@article{LutzRothRungetal.2021, author = {Lutz, Christian and Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Efficient Ultrashort Pulsed Laser Processing by Dynamic Spatial Light Modulator Beam Shaping for Industrial Use}, series = {Journal of Laser Micro/Nanoengineering}, volume = {16}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, doi = {10.2961/jlmn.2021.01.2011}, pages = {1 -- 6}, year = {2021}, abstract = {We report on the effect of different transversal beam shapes on the efficiency of ablation processes and the resulting surface characteristics. A possibility to efficiently apply ultrashort pulsed lasers with high average power is beam shaping. By using a cooled reflective based liquid crystal spatial light modulator to generate different spot distributions, it is possible to spatially allocate the available power to avoid excessive high fluences. In our experiments, we determine the optimal fluence to ablate the maximum volume per watt to be in the range of 0.2-0.4 J/cm². Based on this fluence, we increase the number of spots from one to a maximum of twenty to ablate steel in a multilayer scanning-based process. In this context, we examine the influence of different separation distances between the spots on the ablation efficiency and roughness. Subsequently to these investigations, we develop an efficient roughing process with higher ablation rates and a nearly constant roughness.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{LutzSchwarzRungetal.2021, author = {Lutz, Christian and Schwarz, Simon and Rung, Stefan and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, abstract = {We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{MarxEsenLutzetal.2023, author = {Marx, Jan and Esen, Cemal and Lutz, Christian and Hellmann, Ralf and Ostendorf, Andreas}, title = {Holographic tuning of physical axicons}, volume = {2023}, number = {154}, publisher = {LiM 2023 Proceedings}, pages = {1 -- 9}, year = {2023}, abstract = {Axicon generated Bessel beams are a popular tool for high aspect ratio precision laser drilling. Spot diameter and working distance are given by the geometric parameters of the axicon and the wavelength used. Thus, it is difficult to manipulate the beam shape of a Bessel beam for a given setup. Spatial light modulators (SLMs) overcome limitations in flexibility. However, due to the limited phase shift of SLMs, only Bessel beams with flat cone angles and large focal length can be generated. In this contribution, an approach for generating Bessel beams with a shorter, but tunable focal length is presented. A physical axicon was combined with an SLM. A holographic image of a negative axicon is put on the SLM to generate a ring beam, which is focused by a subsequent physical axicon to get a small focal diameter. Thus, different sized high aspect ratio micro holes can be drilled without using any moving components.}, subject = {Bessel-B{\"u}ndel}, language = {en} } @article{LutzHelmTschirpkeetal.2023, author = {Lutz, Christian and Helm, Jonas and Tschirpke, Katrin and Esen, Cemal and Hellmann, Ralf}, title = {Drilling Sequence Optimization Using Evolutionary Algorithms to Reduce Heat Accumulation for Femtosecond Laser Drilling with Multi-Spot Beam Profiles}, series = {MDPI Materials}, volume = {2023}, journal = {MDPI Materials}, number = {16/5775}, doi = {10.3390/ma16175775}, pages = {1 -- 12}, year = {2023}, abstract = {We report on laser drilling borehole arrays using ultrashort pulsed lasers with a particular focus on reducing the inadvertent heat accumulation across the workpiece by optimizing the drilling sequence. For the optimization, evolutionary algorithms are used and their results are verified by thermal simulation using Comsol and experimentally evaluated using a thermal imaging camera. To enhance process efficiency in terms of boreholes drilled per second, multi-spot approaches are employed using a spatial light modulator. However, as higher temperatures occur across the workpiece when using simultaneous multi-spot drilling as compared to a single-spot process, a subtle spatial distribution and sequence of the multi-spot approach has to be selected in order to limit the resulting local heat input over the processing time. Different optimization approaches based on evolutionary algorithms aid to select those drilling sequences which allow for the combination of a high efficiency of multi-spot profiles, a low-generated process temperature and a high-component quality. In particular, using a 4 x 4 laser spot array allows for the drilling of 40,000 boreholes in less than 76 s (526 boreholes/s) with a reduced temperature increase by about 35\%, as compared to a single spot process when employing an optimized drilling sequence.}, subject = {Laserbohren}, language = {en} } @article{LutzSchwarzMarxetal.2023, author = {Lutz, Christian and Schwarz, Simon and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Multi-Bessel Beams Generated by an Axicon and a Spatial Light Modulator for Drilling Applications}, series = {MDPI Photonics}, volume = {2023}, journal = {MDPI Photonics}, number = {10/413}, doi = {10.3390/photonics10040413}, pages = {1 -- 9}, year = {2023}, abstract = {We report on an optical setup to generate multi-Bessel beam profiles combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams offer advantageous properties for micro drilling processes and internal volume processing, especially for transparent materials. In addition, the laser power of industrial, ultrashort pulsed lasers has increased significantly over the last few years, offering the possibility for highly efficient processes using multi-spot profiles. Our optical concept combines the dynamic possibilities of beam splitting using a spatial light modulator with the benefits of Bessel beams, which facilitates multi-Bessel beam processing. Beside the simulation and experimental evaluation of the generated multi-Bessel beams, we exemplify the applicability of the developed module for the perforation of thin metal foils by micro drilling.}, subject = {Bessel-B{\"u}ndel}, language = {en} }