@article{HeilmannHellmannSeidl2011, author = {Heilmann, Eva-Maria and Hellmann, Ralf and Seidl, Albrecht}, title = {Water Jet Guided Laser Cutting of Silicon Thin Films Using 515nm Disc Laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {6}, journal = {Journal of Laser Micro/Nanoengineering}, number = {2}, pages = {168}, year = {2011}, subject = {Laserschneiden}, language = {en} }