static testing of HIP lattice structures. Furthermore, the dynamic load behaviour can be improved with a finished surface, heading to a shift of the different zones of fatigue behaviour in the testing of hybrid-built specimens.}, subject = {Isostatisches Heißpressen}, language = {de} } @article{BischoffMueckeRothetal.2022, author = {Bischoff, Kay and M{\"u}cke, Dominik and Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {UV-Femtosecond-Laser Structuring of Cyclic Olefin Copolymer}, series = {Polymers}, volume = {14}, journal = {Polymers}, number = {14}, doi = {https://doi.org/10.3390/polym14142962}, pages = {2962 -- 2962}, year = {2022}, abstract = {We report on the laser ablation of cyclic olefin copolymer using an amplified ultrashort pulsed laser in the ultraviolet spectral range. In addition to a high ablation depth per laser-structured layer up to 74 μm at a fluence of 22 J cm-2, an excellent mean roughness 𝑅𝑎 of laser-patterned surfaces down to 0.5 μm is demonstrated. Furthermore, with increasing fluence, increasing ablation efficiencies up to 2.5 mm3 W-1 min-1 are determined. Regarding the quality of the ablation, we observed steep ablation flanks and low debris formation, though for fluences above 10.5 J cm-2 the formation of troughs was observed, being attributed to multiple reflections on the ablation flanks. For comparison, laser ablation was performed under identical conditions with an infrared laser wavelength. The results highlight that UV ablation exhibits significant advantages in terms of ablation efficiency, surface roughness and quality. Moreover, our results show that a larger UV focus spot accelerates the ablation process with comparable quality, paving the way for high-power UV ultrashort pulsed lasers towards an efficient and qualitative tool for the laser machining of cyclic olefin copolymer. The production of complex microfluidics further underlines the suitability of this type of laser.}, subject = {Femtosekundenlaser}, language = {en} } @article{BischoffKeferWienkeetal.2023, author = {Bischoff, Kay and Kefer, Stefan and Wienke, Alexander and Overmeyer, Ludger and Kaierle, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Integration of Bragg gratings in aerosol-jetted polymer optical waveguides for strain monitoring capabilities}, series = {Optics Letters}, volume = {48}, journal = {Optics Letters}, number = {7}, doi = {https://doi.org/10.1364/OL.481801}, pages = {1778 -- 1781}, year = {2023}, abstract = {We demonstrate and discuss the integration of Bragg gratings in aerosol-jetted polymer optical waveguides, produced in the optical assembly and connection technology for component-integrated bus systems (OPTAVER) process. By using a femtosecond laser and adaptive beam shaping, an elliptical focal voxel generates different types of single pulse modification by nonlinear absorption in the waveguide material, which are arranged periodically to form Bragg gratings. Integration of a single grating structure or, alternatively, an array of Bragg grating structures in the multimode waveguide yields a pronounced reflection signal with typical multimodal properties, i.e., a number of reflection peaks with non-Gaussian shapes. However, the main wavelength of reflection, located around 1555 nm, is evaluable by means of an appropriate smoothing algorithm. When loaded by mechanical bending, a pronounced Bragg wavelength shift of this reflected peak up to 160 pm is detected. This demonstrates that the additively manufactured waveguides can be used not only for signal transmission but also as a sensor.}, subject = {Bragg-Reflektor}, language = {de} } @article{BischoffEsenHellmann2023, author = {Bischoff, Kay and Esen, Cemal and Hellmann, Ralf}, title = {Preparation of Dispersed Copper(II) Oxide Nanosuspensions as Precursor for Femtosecond Reductive Laser Sintering by High-Energy Ball Milling}, series = {Nanomaterials}, volume = {13}, journal = {Nanomaterials}, number = {19}, doi = {https://doi.org/10.3390/nano13192693}, pages = {2693 -- 2693}, year = {2023}, abstract = {This contribution demonstrates and discusses the preparation of finely dispersed copper(II) oxide nanosuspensions as precursors for reductive laser sintering (RLS). Since the presence of agglomerates interferes with the various RLS sub-processes, fine dispersion is required, and oversized particles must be identified by a measurement methodology. Aside from the established method of scanning electron microscopy for imaging individual dried particles, this work applies the holistic and statistically more significant laser diffraction in combination with dynamic image analysis in wet dispersion. In addition to direct ultrasonic homogenization, high-energy ball milling is introduced for RLS, to produce stable nanosuspensions with a high fine fraction, and, above all, the absence of oversize particles. Whereas ultrasonic dispersion stagnates at particle sizes between 500 nm and 20 μm, even after 8 h, milled suspension contains a high proportion of finest particles with diameters below 100 nm, no agglomerates larger than 1 μm and a trimodal particle size distribution with the median at 50 nm already, after 100 min of milling. The precursor layers produced by doctor blade coating are examined for their quality by laser scanning microscopy. The surface roughness of such a dry film can be reduced from 1.26 μm to 88 nm by milling. Finally, the novel precursor is used for femtosecond RLS, to produce homogeneous, high-quality copper layers with a sheet resistance of 0.28 Ω/sq and a copper mass concentration of 94.2\%.}, subject = {Laserstrahlsintern}, language = {en} } @inproceedings{BischoffEsenHellmann2023, author = {Bischoff, Kay and Esen, Cemal and Hellmann, Ralf}, title = {Acceleration of Femtosecond Reductive Laser Sintering of Copper(II) Oxide for Conductive Copper Patterns on Cyclic Olefin Copolymers}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on the acceleration of femtosecond reductive laser sintering of copper (II) oxide on the surface of transparent cyclic olefin copolymers (COC) by varying the focus size to generate metallic copper (Cu) layers. By using different focusing conditions, different process speeds are achieved, and the structural accuracies are controlled. The formation of Cu lines is observed for different focus sizes at various scan speeds, which is attributed to laser exposure duration and chemical reaction time. The formed lines are categorized and measured by optical microscopy and provide the basis for two-dimensional Cu surfaces. By hatching, high quality conductive films are produced with an increased focus diameter of up to 400 µm at a scan speed of 400 mm/s and a hatch distance of 250 µm resulting in a multiple increased process speed by a factor of thirteen compared to previous research. Using 4-tip measurement , a low sheet resistance of 0.165 Ω/sq was validated on these Cu films, which have an atomic Cu content of 89.5\%.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{BischoffMueckeEsenetal.2023, author = {Bischoff, Kay and M{\"u}cke, Dominik and Esen, Cemal and Hellmann, Ralf}, title = {UV-Femtosecond-Laser Structuring of Silicon Carbide}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on ultraviolet ultrashort pulsed laser processing of silicon carbide. Laser ablated cavities are evaluated with respect to their ablation rates, surface roughness and overall quality by varying the laser pulse fluence. Using this type of laser, high edge quality and surface roughness down to 107 nm can be achieved with an ablation efficiency of up to 0.228 mm 3 W -1 min -1. Functional surfaces are produced by generating laser induced periodic surface structures. The comparison with infrared wavelength underlines the advantages of the ultraviolet wavelength for laser micro machining this material. Significant differences with respect to the measured ablation depths and roughness as well as generated micro-and nanostructures appear. While infrared ablation is dominated by a chipping mechanism above a critical fluence of 9.93 Jcm -2 , higher ablation rates are observed with strong quality losses at the same time. In comparison to the infrared emission wavelength, in general , a significantly higher processing quality is achieved with the ultraviolet emission wavelength. In addition, the influence of spot size and repetition rate in UV processing is investigated. By increasing these parameters, a process acceleration without quality losses is enabled. The generation of a sophisticated microstructure exemplifies the advantages of processing silicon carbide with the UV laser reported here.}, subject = {Femtosekundenlaser}, language = {en} } @article{BischoffMueckeSchubertetal.2024, author = {Bischoff, Kay and M{\"u}cke, Dominik and Schubert, Andreas and Esen, Cemal and Hellmann, Ralf}, title = {Rheological Investigation of Highly Filled Copper(II) Oxide Nanosuspensions to Optimize Precursor Particle Content in Reductive Laser-Sintering}, series = {Liquids}, volume = {4}, journal = {Liquids}, number = {2}, publisher = {MDPI AG}, issn = {2673-8015}, doi = {http://dx.doi.org/10.3390/liquids4020019}, pages = {382 -- 392}, year = {2024}, abstract = {In this article, the particle concentration of finely dispersed copper(II) oxide nanosuspensions as precursors for reductive laser sintering (RLS) is optimized on the basis of rheological investigations. For this metallization process, a smooth, homogeneous and defect-free precursor layer is a prerequisite for adherent and reproducible copper structures. The knowledge of the rheological properties of an ink is crucial for the selection of a suitable coating technology as well as for the adjustment of the ink formulation. Different dilutions of the nanosuspension were examined for their rheological behavior by recording flow curves. A strong shear thinning behavior was found and the viscosity decreases exponentially with increasing dilution. The viscoelastic behavior was investigated by a simulated doctor blade coating process using three-interval thixotropy tests. An overshoot in viscosity is observed, which decreases with increasing thinning of the precursor. As a comparison to these results, doctor blade coating of planar glass and polymer substrates was performed to prepare precursor layers for reductive laser sintering. Surface morphology measurements of the resulting coatings using laser scanning microscopy and rheological tests show that homogeneous precursor layers with constant thickness can be produced at a particle-solvent ratio of 1.33. A too-high particle content results in an irregular coating layer with deep grooves and a peak-to-valley height Sz of up to 7.8 μm. Precise dilution control allows the fabrication of smooth surfaces with a Sz down to 1.5 μm.}, subject = {Laserstrahlsintern}, language = {en} } @article{BischoffEsenHellmann2024, author = {Bischoff, Kay and Esen, Cemal and Hellmann, Ralf}, title = {Femtosecond reductive Laser Sintering under multiple focus conditions for rapid production of conductive copper layers}, series = {Procedia CIRP}, volume = {124}, journal = {Procedia CIRP}, publisher = {Elsevier BV}, issn = {2212-8271}, doi = {http://dx.doi.org/10.1016/j.procir.2024.08.189}, pages = {629 -- 633}, year = {2024}, subject = {Femtosekundenlaser}, language = {en} } @article{SommerHornungEsenetal.2024, author = {Sommer, David and Hornung, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Surface roughness optimization of hybrid PBF-LB/M-built Inconel 718 using in situ high-speed milling}, series = {The International Journal of Advanced Manufacturing Technology}, volume = {132}, journal = {The International Journal of Advanced Manufacturing Technology}, number = {3-4}, publisher = {Springer Science and Business Media LLC}, issn = {0268-3768}, doi = {http://dx.doi.org/10.1007/s00170-024-13382-5}, pages = {1741 -- 1751}, year = {2024}, abstract = {AbstractWe report on the optimization of the surface roughness of hybrid additive manufactured Ni superalloys, combining a conventional laser powder bed fusion process with in situ high-speed milling. This remarkable hybrid approach has only recently been applied to different steel types and barely to Ni superalloys which opposite to steel appear to be challenging for milling processes, particularly within the powderbed of laser powder bed fusion. Different influencing factors on the surface roughness are varied in this study, following the Taguchi method. Their effect is evaluated with respect to the average surface roughness and the maximum surface roughness. The signal-to-noise ratio for the varied parameters infeed, z-pitch, feed rate, and spindle speed is calculated, determining their relevance on the surface roughness, and defining an optimal parameter combination. As the surface quality is optimized to \$\$\varvec{R_a=0.47\, \mu m}\$\$ R a = 0.47 μ m , the definition of the optimal parameter combination is of the highest relevance for the application of this novel manufacturing approach for Inconel. Using linear regression, the resulting surface roughness of these parameters is predicted, getting validated by the experimental evaluation. Due to a further analysis, including EDX analysis and a quantitative element analysis at different positions of the flank of the milling cutter, wear characteristics as well as the dissipation of the coating of the milling cutter are detected. The flank wear and the resulting breakage of the cutting edge are defined as the main reasons of a rising surface roughness.}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {en} } @inproceedings{SommerHornungEsenetal.2024, author = {Sommer, David and Hornung, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Optimization of mechanical properties of additive manufactured IN 718 parts combining LPBF and in-situ high-speed milling}, series = {Laser 3D Manufacturing XI}, booktitle = {Laser 3D Manufacturing XI}, editor = {Gu, Bo and Chen, Hongqiang}, publisher = {SPIE}, doi = {http://dx.doi.org/10.1117/12.3000952}, year = {2024}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {en} } @inproceedings{SommerSafiEsenetal.2024, author = {Sommer, David and Safi, Abdulrahman and Esen, Cemal and Hellmann, Ralf}, title = {Additive manufacturing of Nickel-based superalloy: optimization of surface roughness using integrated high-speed milling}, series = {Laser 3D Manufacturing XI}, booktitle = {Laser 3D Manufacturing XI}, editor = {Gu, Bo and Chen, Hongqiang}, publisher = {SPIE}, doi = {http://dx.doi.org/10.1117/12.3000972}, year = {2024}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {en} } @article{SchleierAdelmannEsenetal.2022, author = {Schleier, Max and Adelmann, Benedikt and Esen, Cemal and Hellmann, Ralf}, title = {Image Processing Algorithm for In Situ Monitoring Fiber Laser Remote Cutting by a High-Speed Camera}, series = {Sensors}, volume = {22}, journal = {Sensors}, number = {8}, publisher = {MDPI AG}, issn = {1424-8220}, doi = {10.3390/s22082863}, year = {2022}, abstract = {We present an in situ process monitoring approach for remote fiber laser cutting, which is based on evaluating images from a high-speed camera. A specifically designed image processing algorithm allows the distinction between complete and incomplete cuts by analyzing spectral and geometric information of the melt pool from the captured images of the high-speed camera. The camera-based monitoring system itself is fit to a conventional laser deflection unit for use with high-power fiber lasers, with the optical detection path being coaxially aligned to the incident laser. Without external illumination, the radiation of the melt from the process zone is recorded in the visible spectral range from the top view and spatially and temporally resolved. The melt pool size and emitted sparks are evaluated in dependence of machining parameters such as feed rate, cycles, and focus position during cutting electrical sheets.}, subject = {Laserschneiden}, language = {en} } @article{SchleierEsenHellmann2022, author = {Schleier, Max and Esen, Cemal and Hellmann, Ralf}, title = {High speed melt flow monitoring and development of an image processing algorithm for laser fusion cutting}, series = {Journal of Laser Applications}, volume = {34}, journal = {Journal of Laser Applications}, number = {4}, publisher = {Laser Institute of America}, issn = {1042-346X}, doi = {10.2351/7.0000785}, year = {2022}, abstract = {This contribution presents high-speed camera monitoring of melt pool dynamics for steel during laser fusion cutting and compares the images with recordings in aluminum. The experiments are performed by a 4 kW multimode fiber laser with an emission wavelength of 1070 nm. To visualize the thermal radiation from the process zone during the cutting process, the kerf is captured at sample rates of up to 170 000 frames per second without external illumination with a spectral response between 400 and 700 nm, allowing measurements of the melt flow dynamics from geometric image features. The dependencies of the melt flow dynamics on laser processing parameters, such as feed rate, gas pressure, and laser power, can be evaluated. The monitoring system is placed both off-axis and mounted to a conventional cutting head, with the monitoring path aligned to the processing laser for a coaxial and lateral view of the cut kerf. The measured signal characteristics of the images captured from the melt pool are examined in the visible spectral range of the emitted thermal radiation from the process zone. Moreover, a specifically developed image processing algorithm is developed that process and analyze the captured images and extract geometric information for a measurement of the melt flow.}, subject = {Laserschneiden}, language = {en} } @article{SchleierEsenHellmann2023, author = {Schleier, Max and Esen, Cemal and Hellmann, Ralf}, title = {Evaluation of a Cut Interruption Algorithm for Laser Cutting Steel and Aluminum with a High-Speed Camera}, series = {Applied Sciences}, volume = {13}, journal = {Applied Sciences}, number = {7}, publisher = {MDPI AG}, issn = {2076-3417}, doi = {10.3390/app13074557}, year = {2023}, abstract = {We report on a monitoring system based on a high-speed camera for fiber laser fusion cutting. The monitoring system is used without an external illumination retrofit on a conventional cutting head, with the optical path aligned coaxially to the incident laser, permitting a direct, spatially, and temporally resolved detection of the melt pool area in the cut kerf from the top view. The dependence of the melt pool area on laser processing parameters such as laser power and feed rate are thus evaluated for stainless steel, zinc-coated steel, and aluminum, respectively. The signal characteristics of the images captured from the melt pool are examined in the visible spectral range of the emitted secondary thermal radiation from the process zone. An ad hoc developed image processing algorithm analyzes the spectral and geometric information of the melt pool from high-speed camera images and distinguishes between complete and incomplete cuts.}, subject = {Laserschneiden}, language = {en} } @article{SchleierEsenHellmann2025, author = {Schleier, Max and Esen, Cemal and Hellmann, Ralf}, title = {Vision transformer based cut interruption detection and prediction of laser fusion cutting from monitored melt pool images}, series = {Journal of Laser Applications}, volume = {37}, journal = {Journal of Laser Applications}, number = {1}, publisher = {Laser Institute of America}, issn = {1042-346X}, doi = {10.2351/7.0001611}, year = {2025}, abstract = {Incomplete cuts during laser fusion cutting result in a closed kerf, preventing the workpiece from detaching from the sheet and resulting in rework or rejection. We demonstrate the approach of a vision transformer, used for image classification, to detect cut interruption during laser fusion cutting in steel and aluminum. With events impending an incomplete cut in steel, we attempt to predict cut interruption before they even occur. To build a data set for training, cutting experiments are carried out with a 4 kW fiber laser, forcing incomplete cuts by varying the process parameters such as laser power and feed rate. The thermal radiation from the process zone during the cutting process is captured with a size of 256 × 256 px2 at sample rates of 20 × 103 fps. The kerf is recorded with a spectral sensitivity between 400 and 700 nm, without external illumination, which enables the melt to be observed in the range of the visual spectrum. The vision transformer model, which is used for image classification, splits the image into patches, linearly embedded with an added position embedding, and fed to a standard transformer encoder. For training the model, a set of images was labeled for the respective classes of a complete, incomplete, and impending incomplete cut. With the trained model, incomplete cuts in steel and aluminum can then be recognized and impending incomplete cuts in steel can be predicted in advance.}, subject = {Laserschneiden}, language = {en} } @inproceedings{LutzSommerhuberKettneretal.2024, author = {Lutz, Christian and Sommerhuber, Ryan and Kettner, Matthias and Esen, Cemal and Hellmann, Ralf}, title = {Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000954}, year = {2024}, abstract = {We report on process sensing using a membrane-free optical microphone to monitor the acoustic emission during ultrashort pulsed laser ablation of multilayer materials. The acoustic emission during ablation is used to detect material transitions, with the specific signatures allowing to create a reliable process control for identifying individual layers. The outstanding properties of membrane-free optical microphones in terms of high bandwidth and high temporal resolution are ideally qualified for characterizing an ultrashort pulsed laser process, with its properties and capabilities being presented in this contribution. In particular, for layer- and material-selective ablation of multilayer printed circuit board components, copper and polyimide layers are ablated and the material transition is detected by analyzing the acoustic signal at different frequency levels, which is a novelty in the field of ultrashort pulsed laser process sensing. The investigations show, that the optical microphone can be used to resolve both the scanning paths and ablated layers by means of interruptions in a time-resolved acoustic spectrogram. Furthermore, as a result of a higher ablation rate of polyimide compared to copper and thus the increase of the emitted acoustic energy, the material transition between copper and polyimide layers can clearly be detected. The detection of this process event can be used for process control.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{LutzHelmEsenetal.2024, author = {Lutz, Christian and Helm, Jonas and Esen, Cemal and Hellmann, Ralf}, title = {Computational optimization of borehole sequences for the reduction of heat accumulation in drilling processes using ultrashort pulse lasers}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000930}, year = {2024}, abstract = {We report on laser drilling of borehole arrays using a high-power ultrashort pulse laser with particular focus on reducing heat accumulation in the workpiece by optimizing the drilling sequence, particularly for highly efficient multi-spot drilling. Different optimization approaches are chosen to improve the drilling sequence, also comparing a simplex algorithm and an evolutionary algorithm. From a laser application point of view, we also compare drilling sequences using a single spot and up to 16-fold multi-spots generated by a spatial light modulator, as to accelerate the drilling process in terms of the number of drilled holes per second. To evaluate the temperatures generated during drilling of up to 40,000 holes in less than 76 seconds in stainless steel foil, temperatures are measured by a thermal imaging camera and subsequently compared to a COMSOL-based simulation for all optimized drilling sequences. With respect to an average temperature of 706 °C without optimization, a reduction by 252 °C, i.e., a reduction by nearly 36 \% based on the Celsius scale, is achieved using a 4 × 4 beam splitter and an optimized drilling sequence with a drilling rate of 526 holes per second. In addition, using a 2 × 2 beam splitter, a temperature reduction of up to 40.5 \% is achieved for a drilling process with a rate of 129 holes per second using an optimized drilling sequence.}, subject = {Ultrakurzzeitlaser}, language = {en} } @article{MarxSeefeldtHaskeetal.2025, author = {Marx, Jan and Seefeldt, Malte and Haske, Damian and Lutz, Christian and Hellmann, Ralf and Esen, Cemal and Ostendorf, Andreas}, title = {Holographic freeform micro hole processing using Bessel beams}, series = {Optics \& Laser Technology}, volume = {183}, journal = {Optics \& Laser Technology}, publisher = {Elsevier BV}, issn = {0030-3992}, doi = {10.1016/j.optlastec.2024.112287}, year = {2025}, abstract = {Bessel beams are advantageous tools for micro drilling applications due to their diffraction-free properties, their long focal length, and their small focal spot diameter. However, their application in industry is limited because they are challenging to integrate into flexible beam shaping systems. This work is intended to overcome limitations in flexibility by presenting a new approach paving the way to high-aspect ratio freeform holes. Therefore, a spatial light modulator was integrated into an axicon-based setup to merge diffraction-free ablation with the flexibility of holographic spatial beam shaping. A dynamic change of the phase hologram displayed on the spatial light modulator during the process allows for the generation of arbitrary ablation geometries. In contrast to other holographic approaches, the diffraction-free nature of the Bessel beam allows ablation over an extended focal depth without any focus control needed. The applicability of the approach was demonstrated by processing arbitrary hole shapes, such as ellipses, squares, or star-shapes. The hole sizes of the freeform holes range from 4 μm to 80 μm. Furthermore, up-scaling of the process is demonstrated by using the setup for generation of multi-Bessel spots.}, subject = {Mikrobearbeitung}, language = {en} } @article{LutzJungTschirpkeetal.2022, author = {Lutz, Christian and Jung, Marcel and Tschirpke, Katrin and Esen, Cemal and Hellmann, Ralf}, title = {Optimization of Heat Accumulation during Femtosecond Laser Drilling Borehole Matrices by Using a Simplex Algorithm}, series = {Materials}, volume = {15}, journal = {Materials}, number = {14}, publisher = {MDPI AG}, issn = {1996-1944}, doi = {10.3390/ma15144829}, year = {2022}, abstract = {We report on an optimization study of percussion drilling thin metal sheets employing a high repetition rate, high power femtosecond laser with respect to the resulting heat accumulation. A specified simplex algorithm was employed to optimize the spatial drilling sequence, whereas a simplified thermal simulation using COMSOL was validated by comparing its results to the temperature measurements using an infrared camera. Optimization for drilling borehole matrices was aspired with respect to the generated temperature across the processed specimen, while the drilling strategy was altered in its spatial drilling sequence and by using multi-spot approaches generated by a spatial light modulator. As a result, we found that an optimization strategy based on limited consecutive holes in a Moore neighborhood led to reduced temperatures and the shortest process times.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{LutzSchwarzRungetal.2021, author = {Lutz, Christian and Schwarz, Simon and Rung, Stefan and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, abstract = {We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{KeferZettlSchmaussetal.2023, author = {Kefer, Stefan and Zettl, Julian and Schmauss, Bernhard and Esen, Cemal and Hellmann, Ralf}, title = {High-Precision Micromachining of Sapphire Towards Optical Waveguiding Structures using Femtosecond Lasers}, series = {Laser-based Micro- and Nanoprocessing XVII}, booktitle = {Laser-based Micro- and Nanoprocessing XVII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Watanabe, Akira}, isbn = {9781510659230}, doi = {10.1117/12.2648758}, pages = {3 -- 11}, year = {2023}, abstract = {While sapphire is one of the most durable materials, its properties entail that high-precision machining, especially in the sub-millimeter regime, is still challenging. This contribution demonstrates and discusses novel femtosecond laser-based micromachining approaches for the fabrication of rotational-symmetric sapphire workpieces, specifically the generation of optical fibers by means of laser lathe of sapphire rods and the practical realization of windmill fibers. In addition, volume refractive index modification in planar sapphire substrates is presented to induce photonic crystal waveguides. The micromachined structures are comprehensively examined with respect to geometric fidelity, surface roughness, refractive index modification, and potential optical waveguiding properties. All micromachining approaches are done by means of frequency-doubled or frequency-tripled femtosecond laser radiation. Different laser optical setups including laser scanning head, spatial beam profilers including a spatial light modulator and axial rotatory movement of the specimen are employed for micro structuring and in-depth refractive index modifications. In particular for laser lathe, a sophisticated scanning pattern, in combination with an incremental axial rotatory movement of the specimen, allows for the precise diameter reduction of sapphire rods with 250 µm diameter to fibers with outer diameters of 25 µm. By supporting the workpiece with a V-groove fixture, multi-mode fibers with lengths up to 20 cm can be processed with an average surface roughness of 250 nm. Additionally, an adapted ablation scanning sequence enables the first practical demonstration of sapphire windmill fibers. Furthermore, using a spatial light modulator allows for the adaption of the laser propagation properties as to enable volume refractive index modifications with free-form arrangement. Hexagonal patterns of refractive index modifications surrounding a pristine waveguide core are fabricated and single-mode waveguiding at 1550 nm is verified. Finally, the possibility of integrating Bragg gratings into this photonic waveguide type is demonstrated}, subject = {Femtosekundenlaser}, language = {en} } @article{YangBischoffMueckeetal.2024, author = {Yang, Yongting and Bischoff, Kay and M{\"u}cke, Dominik and Esen, Cemal and Hellmann, Ralf}, title = {UV-ultrashort pulsed laser ablation of fused silica}, series = {Journal of Laser Applications}, volume = {36}, journal = {Journal of Laser Applications}, number = {1}, publisher = {Laser Institute of America}, issn = {1042-346X}, doi = {http://dx.doi.org/10.2351/7.0001197}, year = {2024}, abstract = {The authors report on ultraviolet ultrashort pulsed laser ablation of fused silica and compare the achievable micromachining results to those obtained by using the fundamental emission wavelength in infrared. Ablation in ultraviolet reveals a stable efficiency for increasing fluences, whereas using an infrared beam exhibits a decreasing trend of the ablation efficiency at higher and increasing fluences. In addition, a significant improvement in the surface quality is found by using an ultraviolet wavelength in a fluence range up to 20 J/cm2 compared to infrared, e.g., revealing an Ra of down to 0.45 μm on using the ultraviolet wavelength compared to Ra = 0.56 μm on using infrared at fluences up 15 J/cm2. Moreover, taking advantage of the high available pulse energy, the authors compare the achievable ablation efficiency and surface roughness using a conventionally focused ultraviolet beam and a defocused ultraviolet beam, finding that the defocused ultraviolet beam possesses a processing quality comparable to that of the focused beam. Finally, the authors exemplify the potential of ultraviolet ultrashort pulsed laser ablation by using a Tesla mixer for microfluidic integration of fused silica.}, subject = {Laserablation}, language = {en} } @article{LutzSchwarzMarxetal.2023, author = {Lutz, Christian and Schwarz, Simon and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Multi-Bessel Beams Generated by an Axicon and a Spatial Light Modulator for Drilling Applications}, series = {MDPI Photonics}, volume = {2023}, journal = {MDPI Photonics}, number = {10/413}, doi = {10.3390/photonics10040413}, pages = {1 -- 9}, year = {2023}, abstract = {We report on an optical setup to generate multi-Bessel beam profiles combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams offer advantageous properties for micro drilling processes and internal volume processing, especially for transparent materials. In addition, the laser power of industrial, ultrashort pulsed lasers has increased significantly over the last few years, offering the possibility for highly efficient processes using multi-spot profiles. Our optical concept combines the dynamic possibilities of beam splitting using a spatial light modulator with the benefits of Bessel beams, which facilitates multi-Bessel beam processing. Beside the simulation and experimental evaluation of the generated multi-Bessel beams, we exemplify the applicability of the developed module for the perforation of thin metal foils by micro drilling.}, subject = {Bessel-B{\"u}ndel}, language = {en} } @inproceedings{MarxEsenLutzetal.2023, author = {Marx, Jan and Esen, Cemal and Lutz, Christian and Hellmann, Ralf and Ostendorf, Andreas}, title = {Holographic tuning of physical axicons}, volume = {2023}, number = {154}, publisher = {LiM 2023 Proceedings}, pages = {1 -- 9}, year = {2023}, abstract = {Axicon generated Bessel beams are a popular tool for high aspect ratio precision laser drilling. Spot diameter and working distance are given by the geometric parameters of the axicon and the wavelength used. Thus, it is difficult to manipulate the beam shape of a Bessel beam for a given setup. Spatial light modulators (SLMs) overcome limitations in flexibility. However, due to the limited phase shift of SLMs, only Bessel beams with flat cone angles and large focal length can be generated. In this contribution, an approach for generating Bessel beams with a shorter, but tunable focal length is presented. A physical axicon was combined with an SLM. A holographic image of a negative axicon is put on the SLM to generate a ring beam, which is focused by a subsequent physical axicon to get a small focal diameter. Thus, different sized high aspect ratio micro holes can be drilled without using any moving components.}, subject = {Bessel-B{\"u}ndel}, language = {en} }