@inproceedings{RungBischoffJaegeretal.2014, author = {Rung, Stefan and Bischoff, Christian and J{\"a}ger, Erwin and Umhofer, Udo and Hellmann, Ralf}, title = {Laser thin film ablation with multiple beams and tailored beam profiles}, series = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, volume = {8967}, booktitle = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, year = {2014}, subject = {Laserablation}, language = {en} } @inproceedings{JaegerRaedelBischoffetal.2014, author = {J{\"a}ger, Erwin and R{\"a}del, Ulrich and Bischoff, Christian and Umhofer, Udo and Rung, Stefan and Hellmann, Ralf}, title = {Laser micromachining - parallel processing with multiple top hat beams}, series = {8th International Conference on Photonic Technologies LANE 2014}, booktitle = {8th International Conference on Photonic Technologies LANE 2014}, year = {2014}, subject = {Laserbearbeitung}, language = {de} } @inproceedings{BischoffJaegerRungetal.2012, author = {Bischoff, Christian and J{\"a}ger, Erwin and Rung, Stefan and Hellmann, Ralf}, title = {Diffractive beam shaping optics for efficient micromachining}, series = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, booktitle = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, year = {2012}, subject = {Laserbearbeitung}, language = {en} }