@inproceedings{RungBischoffJaegeretal.2014, author = {Rung, Stefan and Bischoff, Christian and J{\"a}ger, Erwin and Umhofer, Udo and Hellmann, Ralf}, title = {Laser thin film ablation with multiple beams and tailored beam profiles}, series = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, volume = {8967}, booktitle = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, year = {2014}, subject = {Laserablation}, language = {en} }